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    LIQUID CONVEYING APPARATUS AND LIQUID CONVEYING METHOD USING MICRO-FLUID DEVICE
    11.
    发明申请
    LIQUID CONVEYING APPARATUS AND LIQUID CONVEYING METHOD USING MICRO-FLUID DEVICE 失效
    使用微流体装置的液体输送装置和液体输送方法

    公开(公告)号：US20100163129A1

    公开(公告)日：2010-07-01

    申请号：US12532408

    申请日：2008-03-28

    申请人： Toshinobu Tokita ,  Kosuke Fujimoto

    发明人： Toshinobu Tokita ,  Kosuke Fujimoto

    IPC分类号： F15C1/00

    CPC分类号： G01N35/08 ,  B01L3/50273 ,  B01L2400/0439 ,  B01L2400/0496 ,  F04B43/046 ,  F04F7/00 ,  G01N2035/1034 ,  G01N2035/1058 ,  Y10T137/206

    摘要： An apparatus system for controlling liquid in a fluid channel in a micro-fluid device has an ultrasonic oscillator for conveying liquid. The ultrasonic oscillator oscillates with amplitude modulation. The apparatus system has a holding section for holding the micro-fluid device on the ultrasonic oscillator to allow a micro-fluid device to be removably fitted to it. A liquid conveying method and a liquid conveying unit showing an improved liquid conveying efficiency are provided.

    摘要翻译： 用于控制微流体装置中的流体通道中的液体的装置系统具有用于输送液体的超声波振荡器。 超声波振荡器以振幅调制振荡。 装置系统具有用于将微流体装置保持在超声波振荡器上的保持部，以允许微流体装置可移除地装配在该超声波振荡器上。 提供了液体输送方法和液体输送单元，其显示出改进的液体输送效率。

    Fine pattern forming apparatus and fine pattern inspecting apparatus
    13.
    发明授权
    Fine pattern forming apparatus and fine pattern inspecting apparatus 有权
    精细图案形成装置和精细图案检查装置

    公开(公告)号：US07196321B2

    公开(公告)日：2007-03-27

    申请号：US11147562

    申请日：2005-06-07

    申请人： Eigo Kawakami ,  Hirohisa Ota ,  Takashi Nakamura ,  Kazuyuki Kasumi ,  Toshinobu Tokita

    发明人： Eigo Kawakami ,  Hirohisa Ota ,  Takashi Nakamura ,  Kazuyuki Kasumi ,  Toshinobu Tokita

    IPC分类号： G01N21/17 ,  G11B9/00

    CPC分类号： G03F7/2049 ,  G01Q10/06 ,  G01Q70/06 ,  G01Q80/00

    摘要： Disclosed is a fine pattern forming apparatus and a fine pattern inspecting apparatus. In one preferred form, the fine pattern forming apparatus includes a surface irregularity information reading device for detecting a shape signal corresponding to a surface irregularity of a surface of an original, while scanning the surface by use of a first probe, and a surface irregularity information writing device for processing a substrate to be processed, while scanning a surface of the substrate by use of a second probe, wherein an applied electric voltage to the second probe is changed in accordance with the shape signal while a distance between the second probe and the substrate is kept substantially constant, or the distance between the second probe and the substrate is changed in accordance with the shape signal while the applied electric voltage to the second probe is kept substantially constant, such that the substrate is processed in accordance with the surface irregularity of the original.

    摘要翻译： 公开了一种精细图案形成装置和精细图案检查装置。 在一种优选形式中，精细图案形成装置包括：表面不规则信息读取装置，用于在利用第一探针扫描表面时检测与原件的表面的表面不规则相对应的形状信号，以及表面不规则信息 用于处理待处理的基板的写入装置，同时通过使用第二探针扫描基板的表面，其中根据形状信号改变施加到第二探针的电压，同时第二探针和第二探针之间的距离 基板保持基本恒定，或者第二探针和基板之间的距离根据形状信号而改变，同时施加到第二探针的电压保持基本上恒定，使得基板根据表面不规则性被加工 的原来。

    Exposure apparatus and device manufacturing method
    16.
    发明申请
    Exposure apparatus and device manufacturing method 失效
    曝光装置和装置制造方法

    公开(公告)号：US20060087635A1

    公开(公告)日：2006-04-27

    申请号：US11257791

    申请日：2005-10-24

    申请人： Kazuyuki Kazumi ,  Hirohisa Ota ,  Eigo Kawakami ,  Takashi Nakamura ,  Toshinobu Tokita

    发明人： Kazuyuki Kazumi ,  Hirohisa Ota ,  Eigo Kawakami ,  Takashi Nakamura ,  Toshinobu Tokita

    IPC分类号： G03B27/72

    CPC分类号： G03F7/70283 ,  G03F7/70291

    摘要： An exposure apparatus includes a projection optical system for projecting a multigradation pattern onto an object, a spatial modulation element that includes plural, two-dimensionally arranged pixels, and forms an optical image by binary control over each pixel, and a superposing optical system for forming the multigradation pattern by superposing the optical images for each row and/or for each column.

