公开(公告)号：US10319558B2

公开(公告)日：2019-06-11

申请号：US15022662

申请日：2014-05-02

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuko Sasaki ,  Hiroyuki Ito

IPC: H01J37/153 ,  H01J37/147 ,  H01J37/141 ,  H01J37/12

Abstract: Provided is a multifunctional charged particle beam device capable of inclining a beam with little aberration. The aberration is corrected by forming a local divergent field with a multipole, parallel current lines, or the like, matching the beam axis with the local divergent field via a conventional rotationally symmetric lens, deflector or astigmatism corrector, and counteracting an aberration occurring from another rotationally symmetric convex lens field.

公开(公告)号：US09305745B2

公开(公告)日：2016-04-05

申请号：US14379733

申请日：2013-02-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Wataru Mori ,  Hiroyuki Ito ,  Yuko Sasaki ,  Hiromi Inada

IPC: H01J37/00 ,  H01J37/28 ,  H01J37/05 ,  H01J37/244 ,  H01J37/09

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: The purpose of the present invention is to provide a scanning electron microscope that achieves an increase in both resolution and pattern recognition capability. In order to achieve the purpose, the present invention proposes a scanning electron microscope provided with a monochromator that makes an electron beam monochromatic, the monochromator including a magnetic field generator that deflects the electron beam, and an energy selection aperture that passes a part of the electron beam deflected by the magnetic field generator. An aperture that passes some of electrons emitted from the sample and a detector that detects the electrons that have passed through the aperture are disposed on a trajectory to which the electrons emitted from the sample are deflected by a magnetic field generated by the magnetic field generator.

Abstract translation: 本发明的目的是提供一种扫描电子显微镜，其实现分辨率和图案识别能力的增加。 为了实现该目的，本发明提出了一种具有单色仪的扫描电子显微镜，其使电子束单色，单色器包括使电子束偏转的磁场发生器，以及通过一部分能量选择孔 由磁场发生器偏转的电子束。 通过从样品发射的一些电子的孔和检测已经通过孔的电子的检测器设置在由样品发射的电子被磁场发生器产生的磁场偏转的轨迹上。