公开(公告)号：US06791698B2

公开(公告)日：2004-09-14

申请号：US10332849

申请日：2003-01-14

Applicant: Guenter Doemens ,  Anton Schick

Inventor： Guenter Doemens ,  Anton Schick

IPC: G01B1100

CPC classification number: G01B11/026 ,  G02B21/0024 ,  G02B21/0048

Abstract: A confocal imaging system is equipped with a retroreflector, which oscillates with a high frequency, for increasing the data rate during the recording of distance values. A mirror system having a small mass is provided that, by use of an electrostatic drive, makes extremely rapid focusing movements or height detections possible in the case of a small mass. The mirror system includes two separate micromechanically produced mirrors, which are set at 90° to one another and which synchronously oscillate in the direction of the optical axis of the confocal imaging system.

Abstract translation: 共焦成像系统配备有以高频振荡的后向反射器，用于在记录距离值期间增加数据速率。 提供了具有小质量的反射镜系统，其通过使用静电驱动，在小质量的情况下可以进行非常快速的聚焦运动或高度检测。 镜系统包括两个单独的微机械产生的反射镜，其被设置成彼此成90°并且在共焦成像系统的光轴的方向上同步振荡。

公开(公告)号：US6028432A

公开(公告)日：2000-02-22

申请号：US906405

申请日：1997-08-05

Applicant: Guenter Doemens ,  Wolfgang Wichner

Inventor： Guenter Doemens ,  Wolfgang Wichner

IPC: B66C13/06 ,  G01S13/87 ,  G01R27/26

CPC classification number: B66C13/063 ,  G01S13/878

Abstract: The stopping of a load suspended from a crane requires a swing control or, respectively, a swing damping. Upon employment of microwave measuring units, spacings between a carrying cable suspension and a load suspension point are determined on the basis of transit time measurements. The position of the load suspension point can be determined from the transit time measurements quickly and with high precision. Swinging motions are avoided by controlled opposing control of the carrying cable suspension.

Abstract translation: 停止从起重机悬挂的负载需要摆动控制或分别摆动阻尼。 在使用微波测量单元时，承载电缆悬架和负载悬挂点之间的间距是基于通过时间测量来确定的。 负载悬挂点的位置可以从运输时间测量中快速，高精度地确定。 摆动运动可以通过控制相对控制承载电缆悬架来避免。

公开(公告)号：US5088828A

公开(公告)日：1992-02-18

申请号：US468218

申请日：1990-01-22

Applicant: Guenter Doemens ,  Richard Schneider

Inventor： Guenter Doemens ,  Richard Schneider

IPC: G01B11/24 ,  G01B11/02 ,  G01B11/245 ,  H05K13/08

CPC classification number: G01B11/02

Abstract: Testing techniques for three-dimensional testing of printed circuit boards overcome the disadvantages that presently exist such as, for example, too little height resolution, low processing speed and difficult manipulation. The testing in the microscopic domain occurs within unaltering, displaceable evaluation windows on the basis of the calculation of cross-sectional areas at each scan point on a printed circuit board. Microscopic testing occurs on the basis of the calculation of defined, simple geometric values within a scan field and by following comparisons to reference values. The arrangement for the implementation of the methods utilize a laser scanner for triangulation, an evaluation unit, and at least one high-resolution, position-sensitive detector.

Abstract translation: 用于印刷电路板的三维测试的测试技术克服了目前存在的缺点，例如，高度分辨率太低，处理速度低和操作困难。 基于在印刷电路板上的每个扫描点处的横截面积的计算，在微观领域中的测试发生在不变的，可位移的评估窗口内。 微观测试是在扫描场内定义的简单几何值的计算基础上进行的，并且与参考值进行比较。 用于实施该方法的装置利用用于三角测量的激光扫描器，评估单元和至少一个高分辨率位置敏感检测器。

