公开(公告)号：US20220230955A1

公开(公告)日：2022-07-21

申请号：US17151346

申请日：2021-01-18

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alamgir M. Arif ,  Sunil K. Singh ,  Dewei Xu ,  Seung-Yeop Kook ,  Roderick A. Augur

IPC: H01L23/522 ,  H01L49/02

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure. With capacitor electrodes in different ILD layers. The structure includes a first inter-level dielectric (ILD) layer having a top surface, a first vertical electrode within the first ILD layer, a capacitor dielectric film on a top surface of the first vertical electrode, a second ILD layer over the first ILD layer, and a second vertical electrode within the second ILD layer and on the capacitor dielectric film. The capacitor dielectric film is vertically between the first vertical electrode and the second vertical electrode.

公开(公告)号：US20220229250A1

公开(公告)日：2022-07-21

申请号：US17151955

申请日：2021-01-19

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Kenneth J. Giewont ,  Karen Nummy

IPC: G02B6/42 ,  F21V8/00 ,  G02B6/30

Abstract: Structures including an edge coupler and methods of forming a structure including an edge coupler. The structure includes a waveguide core over a dielectric layer and a back-end-of-line stack over the dielectric layer and the waveguide core. The back-end-of-line stack includes a side edge and a truncated layer that is overlapped with a tapered section of the waveguide core. The truncated layer has a first end surface adjacent to the side edge and a second end surface above the tapered section of the waveguide core. The truncated layer is tapered from the first end surface to the second end surface.

公开(公告)号：US20220187676A1

公开(公告)日：2022-06-16

申请号：US17119042

申请日：2020-12-11

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Michal Rakowski ,  Yusheng Bian ,  Won Suk Lee ,  Roderick A. Augur

IPC: G02F1/225

Abstract: Embodiments of the disclosure provide an optical ring modulator. The optical ring modulator includes waveguide with a first semiconductor material of a first doping type, and a second semiconductor material having a second doping type adjacent the first semiconductor material. A P-N junction is between the first semiconductor material and the second semiconductor material. A plurality of photonic crystal layers, each embedded within the first semiconductor material or the second semiconductor material, has an upper surface that is substantially coplanar with an upper surface of the waveguide structure.

公开(公告)号：US11500198B2

公开(公告)日：2022-11-15

申请号：US17146509

申请日：2021-01-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Won Suk Lee ,  Thomas G. Weeks, III ,  Michal Rakowski ,  Yusheng Bian ,  Roderick A. Augur ,  Alexander L. Martin ,  Petar I. Todorov

IPC: G02B27/00 ,  G02B6/125

Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.

公开(公告)号：US11474294B2

公开(公告)日：2022-10-18

申请号：US17162303

申请日：2021-01-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alec Hammond ,  Yusheng Bian ,  Michal Rakowski ,  Won Suk Lee ,  Asif J. Chowdhury ,  Roderick A. Augur

IPC: G02B6/124 ,  G02B6/13 ,  G02B6/12

Abstract: Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.

公开(公告)号：US20220299706A1

公开(公告)日：2022-09-22

申请号：US17202729

申请日：2021-03-16

Applicant: GLOBALFOUNDRIES U.S. Inc. ,  KHALIFA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Yusheng Bian ,  Michal Rakowski ,  Roderick A. Augur ,  Marios Papadovasilakis ,  Sujith Chandran ,  Jaime Viegas ,  Yonas Gebregiorgis

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/125

Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. A waveguide core of the wavelength-division multiplexing filter includes a first bend having a first curvature and a second bend having a second curvature different than the first curvature. The structure further includes a waveguide core region having a first end surface, a second end surface, and a bend arranged between the first and second end surfaces. The bend is positioned over the first bend of the waveguide core in an overlapping relationship.

公开(公告)号：US20220252785A1

公开(公告)日：2022-08-11

申请号：US17173639

申请日：2021-02-11

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Kenneth J. Giewont ,  Karen Nummy

IPC: G02B6/122 ,  F21V8/00 ,  G02B6/14

Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.

公开(公告)号：US11215756B2

公开(公告)日：2022-01-04

申请号：US16859347

申请日：2020-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Michal Rakowski ,  Kenneth J. Giewont ,  Karen Nummy ,  Kevin K. Dezfulian ,  Bo Peng

IPC: G02B6/122 ,  G02B6/13

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.

公开(公告)号：US20210333474A1

公开(公告)日：2021-10-28

申请号：US16859347

申请日：2020-04-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Roderick A. Augur ,  Michal Rakowski ,  Kenneth J. Giewont ,  Karen Nummy ,  Kevin K. Dezfulian ,  Bo Peng

IPC: G02B6/122 ,  G02B6/13

Abstract: Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.

公开(公告)号：US20250102877A1

公开(公告)日：2025-03-27

申请号：US18372953

申请日：2023-09-26

Applicant: GlobalFoundries U.S. Inc. ,  Khalifa University of Science and Technology

Inventor： Michal Rakowski ,  Yusheng Bian ,  Roderick A. Augur ,  Ayat M. Taha ,  Marios Papadovasilakis ,  Yonas Hadush Gebregiorgis ,  Jaime Viegas

IPC: G02F1/21 ,  G02F1/01 ,  G02F1/225

Abstract: Structures for a power splitter that include a multimode interference coupler and methods of forming such structures. The structure comprises a multimode interference coupler including a grating having a plurality of grating lines, an input waveguide core, and an output waveguide core. The grating lines are disposed between the input waveguide core and the output waveguide core. The structure further comprises a resistive heating element adjacent to the grating lines.