Nano electromechanical integrated-circuit filter
    12.
    发明申请
    Nano electromechanical integrated-circuit filter 有权
    纳米机电集成电路滤波器

    公开(公告)号:US20100007443A1

    公开(公告)日:2010-01-14

    申请号:US12311141

    申请日:2007-09-20

    IPC分类号: H03H9/15

    CPC分类号: H03H9/525 H03H9/485

    摘要: A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.

    摘要翻译: 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层,其中所述谐振器包括亚微米可激发元件,并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率,并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。

    Microelectromechanical gyroscopes and related apparatus and methods
    13.
    发明授权
    Microelectromechanical gyroscopes and related apparatus and methods 有权
    微机电陀螺仪及相关设备及方法

    公开(公告)号:US08661899B2

    公开(公告)日:2014-03-04

    申请号:US13038000

    申请日:2011-03-01

    IPC分类号: G01C19/56

    CPC分类号: G01C19/56 G01C19/5712

    摘要: An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.

    摘要翻译: 描述了一种包括具有第一板和第二板的基板的装置。 当由驱动信号激励时,第一板和第二板共同具有第一模式,并且当由陀螺效应激励时具有第二模式。 第一和第二板各自包括温度补偿堆叠,其具有第一和第三层,其具有在温度范围内随着温度升高而增加的刚度,第一和第三层之间的第二层在第一和第三层之间,其中第二层由不同的 材料比第一和第三层。

    Nanomechanical Oscillator
    16.
    发明申请
    Nanomechanical Oscillator 有权
    纳米机械振荡器

    公开(公告)号:US20090294638A1

    公开(公告)日:2009-12-03

    申请号:US11813342

    申请日:2006-01-04

    IPC分类号: H01J3/14 H03B5/30 H03K3/01

    摘要: A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

    摘要翻译: 机械振荡器具有尺寸在亚微米范围内的部件,以产生千兆赫兹范围内的谐振模式振荡。 一个主要元件耦合到次要的亚微米元件,以产生用现有技术检测的大幅度千兆赫兹频率振荡。 机械结构可以根据包括梁和环的几何形状形成,并且被静电,磁和热相关的力以及其它激发技术激发。 机械结构可以布置成阵列用于诸如放大和混合的应用,并且对电击或辐射环境的敏感性不如电气或光学对应物。

    Signal amplification by hierarchal resonating structures
    17.
    发明授权
    Signal amplification by hierarchal resonating structures 有权
    通过层级谐振结构的信号放大

    公开(公告)号:US08772999B2

    公开(公告)日:2014-07-08

    申请号:US12681428

    申请日:2007-10-11

    IPC分类号: H02N1/00 H03B5/30

    摘要: An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements with a characteristic frequency and coupled to each of the first level major elements to form a second level hierarchy in which a signal is effectively amplified by vibrating each of the plurality of major elements in at least one mode determined by the geometry and dimensions of the first level sub-micron minor elements.

    摘要翻译: 一种机电谐振结构,包括:彼此耦合以形成第二级或更高级别层次的第一级主要元件; 和具有特征频率并耦合到每个第一级主要元件的第一级亚微米级次要元件以形成第二级别层级,其中通过以至少一种模式振动多个主要元件中的每一个来有效地放大信号 由第一级亚微米次要元素的几何形状和尺寸决定。

    TIMING OSCILLATORS AND RELATED METHODS
    18.
    发明申请
    TIMING OSCILLATORS AND RELATED METHODS 审中-公开
    时序振荡器及相关方法

    公开(公告)号:US20120013413A1

    公开(公告)日:2012-01-19

    申请号:US13247318

    申请日:2011-09-28

    IPC分类号: H03B5/30

    摘要: Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.

    摘要翻译: 描述了定时振荡器以及相关方法和设备。 定时振荡器可以包括具有耦合到主要元件的主要元件和次要元件的机械谐振结构。 定时振荡器可以以非常高的频率产生具有低相位噪声的稳定信号,这允许定时振荡器在包括计算机和移动电话在内的多个设备中被有效地用于时间和数据同步目的。 由定时振荡器产生的信号可以使用驱动电路和补偿电路进行调谐。

    Nanomechanical oscillator
    19.
    发明授权
    Nanomechanical oscillator 有权
    纳米机械振荡器

    公开(公告)号:US08063535B2

    公开(公告)日:2011-11-22

    申请号:US11813342

    申请日:2006-01-04

    IPC分类号: H01L41/08

    摘要: A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

    摘要翻译: 机械振荡器具有尺寸在亚微米范围内的部件,以产生千兆赫兹范围内的谐振模式振荡。 一个主要元件耦合到次要的亚微米元件,以产生用现有技术检测的大幅度千兆赫兹频率振荡。 机械结构可以根据包括梁和环的几何形状形成,并且被静电,磁和热相关的力以及其它激发技术激发。 机械结构可以布置成阵列用于诸如放大和混合的应用,并且对电击或辐射环境的敏感性不如电气或光学对应物。