公开(公告)号：US5555981A

公开(公告)日：1996-09-17

申请号：US425259

申请日：1995-04-18

申请人： Barry Gregerson

发明人： Barry Gregerson

IPC分类号： H01L21/673 ,  B65D85/90

CPC分类号： H01L21/67369

摘要： A ridged, transparent, thermoplastic package for transporting disk products such as wafers, semi-conductor wafers or computer memory disks is disclosed. Elastomeric or flexible thermoplastic cushions hold the disk products in a manner which precludes them from becoming damaged during normal shipping and handling. The cushions have a plurality of disk engaging members which individually engage a disk. The disk engaging member conforms to the edge profile of the substrate wafer to securely hold the wafer. Wafer rotation is eliminated, particle generation is reduced and the cushions securely hold the disk products.

摘要翻译： 公开了用于传送诸如晶片，半导体晶片或计算机存储盘的盘产品的脊状，透明的热塑性包装。 弹性或柔性的热塑性垫子以一种排除它们在正常运输和处理期间不会损坏的方式固定磁盘产品。 垫子具有多个单独接合盘的盘接合构件。 盘接合构件符合衬底晶片的边缘轮廓以牢固地保持晶片。 消除晶圆旋转，减少颗粒产生，并且缓冲垫牢固地固定磁盘产品。

公开(公告)号：US09312157B2

公开(公告)日：2016-04-12

申请号：US14238693

申请日：2012-08-13

申请人： Michael S. Adams ,  Barry Gregerson ,  Matthew A. Fuller

发明人： Michael S. Adams ,  Barry Gregerson ,  Matthew A. Fuller

IPC分类号： H01L21/673

CPC分类号： H01L21/67389 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

摘要翻译： 适用于450mm等大晶圆的前开口晶片容器利用具有单独紧固件的组件，以方便的方式将组件锁定在一起，从而提供牢固的连接和成本效率。 容器部分具有敞开的前部并且在底表面上容纳通过扭锁连接器固定的底板，所述扭转锁连接器还提供用于清洗索环的凹部。 运动耦合部件容易且牢固地锁定在基板上。 内部晶片支撑部件利用具有固定突片和锁定棘爪的单独的锁定插入件锁定在侧壁上的托架上。 当门安装和就座时，晶片保持器提供支撑和计数增强的与450mm晶片相关联的晶片下垂。

公开(公告)号：US20150041353A1

公开(公告)日：2015-02-12

申请号：US14238693

申请日：2012-08-13

申请人： Michael S. Adams ,  Barry Gregerson ,  Matthew A Fuller

发明人： Michael S. Adams ,  Barry Gregerson ,  Matthew A Fuller

IPC分类号： H01L21/673

CPC分类号： H01L21/67389 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

摘要翻译： 适用于450mm等大晶圆的前开口晶片容器利用具有单独紧固件的组件，以方便的方式将组件锁定在一起，从而提供牢固的连接和成本效率。 容器部分具有敞开的前部并且在底表面上容纳通过扭锁连接器固定的底板，所述扭转锁连接器还提供用于清洗索环的凹部。 运动耦合部件容易且牢固地锁定在基板上。 内部晶片支撑部件利用具有固定突片和锁定棘爪的单独的锁定插入件锁定在侧壁上的托架上。 当门安装和就座时，晶片保持器提供支撑和计数增强的与450mm晶片相关联的晶片下垂。

公开(公告)号：US20130319907A1

公开(公告)日：2013-12-05

申请号：US13880948

申请日：2011-10-19

申请人： Barry Gregerson ,  Matthew A. Fuller ,  Michael S. Adams

发明人： Barry Gregerson ,  Matthew A. Fuller ,  Michael S. Adams

IPC分类号： H01L21/673

CPC分类号： H01L21/67376 ,  H01L21/67369 ,  H01L21/67373

摘要： A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates.

