Nano electromechanical integrated-circuit filter
    2.
    发明授权
    Nano electromechanical integrated-circuit filter 有权
    纳米机电集成电路滤波器

    公开(公告)号:US08314665B2

    公开(公告)日:2012-11-20

    申请号:US12311141

    申请日:2007-09-20

    IPC分类号: H03H9/24 H03H9/46

    CPC分类号: H03H9/525 H03H9/485

    摘要: A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.

    摘要翻译: 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层,其中所述谐振器包括亚微米可激发元件,并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率,并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。

    Nano electromechanical integrated-circuit filter
    3.
    发明申请
    Nano electromechanical integrated-circuit filter 有权
    纳米机电集成电路滤波器

    公开(公告)号:US20100007443A1

    公开(公告)日:2010-01-14

    申请号:US12311141

    申请日:2007-09-20

    IPC分类号: H03H9/15

    CPC分类号: H03H9/525 H03H9/485

    摘要: A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.

    摘要翻译: 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层,其中所述谐振器包括亚微米可激发元件,并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率,并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。

    Nanomechanical oscillator
    4.
    发明授权
    Nanomechanical oscillator 有权
    纳米机械振荡器

    公开(公告)号:US08063535B2

    公开(公告)日:2011-11-22

    申请号:US11813342

    申请日:2006-01-04

    IPC分类号: H01L41/08

    摘要: A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

    摘要翻译: 机械振荡器具有尺寸在亚微米范围内的部件,以产生千兆赫兹范围内的谐振模式振荡。 一个主要元件耦合到次要的亚微米元件,以产生用现有技术检测的大幅度千兆赫兹频率振荡。 机械结构可以根据包括梁和环的几何形状形成,并且被静电,磁和热相关的力以及其它激发技术激发。 机械结构可以布置成阵列用于诸如放大和混合的应用,并且对电击或辐射环境的敏感性不如电气或光学对应物。

    Controllable nanomechanical memory element
    5.
    发明授权
    Controllable nanomechanical memory element 有权
    可控纳米机械记忆元件

    公开(公告)号:US07352608B2

    公开(公告)日:2008-04-01

    申请号:US11597150

    申请日:2005-05-24

    IPC分类号: G11C13/00

    摘要: A memory device includes a mechanical element that exhibits distinct bistable states under amplitude modulation. The states are dynamically bistable or multi-stable with the application of a drive signal of a given frequency. The natural resonance of the element in conjunction with a hysteretic effect produces distinct states over a specific frequency range. Devices with multiple elements that respond to different frequency ranges provided on a common contact are formed with improved density. The devices may be excited and read with magnetomotive, capacitive, piezoelectric and/or optical methods. The devices may be planar oriented or out of plane oriented to permit three dimensional memory structures. DC biases may be used to shift frequency responses to permit an alternate method for differentiating states of the element.

    摘要翻译: 存储器件包括在幅度调制下呈现明显的双稳态的机械元件。 通过施加给定频率的驱动信号,这些状态是动态双稳态或多稳定的。 元件与滞后效应的天然共振在特定频率范围内产生不同的状态。 具有响应于在公共接触点上提供的不同频率范围的多个元件的装置以改进的密度形成。 这些器件可以用磁动,电容,压电和/或光学方法激发和读取。 这些装置可以是平面取向的或面外的以允许三维记忆结构。 DC偏置可以用于移动频率响应,以允许用于区分元件的状态的替代方法。

    Nano electromechanical integrated-circuit bank and switch
    6.
    发明申请
    Nano electromechanical integrated-circuit bank and switch 有权
    纳米机电集成电路组和开关

    公开(公告)号:US20100134207A1

    公开(公告)日:2010-06-03

    申请号:US12311143

    申请日:2007-09-20

    IPC分类号: H03H9/00

    摘要: A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.

    摘要翻译: 一组纳米机电集成电路滤波器。 集成电路滤波器组,包括硅衬底; 牺牲层; 包括至少两个谐振器的器件层,其中所述至少两个谐振器包括次微可激励元件,并且其中所述至少两个谐振器具有基本模式频率以及集体模式频率,并且其中所述至少两个谐振器的所述集体模式频率至少 两个谐振器由亚微米元件的基频决定。 至少有一个开关连接到集成电路滤波器组。

    Nano electromechanical integrated-circuit bank and switch
    7.
    发明授权
    Nano electromechanical integrated-circuit bank and switch 有权
    纳米机电集成电路组和开关

    公开(公告)号:US08487715B2

    公开(公告)日:2013-07-16

    申请号:US12311143

    申请日:2007-09-20

    摘要: A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.

    摘要翻译: 一组纳米机电集成电路滤波器。 集成电路滤波器组,包括硅衬底; 牺牲层; 包括至少两个谐振器的器件层,其中所述至少两个谐振器包括次微可激励元件,并且其中所述至少两个谐振器具有基本模式频率以及集体模式频率,并且其中所述至少两个谐振器的所述集体模式频率至少 两个谐振器由亚微米元件的基频决定。 至少有一个开关连接到集成电路滤波器组。