公开(公告)号：US20070042575A1

公开(公告)日：2007-02-22

申请号：US10549334

申请日：2004-03-12

申请人： Su-Gyeong Lee ,  Dong-Byum Kim ,  Myung-Koo Kang ,  Ui-Jin Chung ,  Hyun-Jae Kim

发明人： Su-Gyeong Lee ,  Dong-Byum Kim ,  Myung-Koo Kang ,  Ui-Jin Chung ,  Hyun-Jae Kim

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L21/02675 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0673 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/2026 ,  H01L21/268

摘要： A plurality laser beams generated by a plurality of beam generators are synthesized by a beam synthesizer. The synthesized beam is splitted into a plurality of beamlets and provided for a plurality of optical units controlling the beamlets. Each beamlet controlled by each optical unit is illuminated onto an amorphous silicon layer deposited on a substrate that is mounted on a plurality of stages to be polycrystallized.

摘要翻译： 由多个光束发生器产生的多个激光束由光束合成器合成。 合成的光束被分裂成多个子束并且被设置用于控制子束的多个光学单元。 由每个光学单元控制的每个子束被照射到沉积在基板上的非晶硅层上，所述非晶硅层安装在多个阶段上以进行多晶化。

公开(公告)号：US20060148165A1

公开(公告)日：2006-07-06

申请号：US10547070

申请日：2004-02-24

申请人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

发明人： Ui-Jin Chung ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang ,  Hyun-Jae Kim

IPC分类号： H01L21/8238

CPC分类号： B23K26/0676 ,  B23K26/06 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/066 ,  B23K26/067 ,  B23K26/0732 ,  B23K2101/40 ,  H01L21/02532 ,  H01L21/0268 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A silicon crystallization system includes a beam generator generating a laser beam, first and second optical units for controlling the laser beam from the beam generator; and a stage for mounting a panel including an amorphous silicon layer to be polycrystallized by the laser beam from the optical units. The first optical unit makes the laser beam have a transverse edge and a longitudinal edge longer than the transverse edge, and the second optical unit makes the laser beam have a transverse edge and a longitudinal edge shorter than the transverse edge.

摘要翻译： 硅结晶系统包括产生激光束的光束发生器，用于控制来自光束发生器的激光束的第一和第二光学单元; 以及用于安装包括由来自光学单元的激光束多晶化的非晶硅层的面板的台。 第一光学单元使得激光束具有比横向边缘长的横向边缘和纵向边缘，并且第二光学单元使得激光束具有比横向边缘更短的横向边缘和纵向边缘。

公开(公告)号：US06906349B2

公开(公告)日：2005-06-14

申请号：US10752510

申请日：2004-01-08

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： H01L51/50 ,  G09F9/30 ,  H01L21/00 ,  H01L21/20 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/01 ,  H01L27/08 ,  H01L27/12 ,  H01L27/32 ,  H01L29/04 ,  H01L29/786 ,  H01L29/788 ,  H01L31/036 ,  H01L31/0392 ,  H01L31/20 ,  H05B33/14

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

公开(公告)号：US20090275178A1

公开(公告)日：2009-11-05

申请号：US12490236

申请日：2009-06-23

申请人： Se-Jin CHUNG ,  Chi-Woo Kim ,  Ui-Jin Chung ,  Dong-Byum Kim

发明人： Se-Jin CHUNG ,  Chi-Woo Kim ,  Ui-Jin Chung ,  Dong-Byum Kim

IPC分类号： H01L21/336 ,  H01L21/268

CPC分类号： H01L21/02686 ,  H01L21/02532 ,  H01L21/02691 ,  H01L21/2026 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/66757 ,  H01L29/78606 ,  H01L29/78675

摘要： In a method of manufacturing a polysilicon thin film and a method of manufacturing a TFT having the thin film, a laser beam is irradiated on a portion of an amorphous silicon thin film to liquefy the portion of the amorphous silicon thin film. The amorphous silicon thin film is on a first end portion of a substrate. The liquefied silicon is crystallized to form silicon grains. The laser beam is shifted from the first end portion towards a second end portion of the substrate opposite the first end portion by an interval in a first direction. The laser beam is then irradiated onto a portion of the amorphous silicon thin film adjacent to the silicon grains to form a first polysilicon thin film. Therefore, electrical characteristics of the amorphous silicon thin film may be improved.

