Reducing diffraction effects on an ablated surface

    公开(公告)号:US11126056B2

    公开(公告)日:2021-09-21

    申请号:US16405015

    申请日:2019-05-07

    Abstract: A method for removing a material from a surface of a substrate includes impinging a laser beam on the material during a first sweep to remove the material from the surface along a first line and impinging the laser beam on the material during a second sweep to remove the material from the surface along a second line adjacent to the first line. The first line includes first artifacts that form a first portion of an array of artifacts on the surface. The second line includes second artifacts that form a second portion of the array of artifacts on the surface. A first laser pulse of the laser beam corresponding with the second sweep is synchronized with a start of the second sweep when transitioning between the first line and the second line such that the start of the second sweep coincides with the first laser pulse.

    Device for controlling the direction of a laser beam

    公开(公告)号:US09878400B1

    公开(公告)日:2018-01-30

    申请号:US14579923

    申请日:2014-12-22

    CPC classification number: B23K26/38

    Abstract: A laser system is configured to form laser-induced channels in a substrate at a plurality of spaced apart locations along a process path. The laser system includes a laser delivery assembly that receives the laser beam along a receiving axis and directs the laser beam toward the substrate along an impingement axis that forms an oblique angle with a surface of the substrate. The substrate can be divided into separate first and second portions along a separation surface having a draft angle, thereby facilitating substrate division with a zero-kerf process.

    LASER SYSTEM AND METHOD THEREOF
    16.
    发明申请
    LASER SYSTEM AND METHOD THEREOF 有权
    激光系统及其方法

    公开(公告)号:US20150034616A1

    公开(公告)日:2015-02-05

    申请号:US14452446

    申请日:2014-08-05

    Abstract: A laser system includes a laser configured to emit pulse bursts and a motion device in optical communication with the laser. The motion device moves a laser beam along a process path on a substrate and is configured to have a natural frequency that is greater than an operating frequency of the laser system. The laser system enables high and constant speed processing along tight radii in the process path, which is useful to form laser induced channels along the process path with equal spacing.

    Abstract translation: 激光系统包括配置为发射脉冲串的激光器和与激光器光学通信的运动装置。 运动装置沿着衬底上的处理路径移动激光束,并且被配置为具有大于激光系统的工作频率的固有频率。 激光系统能够沿着处理路径中的紧密半径实现高速恒定的速度处理,这对沿着处理路径形成具有相等间距的激光感应通道是有用的。

    Distribution of damage volumes in laser-induced channels

    公开(公告)号:US10471546B1

    公开(公告)日:2019-11-12

    申请号:US14580206

    申请日:2014-12-22

    Abstract: A laser system is configured to produce a distribution of self-focus damage volumes through the thickness of a substrate. A laser of the laser system produces a laser beam, and an optical assembly receives the laser beam and emits a conditioned laser beam having a geometric focal region. Placing the substrate in the path of the conditioned beam shifts the focal region to an effective focal region. The optical assembly and/or optical elements thereof can be configured such that the distribution of self-focus damage volumes is uniform over the thickness of the substrate by accounting for the non-linear effects of the substrate on the light that propagates through the substrate.

    Laser system and process with buffer material

    公开(公告)号:US10131016B1

    公开(公告)日:2018-11-20

    申请号:US14826993

    申请日:2015-08-14

    Abstract: A laser system includes a buffer material at an entry surface of a substrate in which laser-induced channels are formed. The laser beam propagates through the buffer material and impinges the substrate with a central axis of the laser beam at an oblique angle of incidence. The buffer material has a refractive index that may be closer to that of the substrate than is the refractive index of the atmosphere, such as air, in which the laser system operates. The buffer material facilitates forming laser-induced channels at relative large angles with respect to the substrate surface by attenuating energy loss or other effects on the laser beam that are normally caused by the mismatch in refractive index between the environment and the substrate in the absence of the buffer material.

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