    摘要翻译： 曝光装置包括：投影光学系统，用于将多重放射图案投射到物体上;空间调制元件，其包括多个二维排列的像素，并通过每个像素的二进制控制形成光学图像;以及叠加光学系统，用于形成 通过叠加每行和/或每列的光学图像的多放射图案。

    Exposure apparatus and method
    18.
    发明申请
    Exposure apparatus and method 失效
    曝光装置和方法

    公开(公告)号：US20050140948A1

    公开(公告)日：2005-06-30

    申请号：US11014166

    申请日：2004-12-17

    申请人： Toshinobu Tokita

    发明人： Toshinobu Tokita

    IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/52

    CPC分类号： G03F7/70341

    摘要： An exposure method includes the steps of introducing fluid between a surface of an object to be exposed, and a final surface of a projection optical system, displacing an interface of the fluid arranged between the surface of the object and the final surface of the projection optical system, and projecting a pattern on a mask onto the object via the projection optical system and the fluid.

    摘要翻译： 曝光方法包括以下步骤：在被曝光物体的表面和投影光学系统的最终表面之间引入流体，使配置在物体的表面和投影光学的最终表面之间的流体的界面移位 系统，并且通过投影光学系统和流体将掩模上的图案投影到物体上。

    Light irradiating apparatus, control method therefor, and object information acquiring apparatus
    19.
    发明授权
    Light irradiating apparatus, control method therefor, and object information acquiring apparatus 有权

    公开(公告)号：US09883806B2

    公开(公告)日：2018-02-06

    申请号：US14113679

    申请日：2012-04-25

    申请人： Toshinobu Tokita

    发明人： Toshinobu Tokita

    IPC分类号： A61B5/05 ,  A61B5/00

    CPC分类号： A61B5/0095 ,  A61B5/6843

    摘要： A light irradiating apparatus is used, which is characterized by having: a probe including an irradiating unit which guides light to an object, a housing containing the irradiating unit, and a touch sensor acquiring a contact condition amount between the object and the housing; and a controller controlling irradiation with light from the irradiating unit based on a level of the contact condition amount and a change in the contact condition amount, wherein in a case where the contact condition amount is equal to or more than a first reference value while the change in the contact condition amount which occurs when the housing is pressed against the object is a positive value, the controller performs a control which enables irradiation with light from the irradiating unit when the change in the contact condition amount is equal to or more than a second reference value.

    OBJECT INFORMATION ACQUIRING APPARATUS, CONTROL METHOD THEREOF, AND METHOD FOR DETERMINATION OF CONTACT
    20.
    发明申请
    OBJECT INFORMATION ACQUIRING APPARATUS, CONTROL METHOD THEREOF, AND METHOD FOR DETERMINATION OF CONTACT 审中-公开
    获取设备的对象信息，其控制方法及其联系方法

    公开(公告)号：US20140046166A1

    公开(公告)日：2014-02-13

    申请号：US14113665

    申请日：2012-04-25

    申请人： Toshinobu Tokita

    发明人： Toshinobu Tokita

    IPC分类号： A61B5/00

    CPC分类号： A61B5/0095 ,  A61B5/4312 ,  A61B5/6843 ,  A61B5/6844

    摘要： The present invention employs an object information acquiring apparatus having: a photoacoustic probe unit including a light irradiating unit which irradiates light, and a probe which receives a photoacoustic wave generated from an object irradiated with light while transmitting an ultrasound wave to the object and receiving a reflected wave thereof; a processor configured to create image information of the object based on the photoacoustic wave; and a controller configured to control irradiation with light, wherein when a first contact condition is defined as a condition in which the object is irradiated with light while the probe is acoustically matched with the object, the controller determines whether or not the photoacoustic probe unit is in the first contact condition by using the reflected wave and enables irradiation with light when the photoacoustic probe unit is in the first contact condition.

    摘要翻译： 本发明采用一种对象信息获取装置，其具有：光电探测器单元，其包括照射光的光照射单元，以及探测器，其接收从被照射的光产生的光声，同时向对象发送超声波，并接收 反射波; 处理器，其被配置为基于所述光声波创建所述对象的图像信息; 以及控制器，其被配置为控制光的照射，其中当所述第一接触条件被定义为在所述探针与所述物体声学匹配时物体被照射的条件下，所述控制器确定所述光声探测单元是否为 在第一接触状态下使用反射波，并且当光声探针单元处于第一接触状态时能够用光照射。