公开(公告)号：US4967149A

公开(公告)日：1990-10-30

申请号：US286347

申请日：1988-12-19

Applicant: Guenter Doemens ,  Thomas Rose ,  Detlef Hoffmann ,  Arnold Heisen

Inventor： Guenter Doemens ,  Thomas Rose ,  Detlef Hoffmann ,  Arnold Heisen

IPC: G01R1/073 ,  G01R1/07 ,  G01R31/302 ,  G01R31/304

CPC classification number: G01R1/072 ,  G01R31/304

Abstract: A drive device for an apparatus for electrical function testing of wiring matrices, which has optimally simple electrode shapes for the purpose of a further miniaturization with a two-electrode arrangement. For testing printed circuit boards a non-touching plasma contacting is used whereby two respectively selected measuring locations of a wiring matrix can be contacted via allocated discharge channels and their electrodes. The drive of the measuring locations (test points) occurs via control gas discharges that are generated by applying an adequately high voltage between the electrodes. By applying a voltage between the gas discharges, a current conduction that can be evaluated for test purposes is generated for a conductive connection between the test points.

Abstract translation: 用于布线基体的电功能测试装置的驱动装置，其具有最佳简单的电极形状，以便通过双电极布置进一步小型化。 为了测试印刷电路板，使用非触摸等离子体接触，由此布线基体的两个分别选择的测量位置可以经由分配的放电通道及其电极接触。 测量位置（测试点）的驱动通过在电极之间施加足够高的电压产生的控制气体放电发生。 通过在气体放电之间施加电压，可以为测试点之间的导电连接产生可用于测试目的的电流传导。

公开(公告)号：US4814626A

公开(公告)日：1989-03-21

申请号：US934335

申请日：1986-11-24

Applicant: Guenter Doemens ,  Herbert Eigenstetter ,  Peter Mengel

Inventor： Guenter Doemens ,  Herbert Eigenstetter ,  Peter Mengel

IPC: G01B11/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67 ,  H01L21/68

CPC classification number: G03F7/70616 ,  G03F9/7049

Abstract: A method for high precision position measurement of two-dimensional structures such as structures on semiconductor wafers or masks, utilizing a reference mask having a two-dimensional grid, the relative position of the structures relative to the grid being identified by opto-electronic scanning using an image sensor and subsequent image processing. The absolute position of the structures to be measured can then be identified from the position of the grid elements. A reference mask is preferably employed whose grid elements carry a binary coding which can be read and decoded by the image processing means. The coding thereby indicates the position of the grid elements in the grid.

Abstract translation: 一种利用具有二维网格的参考掩模的半导体晶片或掩模上的诸如结构的二维结构的高精度位置测量的方法，通过光电扫描来识别结构的相对位置，使用 图像传感器和随后的图像处理。 然后可以从网格元素的位置识别要测量的结构的绝对位置。 优选地使用其栅格元素携带可由图像处理装置读取和解码的二进制编码的参考掩码。 编码从而表示网格中网格元素的位置。

公开(公告)号：US4238780A

公开(公告)日：1980-12-09

申请号：US026038

申请日：1979-04-02

Applicant: Guenter Doemens

Inventor： Guenter Doemens

IPC: H01L21/68 ,  G01B11/02 ,  G01D5/26 ,  G05D3/12 ,  G06T7/00 ,  G06F15/46 ,  H05K13/00

CPC classification number: G06T7/0044 ,  G01B11/022 ,  G01D5/26

Abstract: The position of semiconductor elements is recognized automatically by opto-electronic, non-contact techniques. Recognition of the position of the semiconductor elements, such as integrated circuits, is largely independent of pattern and surface properties, in particular for adjustment purposes in automatic wire assembly and in the transfer of semiconductor elements to automatic alloying/adhesive equipment. The positions of the semiconductor elements are determined via a rectilinear cut edge or system edge by means of a row-by-row scanning which leads from the surroundings of an element and moves across the element, with the rows running parallel or virtually parallel to the direction of the rectilinear edge. The instantaneous intensities of the brightness values are integrated row-wise or row-section-wise, the resulting values are stored and the difference of the results of consecutive rows is formed. Then, only the polarity which corresponds to the investigated edge is used for further analysis. The result is weighted with a factor which corresponds to the roughness of the particular position in the image. The differences in a rough zone are distinctly weakened and differences in a smooth zone are distinctly emphasized, and by means of an additional electronic width evaluation, sharp-edged lines are emphasized in relation to wide junctions so that, on this basis, by means of row counting, a signal for correcting the position of the chip is formed and is output in order to correct the position.

