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公开(公告)号:US20190182958A1
公开(公告)日:2019-06-13
申请号:US16281045
申请日:2019-02-20
申请人: Intel Corporation
发明人: Damion SEARLS , Weston C. ROTH , Margaret D. RAMIREZ , James D. JACKSON , Rainer E. THOMAS , Charles A. GEALER
IPC分类号: H05K1/18 , H01L23/498 , H01L21/56 , H01L25/03
CPC分类号: H05K1/181 , H01L21/563 , H01L23/49827 , H01L23/552 , H01L24/16 , H01L24/32 , H01L24/48 , H01L24/73 , H01L25/03 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73203 , H01L2224/73265 , H01L2225/06562 , H01L2924/00011 , H01L2924/00014 , H01L2924/01057 , H01L2924/09701 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H05K3/284 , H05K2201/10515 , H05K2201/10674 , H05K2201/10734 , H05K2201/10977 , Y02P70/611 , H01L2924/00012 , H01L2924/00 , H01L2224/0401 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: Disclosed are embodiments of a system-level assembly including an integrated circuit (IC) die directly attached to a mainboard. An IC die directly attached to a mainboard or other circuit board may be referred to as a direct-chip attach (DCA) die. A package is disposed over at least a portion of the DCA die and coupled with the mainboard. The package includes one or more other IC die disposed on a substrate. Other embodiments are described and claimed.
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公开(公告)号:US20180019237A1
公开(公告)日:2018-01-18
申请号:US15714712
申请日:2017-09-25
发明人: Yoichiro KURITA , Masaya KAWANO , Koji SOEJIMA
IPC分类号: H01L25/00 , H01L21/56 , H01L23/00 , H01L25/18 , H01L21/683 , H01L23/538
CPC分类号: H01L25/50 , H01L21/568 , H01L21/6835 , H01L23/13 , H01L23/3121 , H01L23/49816 , H01L23/522 , H01L23/5226 , H01L23/5383 , H01L23/5384 , H01L23/5386 , H01L24/02 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/16 , H01L25/18 , H01L2221/68345 , H01L2221/68372 , H01L2224/02319 , H01L2224/02331 , H01L2224/02333 , H01L2224/02372 , H01L2224/02373 , H01L2224/02379 , H01L2224/02381 , H01L2224/16137 , H01L2224/16146 , H01L2224/16225 , H01L2224/16235 , H01L2224/16238 , H01L2224/17181 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81005 , H01L2224/83005 , H01L2225/06513 , H01L2225/06544 , H01L2225/06555 , H01L2225/06582 , H01L2924/00011 , H01L2924/00014 , H01L2924/01079 , H01L2924/09701 , H01L2924/12042 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/18161 , H01L2924/19015 , H01L2924/19041 , H01L2924/19105 , H05K3/0058 , H05K3/284 , H05K3/4682 , H05K2201/0195 , H05K2201/09527 , H05K2201/096 , H05K2201/09972 , H05K2203/016 , H05K2203/0733 , H05K2203/1469 , H01L2924/00 , H01L2224/0401
摘要: In a conventional electronic device and a method of manufacturing the same, reduction in cost of the electronic device is hindered because resin used in an interconnect layer on the solder ball side is limited. The electronic device includes an interconnect layer (a first interconnect layer) and an interconnect layer (a second interconnect layer). The second interconnect layer is formed on the undersurface of the first interconnect layer. The second interconnect layer is larger in area seen from the top than the first interconnect layer and is extended to the outside from the first interconnect layer.
