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    Balanced runners synchronizing motion of masses in micromachined devices
    12.
    发明授权
    Balanced runners synchronizing motion of masses in micromachined devices 有权

    公开(公告)号：US10697774B2

    公开(公告)日：2020-06-30

    申请号：US15383366

    申请日：2016-12-19

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

    IPC: G01C19/574

    Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

    Isotropic attenuated motion gyroscope
    13.
    发明授权
    Isotropic attenuated motion gyroscope 有权

    公开(公告)号：US11965740B2

    公开(公告)日：2024-04-23

    申请号：US18320725

    申请日：2023-05-19

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  John A. Geen

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

    TRUSTED MOTION UNIT
    14.
    发明申请
    TRUSTED MOTION UNIT 有权

    公开(公告)号：US20210278847A1

    公开(公告)日：2021-09-09

    申请号：US17187006

    申请日：2021-02-26

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  Joseph Bergeron ,  Alan Christopher O'Connor

    IPC: G05D1/02 ,  G05D1/00

    Abstract: Navigation systems and methods for autonomous vehicles are provided. The navigation system may include multiple navigation subsystems, including one having an inertial measurement unit (IMU). That unit may serve as the primary unit for navigation purposes, with other navigation subsystems being treated as secondary. The other navigation subsystems may include global positioning system (GPS) sensors, and perception sensors. In some embodiments, the navigation system may include a first filter for the IMU sensor and separate filters for the other navigation subsystems.

    SYNCHRONIZED MASS GYROSCOPE
    15.
    发明申请
    SYNCHRONIZED MASS GYROSCOPE 审中-公开

    公开(公告)号：US20180172447A1

    公开(公告)日：2018-06-21

    申请号：US15383318

    申请日：2016-12-19

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

    IPC: G01C19/5747 ,  G01C19/5769 ,  G01P15/14

    CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769 ,  G01P15/14

    Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

    SYNCHRONIZED MASS GYROSCOPE WITH FULL SYMMETRY AND TURNABILITY
    17.
    发明公开
    SYNCHRONIZED MASS GYROSCOPE WITH FULL SYMMETRY AND TURNABILITY 审中-公开

    公开(公告)号：US20240003684A1

    公开(公告)日：2024-01-04

    申请号：US18300053

    申请日：2023-04-13

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  Gaurav Vohra ,  Arthur Yurievich Savchenko ,  Xin Zhang

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (⅓ of the capacitive gap).

    QUADRATURE TRIM VERTICAL ELECTRODES FOR YAW AXIS CORIOLIS VIBRATORY GYROSCOPE
    18.
    发明公开
    QUADRATURE TRIM VERTICAL ELECTRODES FOR YAW AXIS CORIOLIS VIBRATORY GYROSCOPE 审中-公开

    公开(公告)号：US20230332890A1

    公开(公告)日：2023-10-19

    申请号：US18135098

    申请日：2023-04-14

    Applicant: Analog Devices, Inc.

    Inventor： Arthur Y. Savchenko ,  Igor P. Prikhodko ,  Tyler Adam Dunn

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out-of-plane quadrature trim electrodes are positioned to laterally overlap edges of the opening in a projection plane. The out-of-plane quadrature trim electrodes trim in-plane motion of the proof mass in one or two directions to limit quadrature motion. The out-of-plane quadrature trim electrodes may be arranged in a symmetric pattern to enable mode switching.

    Stress-relief MEMS gyroscope
    19.
    发明授权
    Stress-relief MEMS gyroscope 有权

    公开(公告)号：US11686581B2

    公开(公告)日：2023-06-27

    申请号：US17340859

    申请日：2021-06-07

    Applicant: Analog Devices, Inc.

    Inventor： Igor P. Prikhodko ,  Gaurav Vohra

    IPC: G01C19/5712

    CPC classification number: G01C19/5712

    Abstract: A MEMS device is provided comprising a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; a drive structure comprising at least one electrode and configured to drive the proof mass to move along the resonator axis; and a pivoting linkage coupled to the proof mass at first and second ends of the pivoting linkage, the first end comprising a first fixed pivot and the second end comprising a second fixed pivot, the pivoting linkage comprising: a first bar configured to pivot about the first fixed pivot and a first dynamic pivot; a second bar configured to pivot about the second fixed pivot and a second dynamic pivot; and a third bar configured to pivot about the first dynamic pivot and the second dynamic pivot, wherein the proof mass moves along the resonator axis when the pivoting linkage pivots.

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