Multidirectional leakage path test structure
    13.
    发明申请
    Multidirectional leakage path test structure 失效
    多向泄漏路径测试结构

    公开(公告)号:US20060113532A1

    公开(公告)日:2006-06-01

    申请号:US10996365

    申请日:2004-11-26

    IPC分类号: H01L23/58

    CPC分类号: G01R31/025 H01L22/34

    摘要: A test structure for testing a multidirectional current leakage path. A first doped region of a first conductivity is in the first well of the first conductivity in a substrate, in which the first doped region has a dopant concentration higher than the first well has. A first contact is on the first doped region and contacts the first doped region. The first contact has first and second portions respectively parallel to the first and second directions. A plurality of second doped regions of a second conductivity are in the first well and isolated from the first doped region. In a third direction, the second regions are adjacent to each another and isolate the first portion from the second portion. A plurality of second contacts are on the second doped regions and each one is corresponding to each the second doped region. With a relative shift between the first contact and the second doped region, the partial overlap is used in the test of a multidirectional leakage path.

    摘要翻译: 用于测试多向电流泄漏路径的测试结构。 第一导电性的第一掺杂区域在衬底中位于第一导电性的第一阱中,其中第一掺杂区域具有高于第一阱的掺杂剂浓度。 第一接触在第一掺杂区域上并接触第一掺杂区域。 第一触点具有分别平行于第一和第二方向的第一和第二部分。 具有第二导电性的多个第二掺杂区域位于第一阱中并与第一掺杂区隔离。 在第三方向上,第二区域彼此相邻并且将第一部分与第二部分隔离。 多个第二触点位于第二掺杂区域上,并且每个第二触点对应于每个第二掺杂区域。 通过第一接触和第二掺杂区域之间的相对移动,在多向泄漏路径的测试中使用部分重叠。

    Multidirectional leakage path test structure
    14.
    发明授权
    Multidirectional leakage path test structure 失效
    多向泄漏路径测试结构

    公开(公告)号:US07332741B2

    公开(公告)日:2008-02-19

    申请号:US10996365

    申请日:2004-11-26

    IPC分类号: H01L29/40

    CPC分类号: G01R31/025 H01L22/34

    摘要: A test structure for testing a multidirectional current leakage path. A first doped region of a first conductivity is in the first well of the first conductivity in a substrate, in which the first doped region has a dopant concentration higher than the first well has. A first contact is on the first doped region and contacts the first doped region. The first contact has first and second portions respectively parallel to the first and second directions. A plurality of second doped regions of a second conductivity are in the first well and isolated from the first doped region. In a third direction, the second regions are adjacent to each another and isolate the first portion from the second portion. A plurality of second contacts are on the second doped regions and each one is corresponding to each the second doped region. With a relative shift between the first contact and the second doped region, the partial overlap is used in the test of a multidirectional leakage path.

    摘要翻译: 用于测试多向电流泄漏路径的测试结构。 第一导电性的第一掺杂区域在衬底中位于第一导电性的第一阱中,其中第一掺杂区域具有高于第一阱的掺杂剂浓度。 第一接触在第一掺杂区域上并接触第一掺杂区域。 第一触点具有分别平行于第一和第二方向的第一和第二部分。 具有第二导电性的多个第二掺杂区域位于第一阱中并与第一掺杂区隔离。 在第三方向上,第二区域彼此相邻并且将第一部分与第二部分隔离。 多个第二触点位于第二掺杂区域上,并且每个第二触点对应于每个第二掺杂区域。 通过第一接触和第二掺杂区域之间的相对移动,在多向泄漏路径的测试中使用部分重叠。