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公开(公告)号:US20170373055A1
公开(公告)日:2017-12-28
申请号:US15700679
申请日:2017-09-11
IPC分类号: H01L27/06 , H02M3/155 , H01L29/78 , H01L29/66 , H01L29/49 , H01L29/45 , H01L29/423 , H01L23/00 , H01L23/495 , H01L23/31 , H01L21/8234 , H01L21/28 , H02M7/00 , H01L29/417 , H01L29/10 , H01L29/872
CPC分类号: H01L27/0629 , H01L21/28035 , H01L21/823475 , H01L23/3107 , H01L23/49524 , H01L23/49562 , H01L23/49575 , H01L24/06 , H01L24/37 , H01L24/40 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L29/1095 , H01L29/41741 , H01L29/4232 , H01L29/4236 , H01L29/4238 , H01L29/45 , H01L29/456 , H01L29/4916 , H01L29/66143 , H01L29/66734 , H01L29/7806 , H01L29/7813 , H01L29/872 , H01L2224/0401 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/371 , H01L2224/37124 , H01L2224/37147 , H01L2224/40095 , H01L2224/40245 , H01L2224/40247 , H01L2224/45015 , H01L2224/45144 , H01L2224/48011 , H01L2224/48091 , H01L2224/48095 , H01L2224/48137 , H01L2224/48247 , H01L2224/48253 , H01L2224/48624 , H01L2224/4903 , H01L2224/49051 , H01L2224/49111 , H01L2224/49171 , H01L2224/49175 , H01L2224/73221 , H01L2224/8385 , H01L2224/84801 , H01L2224/8485 , H01L2924/00 , H01L2924/00012 , H01L2924/00014 , H01L2924/01002 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01021 , H01L2924/01022 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01057 , H01L2924/01072 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12032 , H01L2924/1305 , H01L2924/1306 , H01L2924/13091 , H01L2924/14 , H01L2924/1532 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/20753 , H01L2924/20755 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H02M3/155 , H02M7/003
摘要: In a non-insulated DC-DC converter having a circuit in which a power MOS•FET high-side switch and a power MOS•FET low-side switch are connected in series, the power MOS•FET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOS•FET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOS•FET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.
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公开(公告)号:US09847325B2
公开(公告)日:2017-12-19
申请号:US15354484
申请日:2016-11-17
发明人: Yoichiro Kurita , Masaya Kawano , Koji Soejima
IPC分类号: H01L23/48 , H01L23/52 , H01L29/40 , H01L21/00 , H01L21/30 , H01L21/46 , H01L21/4763 , H01L25/00 , H01L21/56 , H01L21/683 , H01L25/18 , H01L23/538 , H01L23/00
CPC分类号: H01L25/50 , H01L21/568 , H01L21/6835 , H01L23/13 , H01L23/3121 , H01L23/49816 , H01L23/522 , H01L23/5226 , H01L23/5383 , H01L23/5384 , H01L23/5386 , H01L24/02 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/16 , H01L25/18 , H01L2221/68345 , H01L2221/68372 , H01L2224/02319 , H01L2224/02331 , H01L2224/02333 , H01L2224/02372 , H01L2224/02373 , H01L2224/02379 , H01L2224/02381 , H01L2224/16137 , H01L2224/16146 , H01L2224/16225 , H01L2224/16235 , H01L2224/16238 , H01L2224/17181 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81005 , H01L2224/83005 , H01L2225/06513 , H01L2225/06544 , H01L2225/06555 , H01L2225/06582 , H01L2924/00011 , H01L2924/00014 , H01L2924/01079 , H01L2924/09701 , H01L2924/12042 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/18161 , H01L2924/19015 , H01L2924/19041 , H01L2924/19105 , H05K3/0058 , H05K3/284 , H05K3/4682 , H05K2201/0195 , H05K2201/09527 , H05K2201/096 , H05K2201/09972 , H05K2203/016 , H05K2203/0733 , H05K2203/1469 , H01L2924/00 , H01L2224/0401
摘要: In a conventional electronic device and a method of manufacturing the same, reduction in cost of the electronic device is hindered because resin used in an interconnect layer on the solder ball side is limited. The electronic device includes an interconnect layer (a first interconnect layer) and an interconnect layer (a second interconnect layer). The second interconnect layer is formed on the undersurface of the first interconnect layer. The second interconnect layer is larger in area seen from the top than the first interconnect layer and is extended to the outside from the first interconnect layer.
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公开(公告)号:US09806015B1
公开(公告)日:2017-10-31
申请号:US15419267
申请日:2017-01-30
申请人: SK hynix Inc.
