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公开(公告)号：US08026492B2
公开(公告)日：2011-09-27
申请号：US12264859
申请日：2008-11-04
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J37/28 , H01J37/3056 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0827 , H01J2237/31749
摘要： A focused ion beam device is provided, including: an ion beam column adapted to house a gas field ion source emitter with an emitter tip and an emitter area for generating ions, a heating means adapted to heat the emitter tip, one or more gas inlets adapted to introduce a first gas and at least one second gas to the emitter area, an objective lens adapted to focus the ion beam generated from the first gas or the second gas, and a controller adapted to switch between a first emitter tip temperature and a second emitter tip temperature for generating an ion beam of ions of the first gas or an ion beam of ions of the at least one second gas.
摘要翻译： 提供了一种聚焦离子束装置，包括：离子束柱，其适于容纳具有发射极尖端的气体场离子源发射体和用于产生离子的发射极区域，适于加热发射极尖端的加热装置，一个或多个气体入口 适于将第一气体和至少一个第二气体引入发射器区域，适于聚焦由第一气体或第二气体产生的离子束的物镜，以及适于在第一发射极尖端温度和 用于产生所述第一气体的离子离子束或所述至少一个第二气体的离子离子束的第二发射极尖端温度。
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公开(公告)号：US07589328B2
公开(公告)日：2009-09-15
申请号：US11925609
申请日：2007-10-26
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
CPC分类号： H01J27/26 , H01J37/08 , H01J37/28 , H01J37/3056 , H01J2237/006 , H01J2237/0807 , H01J2237/0827 , H01J2237/244 , H01J2237/3174 , H01J2237/31749
摘要： A focused ion beam device is described. The device includes an ion beam column including an enclosure for housing an emitter with an emitter area for generating ions, a first gas inlet adapted to introduce a first gas to the emitter area, a second gas inlet adapted to introduce a second gas different from the first gas to the emitter area, and a switching unit adapted to switch between introducing the first gas and introducing the second gas.
摘要翻译： 描述了聚焦离子束装置。 该装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的发射极的外壳，适于将第一气体引入发射极区域的第一气体入口，适于引入不同于第二气体的第二气体的第二气体入口 第一气体到发射极区域，以及开关单元，其适于在引入第一气体和引入第二气体之间切换。
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公开(公告)号：US07268361B2
公开(公告)日：2007-09-11
申请号：US10483114
申请日：2002-07-01
申请人： Pavel Adamec , Dieter Winkler
发明人： Pavel Adamec , Dieter Winkler
CPC分类号： H01J1/3044 , H01J2201/319
摘要： The invention provides an electron beam device 1 comprising at least one field emission cathode 3 and at least one extracting electrode 5, whereby the field emission cathode 5 comprises a p-type semiconductor region 7 connected to an emitter tip 9 made of a semiconductor material, an n-type semiconductor region 11 forming a pn-diode junction 13 with the p-type semiconductor region 7 a first electric contact 15 on the p-type semiconductor region 7 and a second electric contact 17 on the n-type semiconductor region 11. The p-type semiconductor region 7 prevents the flux of free electrons to the emitter unless electrons are injected into the p-type semiconductor region 7 by the pn-diode junction 13. This way, the field emission cathode 3 can generate an electron beam where the electron beam current is controlled by the forward biasing second voltage V2 across the pn-diode junction. Such electron beam current has an improved current value stability. In addition the electron beam current does not have to be stabilized anymore by adjusting, the voltage between emitter tip 9 and extracting electrode 5 which would interfere with the electric field of electron beam optics. The present invention further provides the field emission cathode as described above and an array of field emission cathodes. The invention further provides a method to generate at least one electron beam.