摘要翻译： 一种晶片容器，其减少或减轻由于负载和过量的颗粒物产生引起的过大的容器壁挠曲所引起的一个或多个问题，特别是当450mm直径和较大晶片的容器遇到这些问题时。 容器具有一个具有互锁特征的外壳和门，以便将张力负载传递到门，以最小化容器表面的偏差。 容器可以包括与互锁特征相兼容的衬垫布置。 容器可以包括可移除的门导板，其可以在门安装期间改善门的对中，并且由低颗粒发生材料制成以减少微粒。

公开(公告)号：USRE41231E1

公开(公告)日：2010-04-20

申请号：US10310069

申请日：1995-10-13

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D85/90

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： 公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：US20060244942A1

公开(公告)日：2006-11-02

申请号：US11364860

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  H01L21/67353 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67393

摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

公开(公告)号：USD387903S

公开(公告)日：1997-12-23

申请号：US45248

申请日：1995-10-13

申请人： Robert Jacoby ,  Barry Gregerson

设计人： Robert Jacoby ,  Barry Gregerson

公开(公告)号：US5686521A

公开(公告)日：1997-11-11

申请号：US636724

申请日：1996-04-23

申请人： Brian Massengale ,  Paul Schauer ,  Charles Dahle ,  Barry Gregerson ,  Bonnie Bachman ,  Thomas Oesterle

发明人： Brian Massengale ,  Paul Schauer ,  Charles Dahle ,  Barry Gregerson ,  Bonnie Bachman ,  Thomas Oesterle

IPC分类号： B29B11/16 ,  B29K105/06 ,  C08J5/16 ,  C08K7/06 ,  C08L23/02 ,  C08L23/10 ,  C08L27/18 ,  C08L77/00 ,  H01L21/673 ,  H01L23/00 ,  C08J5/10 ,  C08K3/04 ,  C08L23/12

CPC分类号： C08K7/06 ,  C08L23/10

摘要： A milled carbon fiber reinforced polymer having increased abrasion resistive characteristics. The reinforced polymer comprises a base resin selected from the group consisting of polyolefins and polyamides. The base resin is combined with an amount of milled carbon fibers and further may be combined with polytetrafluoroethylene. The resulting composite materials have excellent friction and wear characteristics and are useful in the production of injection molded parts. The molded parts have a high impact strength, exhibit dimensional stability, are abrasion resistive, and are static dissipative, with the composite materials having particular utility as support fixtures for semiconductors during certain processing operations.

摘要翻译： 研磨的碳纤维增强聚合物具有增加的耐磨特性。 增强聚合物包括选自聚烯烃和聚酰胺的基础树脂。 基础树脂与一定数量的研磨碳纤维组合，并且还可以与聚四氟乙烯组合。 所得到的复合材料具有优异的摩擦和磨损特性，并且可用于注塑部件的生产。 模制件具有高冲击强度，显示尺寸稳定性，耐磨性，并且是静电耗散的，复合材料在特定加工操作中具有特殊的用途作为半导体的支撑夹具。

公开(公告)号：USD383898S

公开(公告)日：1997-09-23

申请号：US45221

申请日：1995-10-13

申请人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

设计人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

公开(公告)号：US20070175792A1

公开(公告)日：2007-08-02

申请号：US11345984

申请日：2006-02-02

申请人： Barry Gregerson

发明人： Barry Gregerson

IPC分类号： B65D85/00

CPC分类号： H01L21/67126 ,  H01L21/67376

摘要： A wafer container with the door frame has a magnetic seal that encircles the periphery of the door and has a flexible portion extending laterally outwardly to engage a corresponding magnetic seal around the periphery of the door. Thus the door and container can be provided with a seal that is strong enough to exclude contaminants and also allows easy removal of the door either manually or by a robotic arm.

摘要翻译： 具有门框的晶片容器具有围绕门的周边的磁性密封件，并且具有横向向外延伸的柔性部分，以在门的外周附近相应的磁性密封。 因此，门和容器可以设置有足够强的密封以排除污染物，并且还允许手动地或通过机器手臂容易地移除门。