发明人: Ki Jun Sung , Jong Hoon Kim , Han Jun Bae
IPC分类号: H01L21/00 , H01L23/02 , H01L23/498 , H01L23/31 , H01L25/065 , H01L25/18 , H01L21/48 , H01L21/56 , H01L25/00 , H01L23/00 , H01L25/07 , H01L25/11
CPC分类号: H01L23/49838 , H01L21/4853 , H01L21/4857 , H01L21/486 , H01L21/565 , H01L23/3114 , H01L23/3128 , H01L23/481 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L23/562 , H01L24/16 , H01L25/0652 , H01L25/0657 , H01L25/071 , H01L25/112 , H01L25/18 , H01L25/50 , H01L2224/13025 , H01L2224/13147 , H01L2224/1403 , H01L2224/14181 , H01L2224/16146 , H01L2224/16227 , H01L2224/73253 , H01L2225/06572 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/16251 , H01L2924/18161
摘要: A semiconductor package includes first bump pads on a first surface of an interconnection structure layer, elevated pads thicker than the first bump pads on the first surface of the interconnection structure layer, a first semiconductor device connected on the first bump pads, through mold ball connectors connected on the elevated pads, respectively, a molding layer disposed covering the first surface of the interconnection structure layer to expose a portion of each of the through mold ball connectors, outer connectors respectively attached to the through mold ball connectors, and a second semiconductor device on a second surface of the interconnection structure layer opposite to the molding layer.
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公开(公告)号:US09793265B2
公开(公告)日:2017-10-17
申请号:US15265940
申请日:2016-09-15
IPC分类号: H01L27/06 , H01L23/31 , H01L23/495 , H01L23/00 , H01L29/78 , H02M7/00 , H01L21/28 , H01L21/8234 , H01L29/49 , H01L29/66 , H02M3/155 , H01L29/10 , H01L29/417 , H01L29/423 , H01L29/45 , H01L29/872
CPC分类号: H01L27/0629 , H01L21/28035 , H01L21/823475 , H01L23/3107 , H01L23/49524 , H01L23/49562 , H01L23/49575 , H01L24/06 , H01L24/37 , H01L24/40 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/73 , H01L29/1095 , H01L29/41741 , H01L29/4232 , H01L29/4236 , H01L29/4238 , H01L29/45 , H01L29/456 , H01L29/4916 , H01L29/66143 , H01L29/66734 , H01L29/7806 , H01L29/7813 , H01L29/872 , H01L2224/0401 , H01L2224/04042 , H01L2224/05554 , H01L2224/05624 , H01L2224/371 , H01L2224/37124 , H01L2224/37147 , H01L2224/40095 , H01L2224/40245 , H01L2224/40247 , H01L2224/45015 , H01L2224/45144 , H01L2224/48011 , H01L2224/48091 , H01L2224/48095 , H01L2224/48137 , H01L2224/48247 , H01L2224/48253 , H01L2224/48624 , H01L2224/4903 , H01L2224/49051 , H01L2224/49111 , H01L2224/49171 , H01L2224/49175 , H01L2224/73221 , H01L2224/8385 , H01L2224/84801 , H01L2224/8485 , H01L2924/00 , H01L2924/00012 , H01L2924/00014 , H01L2924/01002 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01021 , H01L2924/01022 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01057 , H01L2924/01072 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12032 , H01L2924/1305 , H01L2924/1306 , H01L2924/13091 , H01L2924/14 , H01L2924/1532 , H01L2924/181 , H01L2924/19041 , H01L2924/19043 , H01L2924/20753 , H01L2924/20755 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , H02M3/155 , H02M7/003
摘要: In a non-insulated DC-DC converter having a circuit in which a power MOS•FET high-side switch and a power MOS•FET low-side switch are connected in series, the power MOS•FET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOS•FET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOS•FET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.
