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公开(公告)号:US11067751B2
公开(公告)日:2021-07-20
申请号:US16597323
申请日:2019-10-09
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Colleen Meagher , Karen Nummy , Yusheng Bian , Ajey Poovannummoottil Jacob
Abstract: Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.
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公开(公告)号:US12135456B2
公开(公告)日:2024-11-05
申请号:US17850128
申请日:2022-06-27
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Koushik Ramachandran , Karen Nummy
Abstract: Structures for a waveguide core and methods of fabricating such structures. The structure comprises a waveguide core including a section having a first trapezoidal portion and a second trapezoidal portion stacked with the first trapezoidal portion. The first trapezoidal portion has a first trapezoidal shape, and the second trapezoidal portion has a second trapezoidal shape different from the first trapezoidal shape.
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公开(公告)号:US11934008B2
公开(公告)日:2024-03-19
申请号:US18083716
申请日:2022-12-19
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
CPC classification number: G02B6/1228 , G02B6/0046 , G02B6/1225 , G02B6/14 , G02B2006/12035 , G02B2006/1215 , G02B2006/12152
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号:US11378743B1
公开(公告)日:2022-07-05
申请号:US17146864
申请日:2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy , Edward Kiewra , Steven M. Shank
Abstract: Structures including a grating coupler and methods of fabricating a structure including a grating coupler. The structure includes structure includes a dielectric layer on a substrate, a first waveguide core positioned in a first level over the dielectric layer, and a second waveguide core positioned in a second level over the dielectric layer. The second level differs in elevation above the dielectric layer from the first level. The first waveguide core includes a tapered section. The structure further includes a grating coupler having a plurality of segments positioned in the second level adjacent to the second waveguide core. The segments of the grating coupler and the tapered section of the first waveguide core are positioned in an overlapping arrangement.
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公开(公告)号:US10969544B1
公开(公告)日:2021-04-06
申请号:US16682354
申请日:2019-11-13
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Shuren Hu , Bo Peng , David Riggs , Karen Nummy , Kevin K. Dezfulian , Francis Afzal
Abstract: Structures for a filter and methods of fabricating a structure for a filter. The filter is coupled to a waveguide core. The filter includes a first plurality of grating structures positioned adjacent to a first section of the waveguide core and a second plurality of grating structures positioned adjacent to a second section of the waveguide core. The first plurality of grating structures are configured to cause laser light in a first portion of a wavelength band to be transferred between the first section of the waveguide core and the first plurality of grating structures. The second plurality of grating structures are configured to cause laser light in a second portion of a wavelength band to be transferred between the second section of the waveguide core and the second plurality of grating structures.
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公开(公告)号:US20240288631A1
公开(公告)日:2024-08-29
申请号:US18115046
申请日:2023-02-28
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Kevin Dezfulian , Kenneth Giewont , Karen Nummy
IPC: G02B6/12
CPC classification number: G02B6/12004 , G02B2006/12061 , G02B6/136
Abstract: Structures for a waveguide escalator and methods of forming such structures. A structure comprises a first waveguide core, and a back-end-of-line stack including a first dielectric layer, a second dielectric layer on the first dielectric layer, an opening in the second dielectric layer, a second waveguide core including a section that overlaps with a section of the first waveguide core, and a plurality of third waveguide cores disposed between the section of the first waveguide core and the section of the second waveguide core. The plurality of third waveguide cores are positioned inside the opening in the second dielectric layer, the first dielectric layer comprises a first material with a first refractive index, and the second dielectric layer comprises a second material with a second refractive index different from the first refractive index.
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公开(公告)号:US20230417991A1
公开(公告)日:2023-12-28
申请号:US17850128
申请日:2022-06-27
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Koushik Ramachandran , Karen Nummy
CPC classification number: G02B6/1228 , G02B6/136 , G02B2006/12121
Abstract: Structures for a waveguide core and methods of fabricating such structures. The structure comprises a waveguide core including a section having a first trapezoidal portion and a second trapezoidal portion stacked with the first trapezoidal portion. The first trapezoidal portion has a first trapezoidal shape, and the second trapezoidal portion has a second trapezoidal shape different from the first trapezoidal shape.
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公开(公告)号:US11531164B2
公开(公告)日:2022-12-20
申请号:US17169971
申请日:2021-02-08
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Kevin K. Dezfulian , Yusheng Bian , Kenneth J. Giewont , Karen Nummy
Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The structure includes a dielectric layer including an edge, a waveguide core region on the dielectric layer, and multiple segments on the dielectric layer. The waveguide core region has an end surface, and the waveguide core region is lengthwise tapered toward the end surface. The segments are positioned between the waveguide core region and the edge of the dielectric layer. A waveguide core has a section positioned over the waveguide core region in an overlapping arrangement. The waveguide core has an end surface, and the section of the waveguide core is lengthwise tapered toward the end surface.
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公开(公告)号:US20220252785A1
公开(公告)日:2022-08-11
申请号:US17173639
申请日:2021-02-11
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号:US11215756B2
公开(公告)日:2022-01-04
申请号:US16859347
申请日:2020-04-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Roderick A. Augur , Michal Rakowski , Kenneth J. Giewont , Karen Nummy , Kevin K. Dezfulian , Bo Peng
Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.
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