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    Method for fabricating micromachined members coupled for relative rotation
    13.
    发明授权
    Method for fabricating micromachined members coupled for relative rotation 失效
    用于制造耦合用于相对旋转的微加工构件的方法

    公开(公告)号：US06426013B1

    公开(公告)日：2002-07-30

    申请号：US09428946

    申请日：1999-10-28

    Applicant: Armand P. Neukermans ,  Timothy G. Slater

    Inventor： Armand P. Neukermans ,  Timothy G. Slater

    IPC: G02B2600

    CPC classification number: G02B26/101 ,  G01C19/5719 ,  G02B26/0841 ,  G02B26/085

    Abstract: A method for fabricating an integrated, micromachined structure, such as a torsional scanner, that includes a reference member, such as a frame, a pair of torsion hinges, and a dynamic member that is coupled to the reference member by the torsion hinges. The method includes providing a wafer that has been formed from silicon material, and that has both a frontside and a backside. A membrane is formed in the wafer by etching a cavity in the silicon material from the backside of the wafer. The method also includes establishing a pattern that defines the mirror surface and the torsion hinges on the frontside of the wafer at the membrane formed therein. The frontside of the wafer is processed to form therein the dynamic member and the torsion hinges that support the dynamic member for rotation about the axis.

    Abstract translation: 一种用于制造集成的微加工结构的方法，例如扭转扫描器，其包括诸如框架的参考构件，一对扭转铰链和通过扭转铰链联接到参考构件的动态构件。 该方法包括提供由硅材料形成并且具有前侧和后侧的晶片。 通过从晶片的背面蚀刻硅材料中的空腔而在晶片中形成膜。 该方法还包括在其中形成的膜上建立限定晶片表面和扭转铰链的图案。 处理晶片的前侧以在其中形成动态构件和支撑动态构件的扭转铰链以围绕轴线旋转。

    Compact document scanner or printer engine
    14.
    发明授权
    Compact document scanner or printer engine 失效
    小型文件扫描仪或打印机引擎

    公开(公告)号：US5841553A

    公开(公告)日：1998-11-24

    申请号：US773097

    申请日：1996-12-24

    Applicant: Armand P. Neukermans

    Inventor： Armand P. Neukermans

    IPC: G02B26/08 ,  G02B26/10 ,  H04N1/00 ,  H04N1/113 ,  H04N1/12 ,  H04N1/193 ,  H04N1/04 ,  G01J1/00

    CPC classification number: H04N1/1135 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/105 ,  H04N1/00204 ,  H04N1/00236 ,  H04N1/00238 ,  H04N1/0283 ,  H04N1/12 ,  H04N1/193 ,  H04N2201/0063

    Abstract: A compact medium scanner (100) scans a surface (132) of a medium (134) with a beam of light (106). A medium transport mechanism (202, 206) advances the surface along a medium transport path through a scanning station. A light source (104) produces a collimated beam of light (106) that impinges upon a mirror plate (112) of a micromachined torsional scanner (108). A pair of coaxially aligned torsion bars (304) support the mirror plate (112) within the torsional scanner (108). A mirror-surface drive means (306, 312) rotates the mirror plate (112) about the torsion bars (304). A single reciprocation of the mirror plate (112) by the drive means (306, 312) deflects the beam of light (106) over a fan-shaped region having a virtually fixed vertex (128) on the mirror plate (112). Scanner optics (116, 122) direct the fan-shaped region beam of light (106) onto the surface (132) of the medium (134) then present in the scanning station to thereby scan across the medium (134) with the beam of light (106).

    Abstract translation: 紧凑介质扫描器（100）用光束（106）扫描介质（134）的表面（132）。 中间传送机构（202,206）使表面沿着介质输送路径前进通过扫描台。 光源（104）产生撞击微加工扭转扫描器（108）的镜板（112）的准直光束（106）。 一对同轴对准的扭杆（304）支撑在扭转扫描器（108）内的镜板（112）。 镜面驱动装置（306,312）围绕扭杆（304）旋转镜板（112）。 通过驱动装置（306,312），镜板（112）的单次往复运动将光束（106）偏转在具有实际上固定的顶点（128）的扇形区域上，在镜板（112）上。 扫描仪光学器件（116,122）将扇形区域光束（106）引导到介质（134）的表面（132）上，然后存在于扫描站中，从而用介质（134）的横梁扫描 光（106）。

    Method and apparatus for lithographic rotate and repeat processing
    15.
    发明授权
    Method and apparatus for lithographic rotate and repeat processing 失效
    光刻旋转和重复处理的方法和装置

