公开(公告)号：US11892467B2

公开(公告)日：2024-02-06

申请号：US17555002

申请日：2021-12-17

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Michael Judy

IPC: G01P15/125 ,  G01P1/00

CPC classification number: G01P15/125 ,  G01P1/00

Abstract: A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

公开(公告)号：US11543402B2

公开(公告)日：2023-01-03

申请号：US16757202

申请日：2018-05-04

Applicant: Analog Devices, Inc.

Inventor： Thomas G. O'Dwyer ,  Gaurav Vohra ,  Xin Zhang ,  YounJae Kook ,  Isaac Chase Novet ,  Venugopal Gopinathan

IPC: G01R33/09 ,  G01N33/487 ,  G01N27/02 ,  G01N33/49 ,  G01N33/493 ,  G01N27/12 ,  G01N27/22

Abstract: An impedance measurement system for detecting an analyte in a sample is disclosed. The system includes first, second, and third electrodes, wherein at least a portion of the third electrode is positioned between the first and second electrodes, means for generating an electromagnetic field between the first and second electrodes, means for electrically controlling the third electrode, wherein the third electrode modifies the electromagnetic field, and a processor for detecting a presence of the analyte in the sample, based at least in part on a property of the electromagnetic field.

公开(公告)号：US11313876B2

公开(公告)日：2022-04-26

申请号：US16775316

申请日：2020-01-29

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang ,  Alan O'Donnell

IPC: G01P15/00 ,  G01N11/04 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08 ,  B81B3/00

Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.

公开(公告)号：US11255873B2

公开(公告)日：2022-02-22

申请号：US16129755

申请日：2018-09-12

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra ,  Michael Judy

IPC: G01P15/125 ,  G01P15/08

Abstract: Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.

公开(公告)号：US10761108B2

公开(公告)日：2020-09-01

申请号：US15818713

申请日：2017-11-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/09 ,  H02N2/18 ,  G01P15/18 ,  H01L41/113

Abstract: A microelectromechanical system (MEMS) apparatus is described. The MEMS apparatus may comprise inertial sensors and energy harvesters configured to convert mechanical vibrational energy into electric energy. The harvested energy may be used to power an electronic circuit, such as the circuit used to sense acceleration from the inertial sensors. The inertial sensors and the energy harvesters may be disposed on the same substrate, and may share the same proof mass. The energy harvesters may include a piezoelectric material layers disposed on a flexible structure. When the flexible structures flexes in response to vibration, stress arises in the piezoelectric material layer, which leads to the generation of electricity. Examples of inertial sensors include accelerometers and gyroscopes.

公开(公告)号：US10732198B2

公开(公告)日：2020-08-04

申请号：US15673361

申请日：2017-08-09

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: An electromechanical system (MEMS) accelerometer is described. The MEMS accelerometer may be configured to sense linear acceleration along one, two or three axes, and to sense angular acceleration about one, two or three axes. As such, the MEMS accelerometer may serve as 2-axis, 3-axis, 4-axis, 5-axis or 6-axis inertial accelerometer. In some embodiments, the MEMS accelerometer may comprise a single mass connected to at least one anchor via a plurality of tethers. In other embodiments, the MEMS accelerometer may comprise a proof mass connected to at least one anchor via a plurality of tethers and one or more shuttle masses connected to the proof mass via a second plurality of tethers. Rotational and linear motion of the MEMS accelerometer may be sensed using capacitive sensors.

公开(公告)号：US20200096538A1

公开(公告)日：2020-03-26

申请号：US16138091

申请日：2018-09-21

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18

Abstract: A three-axis accelerometer includes a single, integrated mass including at least one lateral (x-y) proof mass and at least one vertical (z) proof mass. The vertical proof mass is arranged as a teeter-totter mass, which is located within the lateral proof mass. The vertical proof mass is mechanically coupled to the lateral proof mass with one or more torsional springs, and the lateral proof mass is mechanically coupled to one or more anchors with one or more lateral springs. The at least one vertical proof mass may be symmetrically positioned about one or more axes of the three-axis accelerometer, so that the 3-axis accelerometer has in-plane symmetry. The three-axis accelerometer may be less susceptible for mechanical cross-talk or noise and may provide a smaller packaged solution for sensing acceleration in three directions.

公开(公告)号：US10545167B2

公开(公告)日：2020-01-28

申请号：US14887973

申请日：2015-10-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  Mehrnaz Motiee

IPC: G01P15/097 ,  G01P15/18

Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.

公开(公告)号：US10514259B2

公开(公告)日：2019-12-24

申请号：US15253792

申请日：2016-08-31

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Jianglong Zhang ,  Jinbo Kuang

IPC: G01C19/5705 ,  G01C19/5712

Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

公开(公告)号：US20170108529A1

公开(公告)日：2017-04-20

申请号：US14887973

申请日：2015-10-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  Mehrnaz Motiee

IPC: G01P15/097

Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.