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公开(公告)号：US12126347B2
公开(公告)日：2024-10-22
申请号：US18018952
申请日：2021-08-03
Applicant: COMET AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner , Anton Labanc
Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (Φi), and amplitude (Ai), including
a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (Φref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (ΦPLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and
a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal;
wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (APLL(t), Ai(t)) as a function of the received respective waveform tuning signal (FTWPLL, FTWi),
wherein one predetermined amplitude signal (APLL(t)) of the generated plurality of amplitude signals (APLL(t), Ai(t)) represents the feedback signal input to the signal comparator, and the other amplitude signals (Ai(t)) represent the respective radio frequency (RF) output signals (RFout,i) to be generated, and
wherein the data processing unit is configured to adjust both the waveform tuning signal (FTWPLL) corresponding to the one predetermined amplitude signal (APLL(t)) representing the feedback signal such as to minimize the error signal, and the other waveform tuning signals (FTWi) corresponding to the other amplitude signals (Ai(t)) representing the radio frequency (RF) output signals (RFout,i) based on the adjusted waveform tuning signal (FTWPLL) of the predetermined amplitude signal (APLL(t)) representing the feedback signal.
The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i).-
公开(公告)号：US20240321553A1
公开(公告)日：2024-09-26
申请号：US18269697
申请日：2020-12-30
Applicant: COMET AG
Inventor： André Grede , Daniel Gruner , Anton Labanc , Roland Schlierf , Nikolai Schwerg , Manuel vor dem Brocke
IPC: H01J37/32
CPC classification number: H01J37/32183 , H01J37/32926
Abstract: A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.
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13.发明公开公开(公告)号：US20230283282A1
公开(公告)日：2023-09-07
申请号：US18018952
申请日：2021-08-03
Applicant: COMET AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner , Anton Labanc
Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (Φi), and amplitude (Ai), including
a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (Φref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (ΦPLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and
a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal;
wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (APLL(t), Ai(t)) as a function of the received respective waveform tuning signal (FTWPLL, FTWi),
wherein one predetermined amplitude signal (APLL(t)) of the generated plurality of amplitude signals (APLL(t), Ai(t)) represents the feedback signal input to the signal comparator, and the other amplitude signals (Ai(t)) represent the respective radio frequency (RF) output signals (RFout,i) to be generated, and
wherein the data processing unit is configured to adjust both the waveform tuning signal (FTWPLL) corresponding to the one predetermined amplitude signal (APLL(t)) representing the feedback signal such as to minimize the error signal, and the other waveform tuning signals (FTWi) corresponding to the other amplitude signals (Ai(t)) representing the radio frequency (RF) output signals (RFout,i) based on the adjusted waveform tuning signal (FTWPLL) of the predetermined amplitude signal (APLL(t)) representing the feedback signal.
The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i).-
公开(公告)号：US11382206B2
公开(公告)日：2022-07-05
申请号：US17269461
申请日：2018-08-20
Applicant: Comet AG
Inventor： André Grede , Daniel Gruner , Anton Labanc
Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.
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公开(公告)号：US11770892B2
公开(公告)日：2023-09-26
申请号：US17176414
申请日：2021-02-16
Applicant: COMET AG
Inventor： Anton Labanc , Daniel Gruner
CPC classification number: H05H1/46 , H03F3/19 , H05H2242/20
Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.
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Patent Agency Ranking
公开(公告)号：US20230298871A1
公开(公告)日：2023-09-21
申请号：US18202555
申请日：2023-05-26
Applicant: COMET AG
Inventor： Anton Labanc , Daniel Gruner , André Grede
IPC: H01J37/32
CPC classification number: H01J37/32944 , H01J37/3299 , H01J37/32091 , H01J37/32174 , H01L21/67069
Abstract: Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
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公开(公告)号：US11705314B2
公开(公告)日：2023-07-18
申请号：US17015139
申请日：2020-09-09
Applicant: COMET AG
Inventor： Anton Labanc , Daniel Gruner , André Grede
CPC classification number: H01J37/32944 , H01J37/32091 , H01J37/3299 , H01J37/32174 , H01J37/32183 , H01L21/67069
Abstract: Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
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公开(公告)号：US20220216838A1
公开(公告)日：2022-07-07
申请号：US17611224
申请日：2020-05-22
Applicant: COMET AG
Inventor： Daniel Gruner , André Grede , Nikolai Schwerg , Anton Labanc , Manuel vor dem Brocke , Roland Schlierf
Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
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公开(公告)号：US11146224B2
公开(公告)日：2021-10-12
申请号：US16686309
申请日：2019-11-18
Applicant: COMET AG
Inventor： Daniel Gruner , Anton Labanc , Cyril Guinnard
Abstract: A generator including a power combiner is provided. The power combiner includes a plurality of inputs, each input connectable to a respective power amplifier for receiving a respective power signal. A plurality of impedance matching circuit branches is connected to a respective one of the plurality of inputs. Each impedance matching circuit branch includes at least one high pass filter section and at least one low pass filter section through which the respective power signal passes. The impedance matching circuit branches are connected so as to combine the power signals from each power amplifier. An output is provided for outputting the combined power signal.
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公开(公告)号：US20200169230A1
公开(公告)日：2020-05-28
申请号：US16686309
申请日：2019-11-18
Applicant: COMET AG
Inventor： Daniel Gruner , Anton Labanc , Cyril Guinnard
Abstract: A generator including a power combiner is provided. The power combiner includes a plurality of inputs, each input connectable to a respective power amplifier for receiving a respective power signal. A plurality of impedance matching circuit branches is connected to a respective one of the plurality of inputs. Each impedance matching circuit branch includes at least one high pass filter section and at least one low pass filter section through which the respective power signal passes. The impedance matching circuit branches are connected so as to combine the power signals from each power amplifier. An output is provided for outputting the combined power signal.
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