摘要翻译： 本发明提供一种包括至少一个场发射阴极3和至少一个提取电极5的电子束装置1，由此场发射阴极5包括连接到由半导体材料制成的发射极尖端9的p型半导体区域7， 在p型半导体区域7上形成p型二极管结13的n型半导体区域11，p型半导体区域7上的第一电接触15和n型半导体区域11上的第二电接触17。 p型半导体区域7防止自由电子束流到发射极，除非电子被pn二极管结13注入到p型半导体区域7中。这样，场发射阴极3可以产生电子束，其中 电子束电流由跨越pn二极管结的正向偏置第二电压V 2控制。 这种电子束电流具有改善的电流值稳定性。 此外，电子束电流不必通过调节发射极尖端9和提取电极5之间的电压，这将干扰电子束光学器件的电场。 本发明还提供如上所述的场致发射阴极和场发射阴极阵列。 本发明还提供了一种产生至少一个电子束的方法。
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公开(公告)号：US20060192145A1
公开(公告)日：2006-08-31
申请号：US11396751
申请日：2006-04-03
IPC分类号： G21G5/00
CPC分类号： H01J37/285 , H01J37/265 , H01J37/28 , H01J2237/0435 , H01J2237/049 , H01J2237/2855 , H01J2237/2857
摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主束的准直之间切换，导致 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度;用于聚集所述带电粒子的一次束的聚光透镜;用于偏转所述主要束带电的扫描装置 颗粒，用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。
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公开(公告)号：US06730907B1
公开(公告)日：2004-05-04
申请号：US10031001
申请日：2002-07-16
申请人： Hans-Peter Feuerbaum , Dieter Winkler , Dror Kella
发明人： Hans-Peter Feuerbaum , Dieter Winkler , Dror Kella
IPC分类号： H01J37244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/0535
摘要： The invention provides a charged particle device (1) comprising: a particle source (2) for providing a charged particle beam (4), and objective lens (10) for directing the particle beam onto a specimen (8), said objective lens (10) having an optical axis (6); a particle mirror (14) located on the optical axis (6) of the objective lens (10), said particle mirror having a front surface, a back surface, a drift region (26) reaching from the back surface to the front surface for letting the charged particle beam pass from the back surface to the front surface, said drift region (26) being positioned away from the optical axis (6), and a deflecting region located on the front surface for deflecting charge particles coming from the specimen towards a detector (16).
摘要翻译： 本发明提供了一种带电粒子装置（1），包括：用于提供带电粒子束（4）的粒子源（2）和用于将粒子束引导到样本（8）上的物镜（10），所述物镜 10）具有光轴（6）; 位于物镜（10）的光轴（6）上的粒子反射镜（14），所述粒子反射镜具有前表面，后表面，从后表面到前表面的漂移区（26） 使带电粒子束从后表面传播到前表面，所述漂移区域（26）远离光轴（6）定位，偏转区域位于前表面上，用于使来自试样的电荷颗粒偏转 检测器（16）。
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公开(公告)号：US06555824B1
公开(公告)日：2003-04-29
申请号：US09397803
申请日：1999-09-16
IPC分类号： H01J37145
CPC分类号： H01J37/145
摘要： The invention provides an objective lens 1 for focusing a charged particle beam 30 on a specimen. The objective lens comprises a first focusing lens 2 positioned between a charged particle source and the specimen for finely focusing the beam of charged particles on the specimen. The objective lens further comprises a second focusing electrostatic lens 20 positioned between the first focusing lens and the specimen for coarsely focusing the beam of charged particles on the specimen.
摘要翻译： 本发明提供一种用于将带电粒子束30聚焦在样本上的物镜1。 物镜包括位于带电粒子源和样本之间的第一聚焦透镜2，用于将带电粒子束精细聚焦在样本上。 物镜还包括位于第一聚焦透镜和样本之间的第二聚焦静电透镜20，用于将带电粒子束粗调焦在样本上。
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17.发明授权公开(公告)号：US06555815B2
公开(公告)日：2003-04-29
申请号：US09342802
申请日：1999-06-29
IPC分类号： H01J3700
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/006 , H01J2237/2002 , H01J2237/2608
摘要： An apparatus for examining a specimen with a beam of charged particles, where charging of the specimen is avoided or reduced by injecting inert gas onto the sample's surface. In order to avoid interactions with the electron optics, various embodiments are disclosed for providing a rotationally symmetrical nozzles and/or electrodes. Additionally, embodiments are disclosed wherein a plurality of gas conduits are arranged in a rotationally symmetrical manner. Alternatively, the conduit is incorporated into an element of the electron optics, such as the magnetic lens. Also, in order to reduce or eliminate interaction of the electrons with the gas molecules, embodiments are disclosed wherein the gas is pulsated, rather than continually injected.
