Metal line, method of forming the same, and a display using the same
    12.
    发明授权
    Metal line, method of forming the same, and a display using the same 失效
    金属线,其形成方法和使用其的显示器

    公开(公告)号:US08174660B2

    公开(公告)日:2012-05-08

    申请号:US12332249

    申请日:2008-12-10

    IPC分类号: G02F1/1343

    摘要: Provided are a metal line, a method of forming the same, and a display using the same. To increase resistance of a metal line having a multilayered structure of CuO/Cu and prevent blister formation, a plasma treatment is performed using a nitrogen-containing gas and a silicon-containing gas or using a hydrogen or argon as and the silicon-containing gas. Accordingly, a plasma treatment layer such as a SiNx or Si layer is thinly formed on the copper layer, thereby preventing an increase in resistance of the copper layer and also preventing blister formation caused by the damage of a copper oxide layer. Consequently, it is possible to improve the reliability of a copper line and thus enhance the reliability of a device.

    摘要翻译: 提供一种金属线,其形成方法和使用该线的显示器。 为了增加具有CuO / Cu多层结构的金属线的电阻并防止起泡形成,使用含氮气体和含硅气体或使用氢或氩作为含硅气体进行等离子体处理 。 因此,在铜层上薄膜地形成诸如SiN x或Si层的等离子体处理层,从而防止铜层的电阻增加,并且还防止由氧化铜层损坏引起的起泡形成。 因此,可以提高铜线的可靠性,从而提高装置的可靠性。

    PLASMA PROCESSING APPARATUS
    13.
    发明申请
    PLASMA PROCESSING APPARATUS 审中-公开
    等离子体加工设备

    公开(公告)号:US20080202689A1

    公开(公告)日:2008-08-28

    申请号:US12113901

    申请日:2008-05-01

    申请人: Sung Ryul Kim

    发明人: Sung Ryul Kim

    IPC分类号: H01L21/306 C23C16/44

    摘要: A plasma processing apparatus includes: a chamber; an insulating member disposed in an upper portion of the chamber; a ground electrode formed at a side wall of the chamber, a ground potential being applied to the ground electrode; and a lower electrode disposed in a lower portion of the chamber, a substrate being placed on the lower electrode, wherein the lower electrode is divided into a plurality of electrodes.According to an aspect of the present invention, particles accumulated in the central portion on a lower surface, an edge area of an upper surface, a side, and an edge area of the lower surface of the substrate can be effectively removed.

    摘要翻译: 一种等离子体处理装置,包括:室; 设置在所述室的上部的绝缘构件; 形成在所述室的侧壁处的接地电极,将地电位施加到所述接地电极; 以及设置在所述室的下部的下部电极,在所述下部电极上配置有基板,其中,所述下部电极被分割为多个电极。 根据本发明的一个方面,可以有效地除去积聚在基板的下表面的中心部分,上表面的边缘区域,侧面和边缘区域中的颗粒。

    Flash memory device and method for manufacturing the same
    14.
    发明授权
    Flash memory device and method for manufacturing the same 失效
    闪存装置及其制造方法

    公开(公告)号:US5986303A

    公开(公告)日:1999-11-16

    申请号:US911351

    申请日:1997-08-07

    摘要: A flash memory device has improved erasable characteristics and device reliability. The flash memory device includes a semiconductor substrate and heavily doped impurity regions formed spaced apart from one another by a predetermined distance in the semiconductor substrate in a first direction. First and second isolation regions are formed spaced apart from each other by a second predetermined distance on the semiconductor substrate, in a second direction which is preferably at a right angle to the first direction. Each of the floating gates are formed between the first and second isolation regons and between the heavily doped impurity regions. The control gate lines are formed between the first and second isolation regions, and over the floating gates in the same direction as the first and second isolation regions. An erase gate line is formed to have a narrower width than the floating gate, and is formed over the floating gate, preferably at a right angle to the control gate line.

    摘要翻译: 闪存器件具有改进的可擦除特性和器件可靠性。 闪速存储器件包括在第一方向上在半导体衬底中彼此间隔开预定距离形成的半导体衬底和重掺杂杂质区。 第一隔离区域和第二隔离区域在第二方向上在半导体衬底上彼此间隔开第二预定距离,优选地与第一方向成直角。 每个浮置栅极形成在第一和第二隔离晶体之间以及重掺杂杂质区之间。 控制栅极线形成在第一和第二隔离区域之间,并且在与第一和第二隔离区域相同的方向上在浮动栅极上形成。 擦除栅极线形成为具有比浮动栅极窄的宽度,并且形成在浮动栅极上,优选地与控制栅极线成直角。

    Optical sensor
    15.
    发明授权
    Optical sensor 有权
    光学传感器

    公开(公告)号:US08598587B2

    公开(公告)日:2013-12-03

    申请号:US13209188

    申请日:2011-08-12

    IPC分类号: H01L31/0376

    摘要: An optical sensor preventing damage to a semiconductor layer, and preventing a disconnection and a short circuit of a source electrode and a drain electrode, and a manufacturing method of the optical sensor is provided. The optical sensor includes: a substrate; an infrared ray sensing thin film transistor including a first semiconductor layer disposed on the substrate; a visible ray sensing thin film transistor including a second semiconductor layer disposed on the substrate; a switching thin film transistor including a third semiconductor layer disposed on the substrate; and a semiconductor passivation layer enclosing an upper surface and a side surface of an end portion of at least one of the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer.

    摘要翻译: 提供了防止半导体层损坏并防止源电极和漏极的断开和短路的光学传感器以及光学传感器的制造方法。 光学传感器包括:基板; 包括设置在所述基板上的第一半导体层的红外线感测薄膜晶体管; 包括设置在所述基板上的第二半导体层的可见光线感测薄膜晶体管; 开关薄膜晶体管,其包括设置在所述基板上的第三半导体层; 以及半导体钝化层,其包围第一半导体层,第二半导体层和第三半导体层中的至少一个的端部的上表面和侧面。