摘要:
In a method of manufacturing a semiconductor device, a mask pattern is formed on an active region of a substrate. An exposed portion of the substrate is removed to form a trench in the substrate. A preliminary first insulation layer is formed on a bottom and sidewalls of the trench and the mask pattern. A plasma treatment is performed on the preliminary first insulation layer using fluorine-containing plasma to form a first insulation layer including fluorine. A second insulation layer is formed on the first insulation layer to fill the trench. A thickness of a gate insulation layer adjacent to an upper edge of the trench may be selectively increased, and generation of leakage current may be reduced.
摘要:
In a method of manufacturing a semiconductor device, a conductive layer pattern may be formed on a substrate. An oxide layer may be formed on the substrate to cover the conductive layer pattern. A diffusion barrier layer may be formed by treating the oxide layer to increase an energy required for a diffusion of impurities. An impurity region may be formed on the substrate by implanting impurities into the conductive layer pattern and a portion of the substrate adjacent to the conductive layer pattern, through the diffusion barrier. The impurities in the conductive layer pattern and the impurity region may be prevented or reduced from diffusing, and therefore, the semiconductor device may have improved performance.
摘要:
Trench isolation methods include forming a first trench and a second trench in a semiconductor substrate. The second trench has a larger width than the first trench. A tower isolation layer is formed on the semiconductor substrate using a first high density plasma deposition process. The lower isolation layer has a first thickness on an upper sidewall of the first trench and a second thickness on an upper sidewall of the second trench. The second thickness is greater than the first thickness. An upper isolation layer is formed on the semiconductor substrate including the lower isolation layer using a second high density plasma deposition process, different from the first high density plasma deposition process. The second high density plasma deposition process includes an H2 treatment process.
摘要翻译:沟槽隔离方法包括在半导体衬底中形成第一沟槽和第二沟槽。 第二沟槽具有比第一沟槽更大的宽度。 使用第一高密度等离子体沉积工艺在半导体衬底上形成塔隔离层。 下隔离层在第一沟槽的上侧壁上具有第一厚度,在第二沟槽的上侧壁上具有第二厚度。 第二厚度大于第一厚度。 使用不同于第一高密度等离子体沉积工艺的第二高密度等离子体沉积工艺在包括下隔离层的半导体衬底上形成上隔离层。 第二高密度等离子体沉积工艺包括H 2 N 2处理工艺。
摘要:
The present invention relates to an apparatus and method for controlling power to a Universal Serial Bus (USB) device. The present invention provides an apparatus for controlling power to a USB device, the USB device being used to connect a Personal Computer (PC) with a peripheral device, the power control apparatus including a plug-in port for connecting the peripheral device with the PC, a state detector for detecting whether the peripheral device is in a preparation completion state, a power supply unit for supplying power to the USB device, and a power control unit for controlling the power supply unit so that power is supplied to the USB device if it is determined that the peripheral device is in a plugged-in state, and if it is determined that the peripheral device is in a preparation completion state by the state detector. Accordingly, the present invention performs the supply of power only when the peripheral device is plugged into the USB device and its internal application program is in a preparation completion state, so that it can prevent power from being unnecessarily consumed.
摘要:
A memory may include first and second buffer memories and a memory core. The memory core may include memory blocks each having a plurality of pages and a page buffer for reading data from a selected memory block. A control logic may control the first and second buffer memories and the memory core. The control logic may have a register for storing address and command information of the memory core. The control logic may control the memory core so that data read periods for pages of the selected memory block are carried out according to the stored address and command information. The control logic may control the first and second buffer memories and the memory core so that data in the page buffer may be transferred to the first and/or second buffer memories during the data read periods. The control logic may deactivate an interrupt signal when data in the page buffer is transferred to the first and/or second buffer memory and may activate the interrupt signal when data in the first and/or second buffer memory is transferred to an external storage.
摘要:
A display panel includes; a substrate, and a light blocking structure surrounding an ink filling region on the substrate, the light blocking structure including; a first layer pattern having an ink affinity characteristic disposed on the substrate, and a second layer pattern positioned on the first layer pattern and including an organic material having a light blocking characteristic.
摘要:
A multi-chip package device includes first and second memory chips configured to share addresses and control signals. The first and second memory chips each include main memory, buffer memory, an option terminal for receiving an option voltage, an access signal generation block, and a controller. The main memory of the first memory chip stores boot code. The buffer memory of the first memory chip includes boot memory. The option voltages of the first and second memory chips have different voltage levels. The access signal generation block generates a buffer access signal that undergoes a one-way transition in response to the boot code address. The one-way transition of the buffer access signal of the first memory chip is a transition to activation, and the one-way transition of the buffer access signal of the second memory chip is a transition to inactivation.
摘要:
Method of programming nonvolatile memory devices are provided in which data is programmed into a first plurality of memory cells of the nonvolatile memory device. At the same time associated programming confirmation information is programmed into at least one second memory cell of the nonvolatile memory device. Then, a determination is made as to whether the data was correctly programmed into the first plurality of memory cells based on an evaluation of (1) the threshold voltage distributions of at least some of the first plurality of memory cells and (2) the threshold voltage distribution of the at least one second memory cell. Methods of resuming a data programming operation after an interruption such as a loss of power are also provided.
摘要:
Disclosed is a method of performing a read operation in a NAND/RAM semiconductor memory device. The semiconductor memory device comprises a NAND flash memory device having a memory cell array and a page buffer, and a data RAM outputting data in response to a clock signal received from a host. The method comprising; sensing data stored in one page of the memory cell array in the page buffer, transferring the sensed data from the page buffer to the data RAM in multiple blocks via a corresponding number of transfer operations, and reading the transferred data from the data RAM in response to the host clock signal, wherein a read-out operation for the transferred data commences during any one of the plurality of transfer time periods.
摘要:
A piston structure of an engine generates an automatic flow of gas through a hole penetrating from a bowl of the piston toward a lateral side of the piston. The structure provides a reinforcement of the compression and swirling movement in the combustion chamber of an engine, improvement of the mixture function of the fuel and air, reduction of the blowby leaking into the crankcase through the clearance between the cylinder wall and the piston, and prevention of the wear and tear of the cylinder liner and piston by eliminating wet fuel formed on the cylinder wall.