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公开(公告)号：US20250116597A1
公开(公告)日：2025-04-10
申请号：US18377431
申请日：2023-10-06
Applicant: Applied Materials Israel Ltd.
Inventor： Guy Shwartz , Ido Almog , Ori Golani
IPC: G01N21/17 , G01N21/95 , G06N3/0455 , G06N3/084
Abstract: Disclosed herein is a method for non-destructive depth-profiling including projecting a pulsed pump beam into a specimen, projecting a pulsed probe beam thereinto, and sensing light returned therefrom to obtain a measured signal. Each probe pulse is configured to undergo Brillouin scattering off a primary acoustic pulse induced by the directly preceding pump pulse, so as to be scattered there off at a respective depth within the specimen. The method further includes executing an optimization algorithm configured to receive as inputs the measured signal, and/or a processed signal obtained therefrom, and output values of structural parameter(s) characterizing the specimen through minimization of a cost function indicative of a difference between the measured signal and a simulated signal obtained using a forward model simulating the scattering of a pulsed probe beam off at least the primary acoustic pulses.
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公开(公告)号：US11859963B2
公开(公告)日：2024-01-02
申请号：US17970054
申请日：2022-10-20
Applicant: Applied Materials Israel Ltd.
Inventor： Ori Golani , Ido Almog
CPC classification number: G01B11/22 , G01B11/06 , G01B2210/56
Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes projecting an optical pump pulse on a semiconductor device comprising a target region, such as to produce an acoustic pulse which propagates within the target region of the semiconductor device, wherein a wavelength of the pump pulse is at least two times greater than a lateral extent of a lateral structural feature of the semiconductor device along at least one lateral direction, projecting an optical probe pulse on the semiconductor device, such that the probe pulse undergoes Brillouin scattering off the acoustic pulse within the target region, detecting a scattered component of the probe pulse to obtain a measured signal, and analyzing the measured signal to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature.
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公开(公告)号：US11713964B1
公开(公告)日：2023-08-01
申请号：US17574055
申请日：2022-01-12
Applicant: Applied Materials Israel Ltd.
Inventor： David Goldovsky , Ido Almog , Ronny Barnea
IPC: G01B15/04 , H01J37/285 , H01J37/244 , H01J37/28
CPC classification number: G01B15/04 , H01J37/244 , H01J37/28 , H01J37/285
Abstract: Disclosed herein is a system for profiling holes in non-opaque samples. The system includes: (i) an e-beam source configured to project an e-beam into an inspection hole in a sample, such that a wall of the inspection hole is struck and a localized electron cloud is produced; (ii) a light sensing infrastructure configured to sense cathodoluminescent light, generated by the electron cloud; and (iii) a computational module configured to analyze the measured signal to obtain the probed depth at which the wall was struck. A lateral offset, and/or orientation, of the e-beam is controllable, so as to allow generating localized electron clouds at each of a plurality of depths inside the inspection hole, and thereby obtain information at least about a two-dimensional geometry of the inspection hole.
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公开(公告)号：US20230221112A1
公开(公告)日：2023-07-13
申请号：US17574055
申请日：2022-01-12
Applicant: Applied Materials Israel Ltd.
Inventor： David Goldovsky , Ido Almog , Ronny Barnea
IPC: G01B15/04 , H01J37/28 , H01J37/244 , H01J37/285
CPC classification number: G01B15/04 , H01J37/28 , H01J37/244 , H01J37/285
Abstract: Disclosed herein is a system for profiling holes in non-opaque samples. The system includes: (i) an e-beam source configured to project an e-beam into an inspection hole in a sample, such that a wall of the inspection hole is struck and a localized electron cloud is produced; (ii) a light sensing infrastructure configured to sense cathodoluminescent light, generated by the electron cloud; and (iii) a computational module configured to analyze the measured signal to obtain the probed depth at which the wall was struck. A lateral offset, and/or orientation, of the e-beam is controllable, so as to allow generating localized electron clouds at each of a plurality of depths inside the inspection hole, and thereby obtain information at least about a two-dimensional geometry of the inspection hole.