    公开(公告)号：US4613981A

    公开(公告)日：1986-09-23

    申请号：US573524

    申请日：1984-01-24

    Applicant: Graham J. Siddall ,  Steven G. Eaton ,  James B. Kruger ,  Garrett A. Garrettson ,  Armand P. Neukermans

    Inventor： Graham J. Siddall ,  Steven G. Eaton ,  James B. Kruger ,  Garrett A. Garrettson ,  Armand P. Neukermans

    IPC: H01L21/30 ,  G03F1/16 ,  G03F7/20 ,  H01J37/305 ,  H01L21/027 ,  G21K5/00

    CPC classification number: G03F7/70425 ,  G03F7/70433

    Abstract: An X-ray lithography apparatus permits the successive exposure of each of four quadrants of a semiconductor wafer through a single mask. The mask overlays one quadrant of the wafer at a time and the wafer is rotated through 90 degrees after exposure of a quadrant to allow exposure of succeeding wafer quadrants; each wafer quadrant is independently aligned to the mask prior to exposure. In an alternative preferred embodiment, a rotatable diaphragm is used to select a single mask quadrant from a mask which overlays the entire surface of the semiconductor wafer. Both the wafer and the diaphragm may be rotated to allow various exposure combinations of mask and wafer quadrants.

    Abstract translation: X射线光刻设备允许半导体晶片的四个象限中的每一个通过单个掩模的连续曝光。 掩模一次覆盖晶片的一个象限，并且在象限曝光后晶片旋转90度以允许后续晶圆象限的曝光; 每个晶片象限在曝光之前独立地对准掩模。 在替代的优选实施例中，可旋转振膜用于从覆盖半导体晶片的整个表面的掩模中选择单个掩模象限。 可以旋转晶片和隔膜以允许掩模和晶片象限的各种曝光组合。

    Electron beam window
    16.
    发明授权
    Electron beam window 失效
    电子束窗

    公开(公告)号：US4494036A

    公开(公告)日：1985-01-15

    申请号：US590934

    申请日：1984-03-19

    Applicant: Armand P. Neukermans

    Inventor： Armand P. Neukermans

    IPC: H01J5/18 ,  H01J9/24 ,  H01J31/06 ,  H01J33/04

    CPC classification number: H01J5/18 ,  H01J31/065 ,  H01J9/244

    Abstract: A method of making an electron permeable window is provided which entails depositing a thin film of an inert, high strength material or compound having a low atomic number onto a substrate by chemical vapor deposition (CVD). Following that deposition, a window pattern and window support perimeter are photolithographically defined and the substrate is etched to leave the desired window structure. For a particular class of materials including SiC, BN, B.sub.4 C, Si.sub.3 N.sub.4, and Al.sub.4 C.sub.3, films are provided which are exceedingly tough and pinhole free, and which exhibit nearly zero internal stress. Furthermore, due to their extreme strength, these materials allow fabrication of extremely thin windows. In addition, because of their low atomic number and density, they have excellent electron penetration characteristics at low beam voltages (15 to 30kV), so that most conventional CRT deflection schemes can be used to direct the beam. Also, such films are remarkably resilient and chemically inert even when very thin and can easily withstand large pressure differences.

    Abstract translation: 提供一种制造电子透视窗的方法，其需要通过化学气相沉积（CVD）将具有低原子序数的惰性高强度材料或化合物的薄膜沉积到基底上。 在沉积之后，窗光图案和窗口支撑周边被光刻定义，并且蚀刻衬底以留下所需的窗口结构。 对于包括SiC，BN，B4C，Si3N4和Al4C3在内的特定类型的材料，提供了非常坚固和无针孔的膜，其表现出几乎零的内应力。 此外，由于它们的极强的强度，这些材料允许制造极薄的窗户。 另外，由于它们的原子数和密度低，它们在低光束电压（15至30kV）下具有优异的电子穿透特性，因此大多数传统的CRT偏转方案可用于引导光束。 此外，即使非常薄并且容易承受较大的压力差，这些膜也具有显着的弹性和化学惰性。

    Recording with donor transfer of magnetic toner
    17.
    发明授权
    Recording with donor transfer of magnetic toner 失效
    记录磁铁的转移

    公开(公告)号：US4038665A

    公开(公告)日：1977-07-26

    申请号：US616969

    申请日：1975-09-26

    Applicant: Armand P. Neukermans

    Inventor： Armand P. Neukermans

    IPC: B41J2/42 ,  G03G19/00

    CPC classification number: G03G19/00

    Abstract: A method and apparatus for selectively transferring magnetic toner from a reservoir to the imaged areas of a copy web. The reservoir is used to develop a donor web in which a multiplicity of microfields have been recorded. The donor web is subsequently passed into non-contacting proximity to a copy web having a latent magnetic image thereon. The toner is selectively attracted to the stronger magnetic forces in the imaged areas of the copy web and remains on the donor web in the non-imaged areas. Another aspect of the invention provides for the neutralization of the donor web microfields prior to the toner transfer to enhance the development process.

