公开(公告)号：US4631742A

公开(公告)日：1986-12-23

申请号：US704983

申请日：1985-02-25

Applicant: David W. Oliver

Inventor： David W. Oliver

IPC: H01J35/14 ,  H01J35/30 ,  H05G1/52

CPC classification number: H01J35/305 ,  H01J35/14

Abstract: Anode life in an x-ray tube is extended by applying a reduced power density to the anode to afford controlled heating of the anode to a predetermined ductile temperature prior to operating the tube at full power. Controlled heating of the anode is accomplished by defocusing the electron beam for a period of time sufficient to enable the anode to reach the desired temperature. The electron beam source of the tube may also be controlled during heating of the anode so as to supply a reduced beam current.

Abstract translation: 通过对阳极施加降低的功率密度来延长X射线管中的阳极寿命，以在以全功率操作管之前将阳极控制加热到预定的延性温度。 阳极的受控加热是通过将电子束散焦足以使阳极达到所需温度的一段时间来实现的。 也可以在阳极加热期间控制管的电子束源，以便提供减小的束电流。

公开(公告)号：US4237209A

公开(公告)日：1980-12-02

申请号：US37258

申请日：1979-05-09

Applicant: David W. Oliver

Inventor： David W. Oliver

IPC: G03F7/26 ,  H01J9/04 ,  H01J9/14 ,  H01J9/18 ,  G03C5/00 ,  B24B7/00

CPC classification number: G03F7/26 ,  H01J9/04 ,  H01J9/14 ,  H01J9/18

Abstract: A variety of technologies have been applied in the development of a bondedrid cathode. Erosion lithography is used for making the fine-detail grid structure, combining air erosion and lithographic techniques. To obtain openings of the order of 0.001 inch (one mil) or smaller, a nozzle with a high aspect ratio exit opening is used, and the cathode grid structure is scanned. A photo resist in which the grid pattern is developed is used over the molybdenum or tungsten grid film. The metal film is removed from the grid openings by chemical etching. The photo resist over the metal grid is used as a composite mask for removing the BN insulation in the openings by erosion with Al.sub.2 O.sub.3 powder from the special nozzle on the air blast gun.

Abstract translation: 多种技术已被应用于栅格阴极的开发中。 侵蚀光刻用于制作精细细网格结构，结合风蚀和光刻技术。 为了获得0.001英寸（1密耳）以下的开口，使用具有高纵横比的出口的喷嘴，并扫描阴极栅格结构。 在钼或钨网格膜上使用其中开发网格图案的光致抗蚀剂。 通过化学蚀刻从网格开口去除金属膜。 金属格栅上的光刻胶用作复合掩模，用于通过喷气枪上的特殊喷嘴用Al2O3粉末侵蚀而去除开口中的BN绝缘体。

公开(公告)号：US4223243A

公开(公告)日：1980-09-16

申请号：US37256

申请日：1979-05-09

Applicant: David W. Oliver ,  Norman T. Lavoo

Inventor： David W. Oliver ,  Norman T. Lavoo

IPC: H01J19/42 ,  H01J19/70 ,  H01J23/02 ,  H01J1/88

CPC classification number: H01J19/70 ,  H01J19/42 ,  H01J23/02

Abstract: The variety of technologies that have been applied in the development of aonded grid cathode are described. These include chemical vapor deposition of tungsten, molybdenum, iridium BN, and Si.sub.3 N.sub.4 on both sides of a sintered tungsten cathode disk. Zirconium and titanium getters have been used to eliminate nitrogen evolution problems. The getter plates are also used as heat shields for the bonded heater. Films of Si.sub.3 N.sub.4 have been added to the insulation to prevent calcium and barium diffusion into the layer and maintain adequate resistivity and breakdown strength. Plasma etching was introduced as a method of removing Si.sub.3 N.sub.4 from the cathode pores.A new method, erosion lithography, is used for making the fine-detail grid structure, combining air erosion and lithographic techniques.

Abstract translation: 描述了已经应用于开发粘合栅极阴极的各种技术。 这些包括在烧结钨阴极盘的两侧上的钨，钼，铱BN和Si 3 N 4的化学气相沉积。 已经使用锆和钛吸气剂来消除氮的进化问题。 吸气板也用作粘合加热器的隔热罩。 已经将Si3N4薄膜添加到绝缘层中，以防止钙和钡扩散到层中并保持足够的电阻率和击穿强度。 引入等离子体蚀刻作为从阴极孔除去Si 3 N 4的方法。 一种新的侵蚀光刻方法，用于制作精细细节的栅格结构，结合风蚀和光刻技术。