摘要翻译： 一种用带电粒子束检查样本的装置，其中通过将惰性气体注射到样品表面上来避免或减少样品的充电。 为了避免与电子光学器件的相互作用，公开了用于提供旋转对称的喷嘴和/或电极的各种实施例。 另外，公开了其中多个气体管道以旋转对称的方式布置的实施例。 或者，导管结合到电子光学元件的元件中，例如磁性透镜。 此外，为了减少或消除电子与气体分子的相互作用，公开了其中气体被脉动而不是连续喷射的实施例。
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公开(公告)号：US06499300B2
公开(公告)日：2002-12-31
申请号：US09976041
申请日：2001-10-15
IPC分类号： F01K2506
CPC分类号： H01M8/04089 , F02C3/20 , F02C3/34 , Y02E20/344
摘要： A power plant and a method for operating a power plant with a CO2 process is shown. The power plant includes a compressor, a turbine, a generator, a recuperator, and a burner unit with an oxygen separation device and a burner. Oxygen-containing gas, CO2 medium from the CO2 process, and fuel are supplied to the burner unit. The oxygen separation device removes oxygen from the oxygen-containing gas and adds it to the CO2 medium. To improve the efficiency of the burner unit, the burner unit is provided with an additional burner. A portion of the oxygen-enriched CO2 medium as well as fuel is fed to the additional burner. Hot CO2 medium formed by the combustion in the additional burner is mixed with the heated CO2 medium at the input of the oxygen separation device.
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公开(公告)号：US06331109B1
公开(公告)日：2001-12-18
申请号：US09624258
申请日：2000-07-24
IPC分类号： F23D1446
CPC分类号： F23R3/343 , F23C7/002 , F23C2900/07002 , F23D17/002 , F23D2211/00 , F23D2214/00 , F23R3/286 , F23R3/60
摘要： A premix burner consisting essentially of a swirl generator for a combustion air stream or another gaseous oxidizing medium and of conduits for injecting fuel into the swirl flow thus generated. As a result of a discontinuous cross-sectional widening at the transition to the combustion space, the swirl flow bursts open and a backflow bubble is formed, which serves for flame stabilization. For use under extreme thermal conditions, the burner front is provided with a heat shield which is fastened to a carrier structure in such a way as to allow, as unimpeded as possible, differential thermal expansions. The carrier structure is preferably provided with orifices, through which cooling air for the impact cooling of the heat shield flows. In a preferred variant, the fuel gas supply is designed as pipes which are led through orifices of the swirl generator without any fixed connection. As a result of this design, thermal stresses in the material of the burner are avoided as far as possible.
摘要翻译： 一种预混燃烧器，主要由用于燃烧空气流的漩涡发生器或另一种气态氧化介质组成，以及用于将燃料喷射到由此产生的涡流中的导管。 由于在向燃烧空间的过渡处的不连续的横截面加宽的结果，涡流突然打开，并且形成了用于火焰稳定的回流气泡。 为了在极端的热条件下使用，燃烧器前部设置有热屏蔽件，其以这样的方式固定到承载结构上，以允许尽可能不受阻碍地差热膨胀。 载体结构优选地设置有用于防风罩的冲击冷却的冷却空气流过的孔。 在优选的变型中，燃料气体供应被设计为管道，其被引导通过涡流发生器的孔口而没有任何固定的连接。 作为该设计的结果，尽可能避免了燃烧器材料中的热应力。
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公开(公告)号：US5918457A
公开(公告)日：1999-07-06
申请号：US654119
申请日：1996-05-28
CPC分类号： F23C6/042
摘要： In a method of operating a plant with staged combustion, the first combustion stage (1a) is operated with a fuel/air mixture (3) whose air coefficient is larger than the overall air coefficient of the combustion system. The hot combustion gases (5) from the first combustion stage (1a) are mixed with an additional fuel/air mixture (4) whose air coefficient is smaller than the overall air coefficient of the combustion system, before the further combustion in the second stage (2a) takes place. Since hot-gas backmixing is no longer required in the second stage (2a) for the flame stabilization, this combined mixture burns without the formation of further NOx emissions.
摘要翻译： 在操作具有分段燃烧的设备的方法中，第一燃烧阶段（1a）与空气系数大于燃烧系统的总体空气系数的燃料/空气混合物（3）一起操作。 来自第一燃烧阶段（1a）的热燃烧气体（5）与第二阶段进一步燃烧之前的空气系数小于燃烧系统的总体空气系数的附加燃料/空气混合物（4）混合 （2a）发生。 由于在第二阶段（2a）中不再需要热气回混用于火焰稳定化，所以该组合混合物燃烧而不形成进一步的NOx排放。
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