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公开(公告)号：US20230021102A1
公开(公告)日：2023-01-19
申请号：US17784011
申请日：2020-12-03
Applicant: FUJIKIN INCORPORATED
Inventor： Katsuyuki SUGITA , Ryousuke DOHI , Koji KAWADA , Kouji NISHINO , Nobukazu IKEDA
Abstract: A flow rate control device 100 includes a flow rate control valve 8 having a valve element 8a and a piezoelectric element 8b for moving the valve element, and a control circuit 9 for controlling an operation of the flow rate control valve 8, wherein, in order to perform a pulsed fluid supply, the control circuit 9 is configured so as to open-loop control an applied voltage to the piezoelectric element so that it approaches the target voltage after once applying a voltage V1 exceeding a target voltage V0 corresponding to a target displacement of the piezoelectric element, when a pulsed flow rate setting signal is given.
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公开(公告)号：US20220268365A1
公开(公告)日：2022-08-25
申请号：US17638772
申请日：2020-06-12
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Masaaki NAGASE , Atsushi HIDAKA , Kazuyuki MORISAKI , Keisuke IDEGUCHI , Kosuke SUGIMOTO , Masafumi KITANO , Kouji NISHINO , Nobukazu IKEDA
IPC: F16K7/17 , C09D127/12
Abstract: A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.
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13.发明申请公开(公告)号：US20210239230A1
公开(公告)日：2021-08-05
申请号：US17161219
申请日：2021-01-28
Applicant: FUJIKIN INCORPORATED
Inventor： Ryousuke DOHI , Kaoru HIRATA , Katsuyuki SUGITA , Koji KAWADA , Kouji NISHINO , Nobukazu IKEDA
Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.
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公开(公告)号：US20200348158A1
公开(公告)日：2020-11-05
申请号：US16765153
申请日：2018-11-20
Applicant: FUJIKIN INCORPORATED
Inventor： Katsuyuki SUGITA , Ryousuke DOHI , Kaoru HIRATA , Koji KAWADA , Nobukazu IKEDA , Kouji NISHINO
IPC: G01F1/36 , F16K31/00 , G05D7/06 , G05B19/418
Abstract: A self-diagnosis method of a flow rate control device includes: a step (a) for measuring a pressure drop characteristic after a pressure control valve (6) has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve (8) is larger than a restriction part; a step (b) for measuring the pressure drop characteristic after the pressure control valve has been changed to the closed state from a state where the fluid flows from the upstream side of the flow rate control valve to the downstream side with the opening of the flow rate control valve is smaller than the restriction part; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (a) with a corresponding reference pressure drop characteristic; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (b) with a corresponding reference pressure drop characteristic; and a step (e) for determining that there is an abnormality in the flow rate control valve when it is determined that there is an abnormality only in the step (d).
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15.发明申请公开(公告)号：US20190227577A1
公开(公告)日：2019-07-25
申请号：US16327305
申请日：2017-08-24
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Kaoru HIRATA , Kouji NISHINO , Nobukazu IKEDA
IPC: G05D7/06 , G01F1/50 , G05B19/416
Abstract: A pressure-type flow rate control device 1, while maintaining an upstream pressure P1 of an orifice 5 at approximately at least twice a downstream pressure P2, calculates a flow factor FF of a mixed gas consisting of two types of gases mixed at a mixture ratio of X:(1−X) by FF=(k/ρ){2/(κ+1)}1/(κ−1)[κ/{(κ+1)R}]1/2 using an average density ρ, an average specific heat ratio κ, and an average gas constant R of the mixed gas that are calculated by weighting the densities, specific heat ratios, and gas constants of the two types of gases at the mixture ratio, and calculates a flow rate Q of the mixed gas passing through the orifice by Q=FF·S·P1(1/T1)1/2, where S is the orifice cross section, and P1 and T1 are respectively the pressure and temperature of the mixed gas on the upstream side of the orifice.
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Patent Agency Ranking
公开(公告)号：US20180217053A1
公开(公告)日：2018-08-02
申请号：US15748261
申请日：2016-08-09
Applicant: TOKUSHIMA UNIVERSITY , FUJIKIN INCORPORATED
Inventor： Yoshihiro DEGUCHI , Masaaki NAGASE , Michio YAMAJI , Nobukazu IKEDA , Kouji NISHINO , Masayoshi KAWASHIMA , Kazuteru TANAKA
CPC classification number: G01N21/3103 , G01J3/0218 , G01J3/10 , G01J3/28 , G01J3/42 , G01J3/433 , G01J2001/4242 , G01J2003/2866 , G01N21/274 , G01N21/33 , G01N21/3504 , G01N21/59 , G01N2021/3133 , G01N2201/0625 , G01N2201/0627
Abstract: A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.
