MICROELECTROMECHANICAL SYSTEMS MICROPHONE WITH ELECTROSTATIC FORCE FEEDBACK TO MEASURE SOUND PRESSURE

    公开(公告)号:US20180152798A1

    公开(公告)日:2018-05-31

    申请号:US15804765

    申请日:2017-11-06

    Inventor: Axel THOMSEN

    Abstract: A MEMS may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate, and a diaphragm configured to mechanically displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The diaphragm may comprise third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes mechanically displace relative to the backplate as the function of the sound pressure. The first and third electrodes may form a first capacitor, the second and fourth electrodes may form a second capacitor, and the first capacitor may be configured to sense a displacement of the diaphragm responsive to which the second capacitor may be configured to apply an electrostatic force to the diaphragm to return the diaphragm to an original position.

    BIASING OF ELECTROMECHANICAL SYSTEMS TRANSDUCER WITH ALTERNATING-CURRENT VOLTAGE WAVEFORM

    公开(公告)号:US20180152794A1

    公开(公告)日:2018-05-31

    申请号:US15872019

    申请日:2018-01-16

    Inventor: Axel THOMSEN

    Abstract: A MEMS microphone may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate and a diaphragm configured to displace relative to the backplate as a function of sound pressure incident upon the diaphragm, the diaphragm comprising third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The first and third electrodes may form a first capacitor and the second and fourth electrodes may form a second capacitor, the capacitance of each which may be a function of the displacement of the diaphragm, and each of which may be biased by an alternating-current voltage waveform.

    DRIVER CIRCUITRY
    17.
    发明申请

    公开(公告)号:US20220286046A1

    公开(公告)日:2022-09-08

    申请号:US17538169

    申请日:2021-11-30

    Abstract: Driver circuitry for driving a load based on an input signal, comprising: at least one variable boost stage comprising: first and second input nodes configured to receive a first voltage and a second voltage respectively; first and second flying capacitor nodes for connection to a flying capacitor therebetween; a network of switching paths for selectively connecting the first and second input nodes with the first and second flying capacitor nodes; an output stage for selectively connecting a driver output node to each of the first and second flying capacitor nodes; and a controller operable in a first boost mode to: control the output stage to selectively connect the driver output node to the first flying capacitor node; control the network of switching paths to switch connection of the second flying capacitor node between the first and second input nodes at a controlled duty cycle; and in a first charge top-up cycle, control the network of switching paths to connect the first input node to the first flying capacitor node during a phase of the controlled duty cycle in which the first input node is connected to the second flying capacitor node; wherein the frequency of the controlled duty cycle is a greater than the frequency of the charge top-up cycle.

    DRIVER CIRCUITRY AND OPERATION
    18.
    发明申请

    公开(公告)号:US20220271748A1

    公开(公告)日:2022-08-25

    申请号:US17740468

    申请日:2022-05-10

    Abstract: This application relates to methods and apparatus for driving a transducer with switching drivers where the switching driver has an output bridge stage for switching an output node between switching voltages and a modulator for controlling the duty cycle of the output bridge stage based on an input signal. The switching driver also includes a voltage controller for providing the switching voltages which is operable to provide different switching voltages in different driver modes. A controller is provided to control the driver mode of operation and the duty cycle of the switching driver based on the input signal, and the controller is configured to transition from a present driver mode to a new driver mode by controlling the voltage controller to provide the switching voltages for the new mode and controlling the modulator to vary the duty cycle of the output bridge stage. The change in duty cycle is controlled such that there is no substantial discontinuity in switching ripple due to the mode transition.

    SYSTEM-LEVEL CHOPPING IN COULOMB COUNTER CIRCUIT

    公开(公告)号:US20220263520A1

    公开(公告)日:2022-08-18

    申请号:US17232949

    申请日:2021-04-16

    Abstract: A signal processing system may include a sensor readout channel configured to convert an electronic signal into a digital quantity, the sensor readout channel comprising an analog-to-digital converter (ADC) having an input and an output, first outside chopping switches located at the input of the ADC, and second outside chopping switches located at the output of the ADC. The ADC may comprise a memory element, first inside chopping switches located at the input of the memory element, and second inside chopping switches located at the output of the memory element. The first outside chopping switches, the second outside chopping switches, the first inside chopping switches, and the second inside chopping switches may be switched at the same frequency such that the memory element is swapped periodically in synchronization with the first outside chopping switches and second outside chopping switches.

    ACTIVE BIAS OF MICROPHONE WITH VARIABLE BIAS RESISTANCE

    公开(公告)号:US20190306632A1

    公开(公告)日:2019-10-03

    申请号:US15940033

    申请日:2018-03-29

    Abstract: A bias circuit for a capacitive sensor may include a variable impedance element coupled to a capacitor of the capacitive sensor wherein an impedance of the variable impedance element is varied in accordance with a temperature associated with the bias circuit and an active feedback circuit coupled between the variable impedance element and an output of a processing circuit for processing a signal generated by the capacitive sensor and configured to drive the variable impedance element to force a direct-current (DC) voltage level of an output of the capacitive sensor to a desired voltage.

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