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公开(公告)号：US20170016834A1
公开(公告)日：2017-01-19
申请号：US14800625
申请日：2015-07-15
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Ido Dolev , Ido Almog
CPC classification number: G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B26/123 , G02B26/124 , G03F1/84
Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
Abstract translation: 一种系统，包括照明模块，该照明模块包括：（a）第一行进透镜声光装置; （b）用于照亮第一移动透镜以提供沿着第一方向传播的输入光束的光源; （c）用于输出在第二方向扫描物体的输出光束的照明光学器件; 检测单元; 以及收集模块，用于从所述物体收集收集的光束，其中所述收集的光束沿着第三方向传播; 并且将所收集的光束光学操纵以提供反向扫描光束指向检测单元，并且具有位于相同位置的焦点，而不管收集的光束沿着第三方向的传播。
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Patent Agency Ranking
公开(公告)号：US12278085B2
公开(公告)日：2025-04-15
申请号：US17714908
申请日：2022-04-06
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Guy Shwartz , Ori Golani , Itamar Shani , Ido Almog
IPC: H01J37/28 , G01N23/2251 , H01J37/22 , H01J37/244
Abstract: Disclosed herein is a method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology. The method includes: (i) obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample; (ii) processing the measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and (iii) obtaining estimated values of one or more structural parameters of the inspected structure by inputting the extracted values into an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.
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公开(公告)号：US11815470B2
公开(公告)日：2023-11-14
申请号：US17010746
申请日：2020-09-02
Applicant: Applied Materials Israel, Ltd.
Inventor： Haim Feldman , Eyal Neistein , Harel Ilan , Shahar Arad , Ido Almog , Ori Golani
CPC classification number: G01N21/9505 , G06T7/001 , G06T7/0008 , G06T2207/30148
Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.
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公开(公告)号：US20230326713A1
公开(公告)日：2023-10-12
申请号：US17714908
申请日：2022-04-06
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Guy Shwartz , Ori Golani , Itamar Shani , Ido Almog
IPC: H01J37/28 , H01J37/22 , H01J37/244 , G01N23/2251
CPC classification number: H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/24475 , H01J2237/226 , H01J2237/2448 , G01N23/2251
Abstract: Disclosed herein is a method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology. The method includes: (i) obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample; (ii) processing the measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and (iii) obtaining estimated values of one or more structural parameters of the inspected structure by inputting the extracted values into an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.
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公开(公告)号：US20230040995A1
公开(公告)日：2023-02-09
申请号：US17970054
申请日：2022-10-20
Applicant: Applied Materials Israel Ltd.
Inventor： Ori Golani , Ido Almog
Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes projecting an optical pump pulse on a semiconductor device comprising a target region, such as to produce an acoustic pulse which propagates within the target region of the semiconductor device, wherein a wavelength of the pump pulse is at least two times greater than a lateral extent of a lateral structural feature of the semiconductor device along at least one lateral direction, projecting an optical probe pulse on the semiconductor device, such that the probe pulse undergoes Brillouin scattering off the acoustic pulse within the target region, detecting a scattered component of the probe pulse to obtain a measured signal, and analyzing the measured signal to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature.
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公开(公告)号：US11519720B2
公开(公告)日：2022-12-06
申请号：US17068693
申请日：2020-10-12
Applicant: Applied Materials Israel, Ltd.
Inventor： Ori Golani , Ido Almog
Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes obtaining measured signals of the sample and analyzing thereof to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature. The measured signals are obtained by repeatedly: projecting a pump pulse on the sample, thereby producing an acoustic pulse propagating within the target region; Brillouin-scattering a probe pulse off the acoustic pulse within the target region; and detecting a scattered component of the probe pulse to obtain a measured signal. In each repetition the respective probe pulse is scattered off the acoustic pulse at a respective depth within the target region, thereby probing the target region at a plurality of depths. A wavelength of the pump pulse is at least about two times greater than a lateral extent of the lateral structural feature.
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