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公开(公告)号：US20160239026A1
公开(公告)日：2016-08-18
申请号：US15028127
申请日：2014-10-21
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Nobukazu IKEDA , Kouji NISHINO , Ryousuke DOHI , Atsushi HIDAKA , Katsuyuki SUGITA
CPC classification number: G05D7/0647 , F16K31/004 , F16K31/06 , G01F1/34 , G01F1/363 , G01F1/42 , G01F1/6847 , G01F15/002 , G01F15/005 , G01F15/04
Abstract: A flow meter includes an inlet side switching valve, an outlet side switching valve on a downstream of the inlet side valve, and a control valve on a downstream of the outlet side valve that are connected with each other by flow passages having internal volumes, a pressure sensor on an upstream side of the control valve, and a larger flow rate measuring section for calculating a flow rate based on a build-down volume of an internal volume of the passage between an outlet of the inlet side valve and an inlet of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume of an inner capacity of the passage between an outlet of the outlet side valve and the inlet of the control valve.
Abstract translation: 流量计包括入口侧切换阀，入口侧阀的下游侧的出口侧切换阀和出口侧阀的下游的控制阀，通过具有内部容积的流路彼此连接， 控制阀的上游侧的压力传感器和用于计算基于入口侧阀的出口与入口侧的入口之间的通道的内部体积的增减体积的流量的较大流量测量部 控制阀和较小的流量测量部分，用于基于出口侧阀的出口和控制阀的入口之间的通道的内部容积的累积容积来计算流量。
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18.发明申请MULTI-HOLE ORIFICE PLATE FOR FLOW CONTROL, AND FLOW CONTROLLER USING THE SAME 有权用于流量控制的多孔板，以及使用其的流量控制器公开(公告)号：US20160070271A1
公开(公告)日：2016-03-10
申请号：US14785789
申请日：2014-04-09
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Atsushi HIDAKA , Masaaki NAGASE , Ryousuke DOHI , Nobukazu IKEDA , Kouji NISHINO , Katsuyuki SUGITA , Takashi HIROSE
IPC: G05D7/06 , F16L55/027
CPC classification number: G05D7/0635 , F16L55/02718
Abstract: A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area.
Abstract translation: 用于流量控制的多孔孔板包括用于控制流体流速的孔板，其中分配预定流速的流体所需的一个孔口的开口面积以提供多个具有 总开口面积等于所述开口面积。
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公开(公告)号：US20150362105A1
公开(公告)日：2015-12-17
申请号：US14763713
申请日：2014-01-24
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Ryousuke DOHI , Nobukazu IKEDA , Kouji NISHINO
IPC: F16L21/02
Abstract: Gasket-integrated orifice plates including a first orifice base (2) that includes a fitting protrusion (2b) and that is provided with a penetrating passage (2a) at a center thereof, and a second orifice base (3) that includes a fitting recess (3b) and that is provided with a penetrating passage (3a) at a center thereof that communicates with the passage (2a) of the first orifice base (2) are fit together with a ceramic orifice plate (4) being airtightly inserted and fixed between end faces of the both orifice bases (2, 3) and external end faces of the both orifice bases (2, 3) being made to be gasket sealing faces (2c, 3c).
Abstract translation: 垫片集成孔板，包括包括配合突起（2b）的第一孔口基座（2），并且在其中心处设置有穿透通道（2a），以及第二孔口基座（3），其包括装配凹部 （3b），并且在其中心处设置有与第一孔口基座（2）的通道（2a）连通的穿透通道（3a），其与气密地插入和固定的陶瓷孔板（4）配合在一起 两个孔基部（2,3）的端面和两个孔基部（2,3）的外端面之间形成为垫圈密封面（2c，3c）。
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公开(公告)号：US20240167577A1
公开(公告)日：2024-05-23
申请号：US18552826
申请日：2022-03-08
Applicant: FUJIKIN INCORPORATED
Inventor： Atsushi HIDAKA , Kazuteru TANAKA , Takatoshi NAKATANI , Kazuyuki MORISAKI , Masafumi KITANO , Kaoru HIRATA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
CPC classification number: F16K25/005 , F16K7/17 , G05D7/0635
Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.
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