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11.发明申请IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD 审中-公开IMPRINT APPARATUS，IMPRINT METHOD，AND ARTICLE MANUFACTURING METHOD公开(公告)号：US20160223918A1
公开(公告)日：2016-08-04
申请号：US14917464
申请日：2014-10-16
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Keiji Emoto
CPC classification number: G03F9/703 , G03F7/0002 , G03F9/7042
Abstract: An imprint apparatus includes: a stage configured to hold the substrate; a detector configured to detect a relative position between a shot region and the mold in a direction parallel to a surface of the substrate; and a controller configured to obtain, in an imprint process on a shot region different from a target shot region, information relating to a relative position, between the other shot region and the mold, used for aligning the other shot region after bringing the mold and the imprint material into contact with each other, and, when performing the imprint process on the target shot region, adjust a relative position between the target shot region and the mold in the direction by using a detection result on the target shot region and the obtained information.
Abstract translation: 压印装置包括：被配置为保持基板的台; 检测器，被配置为在平行于所述基板的表面的方向上检测所述射出区域和所述模具之间的相对位置; 以及控制器，被配置为在与目标拍摄区域不同的拍摄区域上的压印处理中获得与在将模具对准之后的另一拍摄区域与模具之间的相对位置相关的信息，以及 压印材料彼此接触，并且当对目标射击区域进行压印处理时，通过使用目标射击区域上的检测结果来调整目标射击区域和模具之间的相对位置，并且获得 信息。
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公开(公告)号：US20220390856A1
公开(公告)日：2022-12-08
申请号：US17820040
申请日：2022-08-16
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Kota Nakano
Abstract: A feedback control device that takes information regarding a control deviation between a measured value and a desired value of a controlled object as input, and outputs a manipulated variable for the controlled object, includes: a first control unit that takes information regarding the control deviation as input, and outputs a manipulated variable for the controlled object; a second control unit that takes information regarding the control deviation as input, and that includes a learning control unit in which a parameter for outputting a manipulated variable for the controlled object is determined by machine learning; and an adder that adds a first manipulated variable output from the first control unit and a second manipulated variable output from the second control unit. A manipulated variable from the adder is output to the controlled object, and the second control unit includes a limiter that limits the second manipulated variable.
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公开(公告)号：US10011056B2
公开(公告)日：2018-07-03
申请号：US14796009
申请日：2015-07-10
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tetsuji Okada , Noriyasu Hasegawa , Tosiya Asano
CPC classification number: B29C43/58 , B29C43/021 , B29C2043/025 , B29C2043/5833 , G03F7/0002 , G03F9/7042
Abstract: The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.
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公开(公告)号：US20170269484A1
公开(公告)日：2017-09-21
申请号：US15456684
申请日：2017-03-13
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano
IPC: G03F9/00 , G03F7/00 , H01L21/304 , H01L21/67 , H01L21/68
CPC classification number: G03F9/7042 , G03F7/0002 , H01L21/304 , H01L21/67092 , H01L21/67259 , H01L21/68
Abstract: An imprint apparatus forms a pattern on an imprint region of a substrate by bringing a mold into contact with an imprint material on the imprint region and curing the imprint material. The apparatus includes a controller for controlling an alignment operation of adjusting relative position between the mold and the imprint region in a state that the mold is in contact with the imprint material. The alignment operation includes a translation operation of performing relative translation between the imprint region and the mold, and a rotation operation of performing relative rotation between the imprint region and the mold. The rotation operation includes a first operation and a second operation, and a relative rotation direction between the imprint region and the mold in the second operation is opposite to a relative rotation direction between the imprint region and the mold in the first operation.
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15.发明申请公开(公告)号：US20170008219A1
公开(公告)日：2017-01-12
申请号：US15203619
申请日：2016-07-06
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano
IPC: B29C59/02
CPC classification number: G03F7/0002
Abstract: An imprinting apparatus that forms a pattern on an imprint material by bringing the imprint material on a substrate and a mold into contact with each other includes a detecting unit that detects a force generated in at least one of the substrate and the mold when performing alignment of the substrate and the mold with each other in a state where the imprint material on the substrate and the mold are in contact with each other, the force being in a direction along contact surfaces of the mold and the imprint material and a control unit that obtains an amount of change in the force detected by the detecting unit and controls the alignment based on the amount of change.
