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公开(公告)号:US20080129417A1
公开(公告)日:2008-06-05
申请号:US11907704
申请日:2007-10-16
申请人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号: H03H9/56
CPC分类号: H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要: A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译: 梯形滤波器包括串联谐振器,其具有第一膜层叠体,其中上电极和下电极在压电膜上彼此面对,第一膜设置在第一膜层叠体上,并且具有第二膜层叠体, 类似于第一膜层压体的结构,设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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公开(公告)号:US08756777B2
公开(公告)日:2014-06-24
申请号:US12647794
申请日:2009-12-28
申请人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号: H04R17/00 , H03H9/205 , H03H9/56 , H03H9/64 , H03H9/15 , H03H9/17 , H03H9/54 , H03H9/60 , H03H3/00 , H03H3/007
CPC分类号: H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要: A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.
摘要翻译: 一种制造包括第一和第二谐振器的梯形滤波器的方法包括:在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜,在压电膜上形成导电膜, 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜,在第二区域中形成第一膜,第二膜和导电膜的图案,并且在第一区域中形成第一膜和导电膜的图案,以从导体形成相应的上电极 电影; 然后蚀刻压电膜,分别在第一和第二区域形成压电膜的各自图案。
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公开(公告)号:US07400220B2
公开(公告)日:2008-07-15
申请号:US11065363
申请日:2005-02-25
申请人: Yasuyuki Saitou , Osamu Kawachi
发明人: Yasuyuki Saitou , Osamu Kawachi
CPC分类号: H03H9/6483 , H03H9/25 , H03H9/643 , H03H9/6473 , H03H9/6496
摘要: A surface acoustic wave device includes a surface acoustic wave resonator. The surface acoustic wave resonator includes comb-like electrodes and reflection electrodes provided on both sides of the comb-like electrodes, and each of the reflection electrodes has at least two different pitches. It is thus possible to suppress the ripple components.
摘要翻译: 表面声波装置包括表面声波谐振器。 表面声波谐振器包括梳状电极和设置在梳状电极两侧的反射电极,并且每个反射电极具有至少两个不同的间距。 因此可以抑制纹波成分。
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