摘要翻译： 在制造多晶硅薄膜的方法和制造具有薄膜的TFT的方法中，激光束被照射在非晶硅薄膜的一部分上以使非晶硅薄膜的部分液化。 非晶硅薄膜位于基板的第一端部上。 液化硅结晶形成硅晶粒。 激光束从第一端部朝向与第一端部相反的第二端部朝向第一方向的间隔移动。 然后将激光束照射到与硅晶粒相邻的非晶硅薄膜的一部分上以形成第一多晶硅薄膜。 因此，可以提高非晶硅薄膜的电特性。

公开(公告)号：US07532262B2

公开(公告)日：2009-05-12

申请号：US11260445

申请日：2005-10-27

申请人： Dong-Byum Kim

发明人： Dong-Byum Kim

IPC分类号： G02F1/133

CPC分类号： H01L21/02678 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0665 ,  B23K26/12 ,  H01L21/2026

摘要： A system for manufacturing a flat panel display is provided including a display panel moving unit, and a laser unit for generating a laser beam, wherein the laser unit comprises a mask for selectively passing the laser beam, a reducing lens for reducing the laser beam having passed the mask, and a blocking part for substantially preventing an external air current from flowing into a space between the mask and the reducing lens where a focus of the laser beam is formed.

摘要翻译： 提供了一种用于制造平板显示器的系统，包括显示面板移动单元和用于产生激光束的激光单元，其中激光单元包括用于选择性地通过激光束的掩模，用于减少具有 通过掩模和用于基本上防止外部气流流入形成激光束的焦点的掩模和还原透镜之间的空间中的阻挡部分。

公开(公告)号：US07294857B2

公开(公告)日：2007-11-13

申请号：US11048726

申请日：2005-02-03

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： H01L29/04

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，其包括：在绝缘衬底上沉积非晶硅层; 通过使用掩模的多个激光照射将非晶硅层转化为多晶硅层; 在所述多晶硅层上形成栅极绝缘层; 在所述栅极绝缘层上形成多个栅极线; 在所述栅极线上形成第一层间绝缘层; 在所述第一层间绝缘层上形成多条数据线; 在数据线上形成第二层间绝缘层; 以及在所述第二层间绝缘层上形成多个像素电极，其中所述掩模包括以混合方式布置的多个透射区域和多个阻挡区域。

公开(公告)号：US20070076162A1

公开(公告)日：2007-04-05

申请号：US11260445

申请日：2005-10-27

申请人： Dong-Byum Kim

发明人： Dong-Byum Kim

IPC分类号： G02F1/13

CPC分类号： H01L21/02678 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0665 ,  B23K26/12 ,  H01L21/2026

摘要： A system for manufacturing a flat panel display is provided including a display panel moving unit, and a laser unit for generating a laser beam, wherein the laser unit comprises a mask for selectively passing the laser beam, a reducing lens for reducing the laser beam having passed the mask, and a blocking part for substantially preventing an external air current from flowing into a space between the mask and the reducing lens where a focus of the laser beam is formed.

摘要翻译： 提供了一种用于制造平板显示器的系统，包括显示面板移动单元和用于产生激光束的激光单元，其中激光单元包括用于选择性地通过激光束的掩模，用于减少具有 通过掩模和用于基本上防止外部气流流入形成激光束的焦点的掩模和还原透镜之间的空间中的阻挡部分。

公开(公告)号：US20050151196A1

公开(公告)日：2005-07-14

申请号：US11048726

申请日：2005-02-03

申请人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

发明人： Hyun-Jae Kim ,  Sook-Young Kang ,  Dong-Byum Kim ,  Su-Gyeong Lee ,  Myung-Koo Kang

IPC分类号： H01L51/50 ,  G09F9/30 ,  H01L21/00 ,  H01L21/20 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/01 ,  H01L27/08 ,  H01L27/12 ,  H01L27/32 ,  H01L29/04 ,  H01L29/786 ,  H01L29/788 ,  H01L31/036 ,  H01L31/0392 ,  H01L31/20 ,  H05B33/14

CPC分类号： H01L21/02678 ,  C30B13/24 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L27/1229 ,  H01L27/1285 ,  H01L27/1296 ,  Y10T428/24273

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; forming a gate insulating layer on the polysilicon layer; forming a plurality of gate lines on the gate insulating layer; forming a first interlayer insulating layer on the gate lines; forming a plurality of data lines on the first interlayer insulating layer; forming a second interlayer insulating layer on the data lines; and forming a plurality of pixel electrodes on the second interlayer insulating layer, wherein the mask comprises a plurality of transmitting areas and a plurality of blocking areas arranged in a mixed manner.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，其包括：在绝缘衬底上沉积非晶硅层; 通过使用掩模的多个激光照射将非晶硅层转化为多晶硅层; 在所述多晶硅层上形成栅极绝缘层; 在所述栅极绝缘层上形成多个栅极线; 在栅极线上形成第一层间绝缘层; 在所述第一层间绝缘层上形成多条数据线; 在数据线上形成第二层间绝缘层; 以及在所述第二层间绝缘层上形成多个像素电极，其中所述掩模包括以混合方式布置的多个透射区域和多个阻挡区域。