Abstract translation: 一种压印装置，其通过使压印材料在基板和模具上彼此接触而在压印材料上形成图案，所述压印装置包括检测单元，该检测单元在进行对准时检测至少一个基板和模具中产生的力 基板和模具彼此处于基板和模具上的压印材料彼此接触的状态，该力沿着模具和压印材料的接触表面的方向，以及控制单元，其获得 由检测单元检测到的力的变化量，并且基于变化量控制对准。
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Patent Agency Ranking
公开(公告)号：US09394966B2
公开(公告)日：2016-07-19
申请号：US13777016
申请日：2013-02-26
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano
IPC: F16F15/04 , F16F15/00 , F16F15/027
CPC classification number: F16F15/04 , F16F15/002 , F16F15/027
Abstract: The present invention provides a vibration suppression apparatus which includes a first object elastically supported on a base, a second object elastically supported on the first object, and a driving unit configured to drive the first object, and which suppresses a vibration of the second object, comprising a first generation unit configured to generate a first signal, a second generation unit configured to generate a second signal, and a control unit configured to control the driving unit, wherein the control unit controls the driving unit based on the first signal, and after the deviation between the relative distance between the base and the first object, and the first reference distance falls within an allowable range, the control unit controls the driving unit based on the first signal and the second signal.
Abstract translation: 本发明提供一种振动抑制装置，其包括弹性地支撑在基座上的第一物体，弹性地支撑在第一物体上的第二物体和驱动第一物体的驱动单元，并且抑制第二物体的振动， 包括被配置为产生第一信号的第一生成单元，被配置为产生第二信号的第二生成单元和被配置为控制所述驱动单元的控制单元，其中，所述控制单元基于所述第一信号来控制所述驱动单元， 所述基座与所述第一物体之间的相对距离与所述第一参考距离之间的偏差落在容许范围内，所述控制单元基于所述第一信号和所述第二信号来控制所述驱动单元。
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公开(公告)号：US11809089B2
公开(公告)日：2023-11-07
申请号：US17820040
申请日：2022-08-16
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Kota Nakano
CPC classification number: G03F7/70516 , G05B13/021 , G05B13/0265
Abstract: A feedback control device that takes information regarding a control deviation between a measured value and a desired value of a controlled object as input, and outputs a manipulated variable for the controlled object, includes: a first control unit that takes information regarding the control deviation as input, and outputs a manipulated variable for the controlled object; a second control unit that takes information regarding the control deviation as input, and that includes a learning control unit in which a parameter for outputting a manipulated variable for the controlled object is determined by machine learning; and an adder that adds a first manipulated variable output from the first control unit and a second manipulated variable output from the second control unit. A manipulated variable from the adder is output to the controlled object, and the second control unit includes a limiter that limits the second manipulated variable.
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公开(公告)号：US11651118B2
公开(公告)日：2023-05-16
申请号：US16896587
申请日：2020-06-09
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Junichi Seki , Yuichiro Oguchi
CPC classification number: G06F30/20 , B29C59/026 , G03F7/0002
Abstract: There is provided a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on one of a first member and a second member into contact with an other of the first member and the second member and forming a film of the curable composition on the first member. The method includes generating a link by connecting two adjacent representative points of the plurality of droplets, generating a cell as a closed region formed by a plurality of links, and determining, based on the presence/absence of merging of droplets corresponding to each link forming the cell, whether a bubble is formed in the cell.
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公开(公告)号：US11460781B2
公开(公告)日：2022-10-04
申请号：US16839562
申请日：2020-04-03
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Kota Nakano
Abstract: A feedback control device that takes information regarding a control deviation between a measured value and a desired value of a controlled object as input, and outputs a manipulated variable for the controlled object, includes: a first control unit that takes information regarding the control deviation as input, and outputs a manipulated variable for the controlled object; a second control unit that takes information regarding the control deviation as input, and that includes a learning control unit in which a parameter for outputting a manipulated variable for the controlled object is determined by machine learning; and an adder that adds a first manipulated variable output from the first control unit and a second manipulated variable output from the second control unit. A manipulated variable from the adder is output to the controlled object, and the second control unit includes a limiter that limits the second manipulated variable.
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公开(公告)号：US20200233316A1
公开(公告)日：2020-07-23
申请号：US16839562
申请日：2020-04-03
Applicant: CANON KABUSHIKI KAISHA
Inventor： Tosiya Asano , Kota Nakano
Abstract: A feedback control device that takes information regarding a control deviation between a measured value and a desired value of a controlled object as input, and outputs a manipulated variable for the controlled object, includes: a first control unit that takes information regarding the control deviation as input, and outputs a manipulated variable for the controlled object; a second control unit that takes information regarding the control deviation as input, and that includes a learning control unit in which a parameter for outputting a manipulated variable for the controlled object is determined by machine learning; and an adder that adds a first manipulated variable output from the first control unit and a second manipulated variable output from the second control unit. A manipulated variable from the adder is output to the controlled object, and the second control unit includes a limiter that limits the second manipulated variable.
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