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公开(公告)号:US09780072B2
公开(公告)日:2017-10-03
申请号:US15154770
申请日:2016-05-13
发明人: Shin-Puu Jeng , Shang-Yun Hou , Kim Hong Chen , Wensen Hung , Szu-Po Huang
IPC分类号: H01L23/48 , H01L25/065 , H01L23/00 , H01L23/13 , H01L23/498 , H01L25/00 , H01L23/31 , H01L23/538 , H01L21/683 , H01L25/18 , H01L21/56 , H01L21/48 , H01L23/367 , H01L23/42
CPC分类号: H01L25/0652 , H01L21/4853 , H01L21/4857 , H01L21/561 , H01L21/563 , H01L21/6835 , H01L23/13 , H01L23/3128 , H01L23/3135 , H01L23/367 , H01L23/3677 , H01L23/42 , H01L23/49822 , H01L23/49827 , H01L23/49833 , H01L23/49838 , H01L23/5389 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/18 , H01L25/50 , H01L2221/68327 , H01L2221/68331 , H01L2224/0401 , H01L2224/11 , H01L2224/11002 , H01L2224/11003 , H01L2224/1111 , H01L2224/11334 , H01L2224/1183 , H01L2224/11848 , H01L2224/131 , H01L2224/13111 , H01L2224/13116 , H01L2224/13139 , H01L2224/1403 , H01L2224/14051 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/16237 , H01L2224/1703 , H01L2224/2919 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/81 , H01L2224/81005 , H01L2224/81191 , H01L2224/81192 , H01L2224/81805 , H01L2224/83 , H01L2224/92125 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/0652 , H01L2225/06548 , H01L2225/06568 , H01L2225/06572 , H01L2225/06589 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/0132 , H01L2924/01322 , H01L2924/04941 , H01L2924/04953 , H01L2924/12042 , H01L2924/14 , H01L2924/1431 , H01L2924/1436 , H01L2924/1437 , H01L2924/1443 , H01L2924/15153 , H01L2924/15159 , H01L2924/15311 , H01L2924/1532 , H01L2924/15321 , H01L2924/157 , H01L2924/181 , H01L2924/18161 , H01L2924/2075 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755 , H01L2924/00012 , H01L2924/00 , H01L2924/014
摘要: Disclosed herein is a method of forming a device, comprising mounting a plurality of first interconnects on one or more first integrated circuit dies. One or more second integrated circuit dies are mounted on a first side of an interposer. The interposer is mounted at a second side to the first integrated circuit dies, the plurality of first interconnects disposed outside of the interposer. The interposer is mounted to a first side of a substrate by attaching the first interconnects to the substrate, the substrate in signal communication with one or more of the first integrated circuit dies through the first interconnects.
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公开(公告)号:US20170194281A1
公开(公告)日:2017-07-06
申请号:US14997774
申请日:2016-01-18
申请人: Invensas Corporation
IPC分类号: H01L23/00 , H01L23/498 , H01L25/065 , H01L23/31 , H01L25/16
CPC分类号: H01L24/49 , H01L23/3121 , H01L23/49838 , H01L23/552 , H01L24/17 , H01L24/48 , H01L24/97 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L25/105 , H01L25/16 , H01L25/50 , H01L2224/04042 , H01L2224/11334 , H01L2224/16145 , H01L2224/16227 , H01L2224/17051 , H01L2224/32145 , H01L2224/32225 , H01L2224/48108 , H01L2224/48137 , H01L2224/48145 , H01L2224/48227 , H01L2224/49109 , H01L2224/73204 , H01L2224/73253 , H01L2224/73257 , H01L2224/73265 , H01L2225/06506 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06562 , H01L2225/1023 , H01L2924/00014 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/19105 , H01L2924/19107 , H01L2924/3025 , H05K1/0284 , H01L2224/45099 , H01L2924/00012 , H01L2924/00
摘要: In a vertically integrated microelectronic package, a first microelectronic device is coupled to an upper surface of a circuit platform in a wire bond-only surface area thereof. Wire bond wires are coupled to and extends away from an upper surface of the first microelectronic device. A second microelectronic device in a face-down orientation is coupled to upper ends of the wire bond wires in a surface mount-only area. The second microelectronic device is located above and at least partially overlaps the first microelectronic device. A protective layer is disposed over the circuit platform and the first microelectronic device. An upper surface of the protective layer has the surface mount-only area. The upper surface of the protective layer has the second microelectronic device disposed thereon in the face-down orientation in the surface mount-only area for coupling to the upper ends of the first wire bond wires.
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公开(公告)号:US20160293548A1
公开(公告)日:2016-10-06
申请号:US14674321
申请日:2015-03-31
申请人: Xilinx, Inc.
