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公开(公告)号：US09660496B2
公开(公告)日：2017-05-23
申请号：US14858873
申请日：2015-09-18
Applicant: EBARA CORPORATION
Inventor： Takashi Hozumi , Naoya Yoshida , Yoshinori Ojima , Takanori Inada , Toshiharu Nakazawa , Atsushi Oyama
CPC classification number: H02K5/128 , F04D17/08 , F04D25/06 , F04D29/60 , H02K3/18 , H02K3/487 , H02K2005/1287
Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.
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公开(公告)号：US09364786B2
公开(公告)日：2016-06-14
申请号：US14226741
申请日：2014-03-26
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Takashi Kyotani , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki
CPC classification number: B01D53/343 , C23C16/4412 , F04B37/06 , F04B37/14 , F23G7/065 , Y02C20/30
Abstract: A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.
Abstract translation: 真空泵具有联接到减排室的排出口，用于处理从制造装置的室排出的排气，使废气无害化。 真空泵联接到热交换器，该热交换器被配置为通过使废气在减排部分被处理成无害化时产生的热量来加热惰性气体。 由热交换器加热的惰性气体被引入真空泵。
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公开(公告)号：US11788777B2
公开(公告)日：2023-10-17
申请号：US17093002
申请日：2020-11-09
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
CPC classification number: F25B30/02 , F25B29/003 , F25B49/02
Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
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Patent Agency Ranking
公开(公告)号：US11703284B2
公开(公告)日：2023-07-18
申请号：US17092891
申请日：2020-11-09
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
CPC classification number: F28D20/0039 , F28D20/028 , F28F27/02 , F28D2020/0069 , F28D2020/0078 , F28D2021/0077 , H01L21/67109
Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
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公开(公告)号：US11656016B2
公开(公告)日：2023-05-23
申请号：US17100191
申请日：2020-11-20
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
CPC classification number: F25B49/022 , F25B31/02 , F25B41/20 , F25B7/00 , F25B2400/0401 , F25B2600/0251 , F25B2600/2519 , F25B2700/151 , F25B2700/21
Abstract: A cooling system includes: a first cooling apparatus electrically driven to supply a first heat transfer medium cooled to a first set temperature or lower; a plurality of second cooling apparatuses each of which includes a heat exchanger that exchanges heat between the first heat transfer medium supplied from the first cooling apparatus and a second heat transfer medium, and is electrically driven to supply a third heat transfer medium cooled to a second set temperature or lower, the second set temperature being changed individually with lapse of time; and a processor that obtains second set temperatures of the second cooling apparatuses and sets the first set temperature based on the obtained second set temperatures.
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公开(公告)号：US10143964B2
公开(公告)日：2018-12-04
申请号：US14284305
申请日：2014-05-21
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Takashi Kyotani , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki
Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.
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公开(公告)号：US09614411B2
公开(公告)日：2017-04-04
申请号：US13853005
申请日：2013-03-28
Applicant: Ebara Corporation
Inventor： Takashi Hozumi , Naoya Yoshida , Yoshinori Ojima , Takanori Inada , Toshiharu Nakazawa , Atsushi Oyama
CPC classification number: H02K5/128 , F04D17/08 , F04D25/06 , F04D29/60 , H02K3/18 , H02K3/487 , H02K2005/1287
Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.
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公开(公告)号：US09291155B2
公开(公告)日：2016-03-22
申请号：US13926053
申请日：2013-06-25
Applicant: EBARA CORPORATION
Inventor： Yoshinori Ojima , Takashi Hozumi , Naoya Yoshida , Takanori Inada , Toshiharu Nakazawa
CPC classification number: F04B17/00 , F04C29/0085 , F04C2220/10 , F04C2230/605 , F04C2240/40 , F04C2270/12 , F04C2280/04 , H02K7/04 , H02K7/14
Abstract: In order to provide a vacuum pump motor which is free from rotation imbalance, there is provided a vacuum pump motor 10 which is connected directly to a pump main shaft 21 of a vacuum pump 20, including a motor rotor 120 which is attached directly or indirectly to the pump main shaft 21 and balance rings 127 which are attached directly or indirectly to the pump main shaft 21 at ends thereof which are spaced apart from end portions of a rotor core 123, wherein the balance rings 127 contain a material having anticorrosion properties.
Abstract translation: 为了提供一种没有旋转不平衡的真空泵马达，提供了一个真空泵马达10，其直接连接到真空泵20的泵主轴21，该泵主轴21包括直接或间接附接的马达转子120 到泵主轴21和平衡环127，其平行环127直接或间接地连接到泵主轴21的端部，其与转子芯123的端部间隔开，其中平衡环127包含具有防腐性能的材料。
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