Method of forming a metal oxide semiconductor transistor with self-aligned channel implant
    11.
    发明授权
    Method of forming a metal oxide semiconductor transistor with self-aligned channel implant 有权
    用自对准沟道植入物形成金属氧化物半导体晶体管的方法

    公开(公告)号:US06620692B2

    公开(公告)日:2003-09-16

    申请号:US10133556

    申请日:2002-04-26

    IPC分类号: H01L21336

    摘要: A transistor (50) comprising a gate conductor (68) and a gate insulator (66) separating the gate conductor from a semiconductor material (64) having a first conductivity type. The transistor further comprises a drain region (782) having the first conductivity type. The transistor further comprises an angular implanted region (70) having a second conductivity type complementary of the first conductivity type and having an angular implanted region edge (70a) underlying the gate conductor, and the transistor includes a source region (781) formed at least in part within the angular implanted region. Finally, a transistor channel (74) is defined between an edge (71a) of the source region proximate the gate conductor and the angular implanted region edge (70a) underlying the gate conductor.

    摘要翻译: 一种晶体管(50),包括将栅极导体与具有第一导电类型的半导体材料(64)分开的栅极导体(68)和栅极绝缘体(66)。 晶体管还包括具有第一导电类型的漏区(782)。 晶体管还包括具有与第一导电类型互补的第二导电类型并且具有位于栅极导体下方的角度注入区域边缘(70a)的角度注入区域(70),并且晶体管包括至少形成的源极区域(781) 部分地在角度注入区域内。 最后,晶体管沟道(74)被限定在靠近栅极导体的源极区域的边缘(71a)和栅极导体下面的角度注入区域边缘(70a)之间。