公开(公告)号：US20180172447A1

公开(公告)日：2018-06-21

申请号：US15383318

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/5747 ,  G01C19/5769 ,  G01P15/14

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769 ,  G01P15/14

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US09878901B2

公开(公告)日：2018-01-30

申请号：US14670829

申请日：2015-03-27

Applicant: Analog Devices, Inc.

Inventor： John A. Geen ,  George M. Molnar ,  Gregory S. Davis ,  Bruce Ma ,  Kenneth J. Cole ,  James Timony ,  Kenneth Flanders

IPC: H01L29/84 ,  B81B3/00 ,  B81C1/00 ,  G01C19/5628 ,  G01P15/08 ,  H04R19/00

CPC classification number: B81B3/0072 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81C1/00325 ,  B81C1/00492 ,  G01C19/5628 ,  G01P15/0802 ,  H04R19/005

Abstract: Thick (i.e., greater than two microns), fine-grained, low-stress tungsten MEMS structures are fabricated at low temperatures, particularly for so-called “MEMS last” fabrication processes (e.g., when MEMS structures are fabricated after electronic circuitry is fabricated). Means for very accurately etching structural details from the deposited tungsten layer and for strongly and stably anchoring the tungsten layer to an underlying substrate are disclosed. Also, means for removing a sacrificial layer underlying the mobile tungsten layer without damaging the tungsten or allowing it to be drawn down and stuck by surface tension is disclosed.

公开(公告)号：US20150128701A1

公开(公告)日：2015-05-14

申请号：US14080370

申请日：2013-11-14

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  John A. Geen

IPC: G01C19/5698

CPC classification number: G01P15/097 ,  G01C19/5684 ,  G01P15/125 ,  G01P15/18

Abstract: A method of detecting motion provides a resonator having a mass, moves the mass in a translational mode, and actuates the mass in a given bulk mode. The mass moves in the translational and given bulk modes at substantially the same time and, accordingly, the resonator is configured to detect linear and rotational movement when moving and actuating the mass in the translational and given bulk modes. The method produces one or more movement signals representing the detected linear and rotational movement.

Abstract translation: 检测运动的方法提供具有质量的谐振器，以平移模式移动质量，并且以给定的体模式致动质量。 质量在基本上相同的时间在平移和给定的体模式中移动，因此，谐振器被配置为在平移和给定的体模式中移动和致动质量时检测线性和旋转运动。 该方法产生表示检测到的线性和旋转运动的一个或多个运动信号。

公开(公告)号：US20140060186A1

公开(公告)日：2014-03-06

申请号：US13774129

申请日：2013-02-22

Applicant: Analog Devices, Inc.

Inventor： William A. Clark ,  John A. Geen

IPC: G01P15/097

CPC classification number: G01P15/097 ,  G01C19/5712

Abstract: Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing modulated error signals in the accelerometer that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

Abstract translation: 与惯性传感器谐振器的空气动力学有关的误差源通过调制谐振器和底层衬底之间的距离并感测由这种调制引起的加速度计中的调制误差信号来检测。 可以提供补偿信号以基本上消除由这种错误源引起的错误。

公开(公告)号：US08549918B2

公开(公告)日：2013-10-08

申请号：US13775856

申请日：2013-02-25

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  William A. Clark ,  John A. Geen

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract translation: 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。

公开(公告)号：US20230296379A1

公开(公告)日：2023-09-21

申请号：US18320725

申请日：2023-05-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

公开(公告)号：US10697774B2

公开(公告)日：2020-06-30

申请号：US15383366

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/574

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US09207081B2

公开(公告)日：2015-12-08

申请号：US14098781

申请日：2013-12-06

Applicant: Analog Devices, Inc.

Inventor： John A. Geen

IPC: G01P9/04 ,  G01C19/5719 ,  G01C19/5776 ,  G01C19/56

CPC classification number: G01C19/5719 ,  G01C19/56 ,  G01C19/5776

Abstract: A substrate for an inertial sensor system includes a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, where each electrode arrangement is capable of being overlaid by a corresponding plate of a shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle.

Abstract translation: 用于惯性传感器系统的基板包括多个电极装置，每个电极装置包括加速度传感器电极和在加速度传感器电极的相对侧上的一对正交调节电极，其中每个电极装置能够被相应的 穿梭板的板，使得板完全覆盖加速度传感器电极并且部分地覆盖加速度传感器电极的相对侧上的该对正交调节电极，使得板和每个正交调节电极之间的电容耦合取决于旋转 所述至少一个梭子的位置在所述板和所述加速度传感器电极之间的电容耦合基本上独立于所述至少一个梭子的旋转位置。

公开(公告)号：US20140102195A1

公开(公告)日：2014-04-17

申请号：US14098781

申请日：2013-12-06

Applicant: Analog Devices, Inc.

Inventor： John A. Geen

IPC: G01C19/5719 ,  G01C19/56

CPC classification number: G01C19/5719 ,  G01C19/56 ,  G01C19/5776

Abstract: A substrate for an inertial sensor system includes a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, where each electrode arrangement is capable of being overlaid by a corresponding plate of a shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle.

Abstract translation: 用于惯性传感器系统的基板包括多个电极装置，每个电极装置包括加速度传感器电极和在加速度传感器电极的相对侧上的一对正交调节电极，其中每个电极装置能够被相应的 穿梭板的板，使得板完全覆盖加速度传感器电极并且部分地覆盖加速度传感器电极的相对侧上的该对正交调节电极，使得板和每个正交调节电极之间的电容耦合取决于旋转 所述至少一个梭子的位置在所述板和所述加速度传感器电极之间的电容耦合基本上独立于所述至少一个梭子的旋转位置。

公开(公告)号：US08677801B1

公开(公告)日：2014-03-25

申请号：US13774129

申请日：2013-02-22

Applicant: Analog Devices, Inc.

Inventor： William A. Clark ,  John A. Geen

IPC: G01P21/00 ,  G01C19/56

CPC classification number: G01P15/097 ,  G01C19/5712

Abstract: Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing modulated error signals in the accelerometer that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

Abstract translation: 与惯性传感器谐振器的空气动力学有关的误差源通过调制谐振器和底层衬底之间的距离并感测由这种调制引起的加速度计中的调制误差信号来检测。 可以提供补偿信号以基本上消除由这种错误源引起的错误。