Abstract translation: 通过光电非接触技术自动识别半导体元件的位置。 识别诸如集成电路的半导体元件的位置在很大程度上独立于图案和表面性质，特别是用于自动线组装和将半导体元件转移到自动合金/粘合设备中的调整目的。 半导体元件的位置通过直线扫描边缘或系统边缘通过逐行扫描确定，该扫描从元件的周围引导并移动穿过元件，其中行平行或实际上平行于 直线边缘的方向。 亮度值的瞬时强度以行方式或行分段积分，存储所得到的值，并且形成连续行的结果的差异。 然后，仅使用与研究边缘相对应的极性进行进一步分析。 结果以对应于图像中特定位置的粗糙度的因子进行加权。 粗糙区域的差异明显减弱，平滑区域的差异被明显强调，并且通过额外的电子宽度评估，强调了与广泛路口相关的尖锐线条，从而在此基础上，借助于 行计数，形成用于校正芯片的位置的信号，并输出以校正位置。

公开(公告)号：US06636300B2

公开(公告)日：2003-10-21

申请号：US09944496

申请日：2001-08-31

Applicant: Guenter Doemens ,  Peter Mengel

Inventor： Guenter Doemens ,  Peter Mengel

IPC: G01B1126

CPC classification number: G01S17/89 ,  G01S7/481 ,  G01S7/4814

Abstract: In a spatially resolving range-finding system, an object is illuminated in a pixelwise fashion by illuminating beams emanating from an array of light sources with returned imaging beams striking a corresponding array of solid state receiving elements. The particular arrangement of the light sources and the receiving elements may be varied. The laser light sources and receiving elements may be selectively operated such that one light source may illuminate one or more receiving elements or several light sources may illuminate a single receiving element. The light sources are driven serially, allowing limits of laser protection regulations to be reliably complied with. An advantage is a substantially better signal quality at the receiving elements.

Abstract translation: 在空间分辨率测距系统中，通过照射从光源阵列发出的光束，物体通过返回的成像光束照射到固态接收元件的相应阵列上而​​以像素方式照射物体。 光源和接收元件的特定布置可以是变化的。 可以选择性地操作激光光源和接收元件，使得一个光源可以照亮一个或多个接收元件，或者几个光源可以照亮单个接收元件。 光源连续驱动，可以可靠地遵守激光保护规定的限制。 在接收元件上的优点是显着更好的信号质量。

公开(公告)号：US4941363A

公开(公告)日：1990-07-17

申请号：US385815

申请日：1989-07-26

Applicant: Guenter Doemens ,  Markus Gilch

Inventor： Guenter Doemens ,  Markus Gilch

IPC: G01B7/00 ,  G01D5/24 ,  G01L3/10

CPC classification number: G01L3/106

Abstract: A sensor for measuring the torque acting on a rotating shaft has two electrode structures which are respectively mechanically coupled to two axially spaced points on the shaft to be measured so that a relative movement between the two electrode structures occurs due to the torque. The electrode structures each have a number of parallel, spaced electrodes and are asymmetrically mounted in a plane so that a number of capacitors are formed by electrode pairs each having an electrode from each electrode structure. Because of the asymmetrical arrangement, the electrodes in a pair are spaced a relatively large distance away from the next closest electrode, so that a capacitive decoupling between the pairs is achieved. Changes in the spacing between the points on the shaft due to torsion of the shaft caused by the torque will change the spacing between the electrodes in each pair, thereby resulting in a total capacitance change which is proportional to the torque. To compensate for the influence of transverse forces or bending moments acting on the shaft, a further capacitor arrangement identical to the first arrangement is arranged at an angle of 180.degree. with respect to the first arrangement, with the capacitance used for the purpose of measurement being the capacitances of the two capacitor arrangements in the series.

