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公开(公告)号：US20210026255A1
公开(公告)日：2021-01-28
申请号：US16932184
申请日：2020-07-17
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Sebastian Thomas Bauerschmidt , Yongfeng Ni
IPC: G03F7/20
Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
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公开(公告)号：US12197001B2
公开(公告)日：2025-01-14
申请号：US18017059
申请日：2021-07-12
Applicant: ASML NETHERLANDS B.V.
Inventor： Amir Abdolvand , Cristian Bogdan Craus , Sebastian Thomas Bauerschmidt
Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.
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公开(公告)号：US11780763B2
公开(公告)日：2023-10-10
申请号：US17096278
申请日：2020-11-12
Applicant: ASML NETHERLANDS B.V.
Inventor： Sebastian Thomas Bauerschmidt , Mingli Niu
IPC: C03B37/027
CPC classification number: C03B37/02736 , C03B37/02781 , C03B2203/16 , C03B2203/42
Abstract: A device for connecting a fiber preform including a plurality of elongate holes extending substantially parallel to a longitudinal axis of the fiber preform to a pressure supply system, the device including a first surface to be connected to an end face of the fiber preform where the plurality of elongate holes end, a second surface including at least two ports configured to be in fluid connection with the pressure supply system, and a channel system within the device connecting the plurality of elongate holes at the first surface to the at least two ports, wherein a density of the at least two ports at the second surface is smaller than a density of the plurality of corresponding elongate holes at the first surface.
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公开(公告)号：US11262665B2
公开(公告)日：2022-03-01
申请号：US16827843
申请日：2020-03-24
Applicant: ASML Netherlands B.V.
Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.
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15.发明公开公开(公告)号：US20240004127A1
公开(公告)日：2024-01-04
申请号：US18234096
申请日：2023-08-15
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian UEBEL , Peter Maximilian Götz , Sebastian Thomas Bauerschmidt , Coen Hubertus Matheus Baltis , Janneke Ravensbergen
CPC classification number: G02B6/02328 , C03B37/15 , G02B6/0096 , G02B6/02347 , G03F7/7085 , G03F9/7034 , G03F9/7065 , C03B2203/16 , C03B2203/42
Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
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Patent Agency Ranking
公开(公告)号：US11774828B2
公开(公告)日：2023-10-03
申请号：US17307217
申请日：2021-05-04
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02F1/3528 , G03F9/7034 , H01S3/0057 , H01S3/06741
Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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17.发明授权公开(公告)号：US11754906B2
公开(公告)日：2023-09-12
申请号：US18093717
申请日：2023-01-05
Applicant: ASML Netherlands B.V.
CPC classification number: G02F1/353 , G02F1/3501 , G02F1/365 , G02F1/3503 , G02F1/3528
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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公开(公告)号：US11703634B2
公开(公告)日：2023-07-18
申请号：US17836537
申请日：2022-06-09
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02B6/02328 , G02B6/02366 , G03F7/70008 , G01B11/25
Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.
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19.发明授权公开(公告)号：US11556044B2
公开(公告)日：2023-01-17
申请号：US17485836
申请日：2021-09-27
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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20.发明授权公开(公告)号：US11287747B2
公开(公告)日：2022-03-29
申请号：US16983264
申请日：2020-08-03
Applicant: ASML NETHERLANDS B.V.
Inventor： Andrey Nikipelov , Patrick Sebastian Uebel , Amir Abdolvand , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Natallia Eduardauna Uzunbajakava
IPC: G03F7/20
Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.
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