Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins
and methods for making said resins
    12.
    发明授权
    Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins 失效
    部分聚合的二乙烯基硅氧烷连接的双苯并环丁烯树脂和制备所述树脂的方法

    公开(公告)号:US5854302A

    公开(公告)日:1998-12-29

    申请号:US224203

    申请日:1994-04-14

    CPC分类号: G03F7/0757 C09D4/00

    摘要: A process for forming a partially polymerized DVS resin comprising heating DVS monomer (1,3-bis(2-bicyclo�4.2.0!octa-1,3,5-trien-3-ylethenyl)-1,1,3,3-tetramethyldisiloxane) in a solvent at a concentration of DVS monomer in the solvent such that: (a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze; and (b) the DVS resin, is rendered photocurable by the addition of at least one photosensitive agent in an amount sufficient to convert the mixture to an organic-insoluble solid upon exposing the mixture to photon radiation and the film retention upon development with a solvent is at least 50 percent. The DVS resin may be used as an interlayer dielectric to fabricate thin film multichip modules.

    摘要翻译: 一种形成部分聚合的DVS树脂的方法,包括加热DVS单体(1,3-双(2-双环[4.2.0]辛-1,3,5-三烯-3-基乙烯基)-1,1,3,3 - 四甲基二硅氧烷)溶于溶剂中的DVS单体浓度的溶剂中,使得:(a)DVS树脂在固体基材上薄层涂布和聚合时不会发热; 和(b)DVS树脂通过添加至少一种光敏剂使其变得光固化,其量足以将混合物暴露于光子辐射时将混合物转化为有机不溶性固体,并在用溶剂显影时保留膜 至少有50%。 DVS树脂可以用作层间电介质以制造薄膜多芯片模块。