    Hearing aid microactuator
    19.
    发明授权
    Hearing aid microactuator 有权
    助听器微型致动器

    公开(公告)号：US08876689B2

    公开(公告)日：2014-11-04

    申请号：US13437896

    申请日：2012-04-02

    Applicant: S. George Lesinski ,  Armand P. Neukermans

    Inventor： S. George Lesinski ,  Armand P. Neukermans

    IPC: H04R25/00 ,  A61N1/05 ,  A61B17/16 ,  A61N1/36

    CPC classification number: A61B17/1679 ,  A61N1/0541 ,  A61N1/36036

    Abstract: A fenestration piercing the otic capsule bone of the cochlea receives a therapeutic appliance, such as a microactuator, plug, micropump for drug or therapeutic agent delivery, electrode, and the like. Several different ways of achieving a ‘water tight’ seal between the otic capsule bone and the therapeutic appliance are provided. The therapeutic appliance may be implanted with or without a sheath or sleeve lining the wall of the fenestration formed using specialized surgical burrs. The burrs permit safely fenestrating the otic capsule bone adjacent to the scala tympani of the cochlea without damaging the basilar membrane or organ of corti. This approach may also be adopted for safely fenestrating other areas of the inner ear such as the scala vestibuli, bony labyrinth of semicircular canals, or walls of the vestibule, or the oval or round windows thereof.

    Abstract translation: 刺穿耳蜗的耳廓胶囊骨的开窗接收治疗器具，例如用于药物或治疗剂递送的微型致动器，塞子，微型泵，电极等。 提供了在耳廓胶囊骨和治疗器具之间实现“防水”密封的几种不同的方式。 治疗器具可以植入有或不具有衬套在使用专门的手术毛刺形成的开窗壁的护套或套管。 毛刺允许安全地开启邻近耳蜗鼓膜的耳廓胶囊骨，而不损伤基底膜或皮层的器官。 这种方法也可以用于安全地开窗内耳的其他区域，例如scala vestibuli，半圆形运河的骨迷宫或前庭的墙壁，或其椭圆形或圆形的窗户。

    Flexible, modular, compact fiber optic switch
    20.
    发明授权
    Flexible, modular, compact fiber optic switch 失效
    灵活，模块化，紧凑的光纤开关

    公开(公告)号：US06795602B2

    公开(公告)日：2004-09-21

    申请号：US09729336

    申请日：2000-12-01

    Applicant: Armand P. Neukermans ,  Timothy G. Slater ,  Tyler L. Baughman ,  James P. Downing ,  John S. Forker ,  Gregory A. Reznick ,  Sam Calmes ,  Steven M. Clark ,  Jack D. Foster ,  Marc R. Schuman ,  Rajiv Ramaswami

    Inventor： Armand P. Neukermans ,  Timothy G. Slater ,  Tyler L. Baughman ,  James P. Downing ,  John S. Forker ,  Gregory A. Reznick ,  Sam Calmes ,  Steven M. Clark ,  Jack D. Foster ,  Marc R. Schuman ,  Rajiv Ramaswami

    IPC: G02B635

    CPC classification number: G02B6/359 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B26/0841 ,  G02B2006/12104

    Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs deflectors (172) coupling a beam of light (108) between optical fibers (106).

    Abstract translation: 光纤开关（400）包括光纤切换模块（100），其接收和固定光纤（106）的端部（104）。 模块（100）包括多个反射光束偏转器（172），其可以被选择成对，用于耦合一对光纤（106）之间的光束（108）。 模块（100）还产生来自指示其取向的每个偏转器（172）的取向信号。 包括在开关（400）中的端口卡（406）向驱动模块（100）提供用于定向至少一个偏转器（172）的驱动信号。 端口卡（406）还接收由该偏转器（172）产生的取向信号以及指定偏转器（172）的取向的坐标。 端口卡（406）将接收到的坐标与从偏转器（172）接收的定向信号进行比较，并且调整提供给模块（100）的驱动信号，以减少所接收的坐标和取向信号之间的差异。 开关（400）还采用光学对准来精确地定向耦合在光纤（106）之间的光束（108）的对偏转器（172）。

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