Abstract translation: 用于测量作用在旋转轴上的扭矩的传感器具有两个电极结构，它们分别机械耦合到要测量的轴上的两个轴向间隔的点，使得由于转矩而在两个电极结构之间发生相对运动。 电极结构各自具有多个平行的间隔开的电极，并且非对称地安装在平面中，使得通过电极对形成多个电容器，电极对各自具有来自每个电极结构的电极。 由于非对称布置，一对中的电极与下一个最接近的电极隔开相当大的距离，从而实现了两对之间的电容去耦。 由于扭矩引起的轴扭转导致的轴上的间距的变化将改变每对电极间的间距，从而导致与扭矩成比例的总电容变化。 为了补偿作用在轴上的横向力或弯矩的影响，与第一布置相同的另一电容器布置相对于第一布置以180度的角度布置，用于测量目的的电容为 串联中的两个电容器布置的电容。

公开(公告)号：US4934198A

公开(公告)日：1990-06-19

申请号：US216110

申请日：1988-07-07

Applicant: Guenter Doemens

Inventor： Guenter Doemens

IPC: G01L3/10 ,  G01L1/02 ,  G01L3/04 ,  G01L9/00

CPC classification number: G01L9/0092 ,  G01L1/02 ,  G01L3/04

Abstract: Measurement sensor for length or distance changes, particularly for non-contacting measurement of torques of rotating shafts. In known measurement sensors, the length or distance change (.DELTA.x) is amplified by a mechanical lever system and is then converted into an electrical quantity. In the novel measurement sensor of the present invention, the length or distance change (.DELTA.x) to be measured is transmitted to a displacer in order to enhance the precision. A displaced liquid, particularly mercury, is introduced into a capillary and the length of a liquid column in the capillary is converted into an electrical quantity, preferably as a change of a resistor. The new measurement sensor is particularly suitable for torque measurement.

Abstract translation: 用于长度或距离变化的测量传感器，特别是用于非接触式测量转轴转矩的测量传感器。 在已知的测量传感器中，长度或距离变化（DELTA x）由机械杠杆系统放大，然后转换成电量。 在本发明的新型测量传感器中，要测量的长度或距离变化（DELTA x）被传送到置换器以提高精度。 将置换的液体，特别是汞引入毛细管中，将毛细管中的液柱的长度转换成电量，优选地作为电阻器的变化。 新的测量传感器特别适用于扭矩测量。

公开(公告)号：US4891578A

公开(公告)日：1990-01-02

申请号：US168965

申请日：1988-03-16

Applicant: Guenter Doemens

Inventor： Guenter Doemens

IPC: G01R31/02 ,  G01R1/07 ,  G01R31/302

CPC classification number: G01R1/072

Abstract: A device for the electrical function testing of wiring matrices, particularly of printed circuit boards. In the electrical function testing of wiring matrices, particularly of printed circuit boards, the contacting of selected measuring locations results via gas discharging channels. The plurality of leads required for the selection of the individual measuring locations is drastically reduced. In the new device, every gas discharge channel is selectable by an associated busbar and by the controllable charging with light of a photoconductor arranged between the gas discharge channel and the associated busbar.

Abstract translation: 用于布线基体，特别是印刷电路板的电气功能测试的装置。 在布线基体，特别是印刷电路板的电气功能测试中，所选择的测量位置的接触通过气体放电通道产生。 用于选择各个测量位置所需的多个引线大大降低。 在新装置中，每个气体放电通道可由相关联的母线选择，并通过布置在气体放电通道和相关母线之间的光电导体的可控充电来选择。