发明人: James Karp , Vassili Kireev
IPC分类号: H01L23/538 , H01L27/02
CPC分类号: H01L23/5382 , H01L23/3121 , H01L23/5386 , H01L25/00 , H01L25/0655 , H01L25/18 , H01L27/0207 , H01L2224/0401 , H01L2224/131 , H01L2224/16227 , H01L2224/81191 , H01L2224/81815 , H01L2924/1431 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/19107 , H03K19/1732 , H01L2924/014 , H01L2924/00014
摘要: Various example implementations are directed to circuits and methods for inter-die communication on a multi-die integrated circuit (IC) package. According to an example implementation, an IC package includes a first semiconductor die having a plurality of communication circuits for communicating data over respective data terminals of the package. The package also includes a second semiconductor die having N contacts for communicating data to and from the semiconductor die. The second semiconductor die includes a logic circuit configured to communicate M parallel data signals with one or more other semiconductor dies of the package, wherein M>N. The second semiconductor die also includes a plurality of serializer circuits, each configured to serialize data from a respective subset of the plurality of the M signal lines to produce serialized data and provide the serialized data to a respective one of the contacts.
摘要翻译: 各种示例性实现涉及用于多芯片集成电路(IC)封装上的管芯间通信的电路和方法。 根据示例实现,IC封装包括具有用于在封装的各个数据端子上传送数据的多个通信电路的第一半导体管芯。 封装还包括具有N个触点的第二半导体管芯,用于将数据传送到半导体管芯和从半导体管芯传送数据。 第二半导体管芯包括被配置为将M个并行数据信号与封装的一个或多个其它半导体管芯通信的逻辑电路,其中M> N。 第二半导体裸片还包括多个串行化器电路,每个串行器电路被配置为串行化来自多个M个信号线的相应子集的数据,以产生串行数据并将序列化数据提供给相应的一个触点。
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公开(公告)号:US09391045B2
公开(公告)日:2016-07-12
申请号:US14715170
申请日:2015-05-18
发明人: Albert Wu , Roawen Chen , Chung Chyung (Justin) Han , Shiann-Ming Liou , Chien-Chuan Wei , Runzi Chang , Scott Wu , Chuan-Cheng Cheng
IPC分类号: H01L21/00 , H01L25/04 , H01L21/48 , H01L23/13 , H01L23/14 , H01L23/498 , H01L25/065 , H01L25/10 , H01L25/00 , H01L23/367 , H01L23/00
CPC分类号: H01L25/04 , H01L21/486 , H01L21/565 , H01L21/76877 , H01L21/76898 , H01L23/13 , H01L23/147 , H01L23/3677 , H01L23/49827 , H01L23/49833 , H01L23/49838 , H01L24/09 , H01L24/16 , H01L24/17 , H01L24/33 , H01L24/48 , H01L24/73 , H01L24/81 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2224/02372 , H01L2224/0401 , H01L2224/05624 , H01L2224/05647 , H01L2224/13024 , H01L2224/14181 , H01L2224/16225 , H01L2224/16235 , H01L2224/16238 , H01L2224/32225 , H01L2224/48227 , H01L2224/73265 , H01L2224/81193 , H01L2224/83904 , H01L2225/06517 , H01L2225/06527 , H01L2225/06541 , H01L2225/1023 , H01L2225/1058 , H01L2924/00014 , H01L2924/01078 , H01L2924/01079 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1515 , H01L2924/15153 , H01L2924/15156 , H01L2924/15159 , H01L2924/15311 , H01L2924/1532 , H01L2924/15331 , H01L2924/181 , H01L2924/19042 , H01L2924/19043 , H01L2924/19105 , H01L2924/00012 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: Embodiments of the present disclosure provide a method, comprising providing a semiconductor substrate having (i) a first surface and (ii) a second surface that is disposed opposite to the first surface, forming one or more vias in the first surface of the semiconductor substrate, the one or more vias initially passing through only a portion of the semiconductor substrate without reaching the second surface, forming a dielectric film on the first surface of the semiconductor substrate, forming a redistribution layer on the dielectric film, the redistribution layer being electrically coupled to the one or more vias, coupling one or more dies to the redistribution layer, forming a molding compound to encapsulate at least a portion of the one or more dies, and recessing the second surface of the semiconductor substrate to expose the one or more vias. Other embodiments may be described and/or claimed.
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