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公开(公告)号：US08393808B2
公开(公告)日：2013-03-12
申请号：US12710510
申请日：2010-02-23
申请人： Taro Yamamoto , Kousuke Yoshihara , Yuichi Yoshida
发明人： Taro Yamamoto , Kousuke Yoshihara , Yuichi Yoshida
IPC分类号： G03D5/00
CPC分类号： H01L21/027 , G03F7/3021 , H01L21/67051 , H01L21/6715
摘要： A method of developing a substrate including rotating the substrate and supplying a developing liquid from a discharge port of a developer nozzle onto the surface of the substrate, while moving the developer nozzle, disposed above the substrate, from a central portion towards a peripheral portion of the substrate, and supplying a first rinse liquid from a discharge port of a first rinse nozzle onto the surface of the substrate, while moving the first rinse nozzle, disposed above the substrate, from the central portion towards the peripheral portion of the substrate. The supplying of the developing liquid and the first rinse liquid are performed concurrently, with the first rinse nozzle being maintained nearer to a center of the substrate than the developer nozzle.
摘要翻译： 一种显影衬底的方法，包括使衬底旋转并将显影液从显影剂喷嘴的排出口供应到衬底的表面上，同时将位于衬底上方的显影剂喷嘴从中心部分朝向衬底的周边部分移动 并且将第一冲洗液从第一冲洗喷嘴的排出口提供到基板的表面上，同时将设置在基板上方的第一冲洗喷嘴从中心部分朝向基板的周边部分移动。 同时进行显影液和第一漂洗液的供给，第一冲洗喷嘴比显影剂喷嘴更靠近基板的中心。
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公开(公告)号：US08337104B2
公开(公告)日：2012-12-25
申请号：US13024430
申请日：2011-02-10
IPC分类号： G03D5/00
CPC分类号： G03F7/3021
摘要： There is provided a developing apparatus and a developing method capable of rapidly forming a liquid film of a developing solution on an entire surface of a substrate while reducing a usage amount of the developing solution. The developing apparatus includes an airtightly sealed processing vessel that forms a processing atmosphere therein; a temperature control plate that is provided within the processing vessel and mounts the substrate thereon; an atmosphere gas supply unit that supplies an atmosphere gas including mist and vapor of a developing solution onto a surface of the substrate within the processing vessel; and a first temperature control unit that controls the temperature control plate to a temperature allowing the atmosphere gas to be condensed on the substrate. Here, an inner wall of the processing vessel is maintained at a temperature at which the atmosphere gas is hardly condensed on the inner wall.
摘要翻译： 提供了一种能够在减少显影液的使用量的同时在基板的整个表面上快速形成显影液的液膜的显影装置和显影方法。 显影装置包括在其中形成处理气氛的气密密封处理容器; 温度控制板，设置在处理容器内并将基板安装在其上; 气氛气体供给单元，其将包含显影液的雾和气体的气氛气体供给到所述处理容器内的所述基板的表面上; 以及第一温度控制单元，其将温度控制板控制为允许气氛气体在基板上冷凝的温度。 这里，处理容器的内壁保持在气氛气体几乎不凝结在内壁上的温度。
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公开(公告)号：US20110200952A1
公开(公告)日：2011-08-18
申请号：US13024430
申请日：2011-02-10
CPC分类号： G03F7/3021
摘要： There is provided a developing apparatus and a developing method capable of rapidly forming a liquid film of a developing solution on an entire surface of a substrate while reducing a usage amount of the developing solution. The developing apparatus includes an airtightly sealed processing vessel that forms a processing atmosphere therein; a temperature control plate that is provided within the processing vessel and mounts the substrate thereon; an atmosphere gas supply unit that supplies an atmosphere gas including mist and vapor of a developing solution onto a surface of the substrate within the processing vessel; and a first temperature control unit that controls the temperature control plate to a temperature allowing the atmosphere gas to be condensed on the substrate. Here, an inner wall of the processing vessel is maintained at a temperature at which the atmosphere gas is hardly condensed on the inner wall.
摘要翻译： 提供了一种能够在减少显影液的使用量的同时在基板的整个表面上快速形成显影液的液膜的显影装置和显影方法。 显影装置包括在其中形成处理气氛的气密密封处理容器; 温度控制板，设置在处理容器内并将基板安装在其上; 气氛气体供给单元，其将包含显影液的雾和气体的气氛气体供给到所述处理容器内的所述基板的表面上; 以及第一温度控制单元，其将温度控制板控制为允许气氛气体在基板上冷凝的温度。 这里，处理容器的内壁保持在气氛气体几乎不凝结在内壁上的温度。
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公开(公告)号：US20100216078A1
公开(公告)日：2010-08-26
申请号：US12710510
申请日：2010-02-23
申请人： Taro YAMAMOTO , Kousuke Yoshihara , Yuichi Yoshida
发明人： Taro YAMAMOTO , Kousuke Yoshihara , Yuichi Yoshida
IPC分类号： G03C7/407
CPC分类号： H01L21/027 , G03F7/3021 , H01L21/67051 , H01L21/6715
摘要： Disclosed is a developing method that develops a substrate, which has a surface coated with a resist having been exposed, while the substrate is held horizontally and is rotating about a vertical axis. The method includes supplying a developing liquid from a discharge port of a developer nozzle onto the surface of the substrate, while moving the developer nozzle, disposed above the substrate, from a central portion of the substrate toward a peripheral portion of the substrate, and supplying a first rinse liquid from a discharge port of a first rinse nozzle onto the surface of the substrate, while moving the first rinse nozzle, disposed above the substrate, from the central portion of the substrate toward the peripheral portion of the substrate. The supplying of the developing liquid and the supplying the first rinse liquid are performed concurrently, while the first rinse nozzle is maintained nearer to a center of the substrate than the developer nozzle.
摘要翻译： 公开了一种显影方法，其显影方法是在基板被水平地保持并且围绕垂直轴线旋转的同时，使具有被曝光的抗蚀剂的表面被覆的基板。 该方法包括将显影剂喷嘴的排出口的显影液从衬底的中心部分朝向衬底的周边部分移动，将显影剂喷嘴的显影剂供给到衬底的表面上， 将第一冲洗喷嘴的第一冲洗液从第一冲洗喷嘴的排出口喷射到基板的表面上，同时将基板上方的第一冲洗喷嘴从基板的中心部朝向基板的周边部分移动。 同时进行显影液的供给和供给第一冲洗液，同时第一冲洗喷嘴比显影剂喷嘴更靠近基板的中心。
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15.发明授权Substrate treatment method, computer storage medium and substrate treatment apparatus 有权基板处理方法，计算机存储介质和基板处理装置公开(公告)号：US08469614B2
公开(公告)日：2013-06-25
申请号：US13280409
申请日：2011-10-25
申请人： Hirofumi Takeguchi , Yuichi Yoshida
发明人： Hirofumi Takeguchi , Yuichi Yoshida
IPC分类号： G03D5/00
CPC分类号： H01L21/67051 , G03F7/3021 , G03F7/38 , H01L21/6715
摘要： The present disclosure is a substrate treatment method of supplying a surface treatment liquid onto a surface of a substrate having a film with high water repellency formed thereon, the method including: a liquid puddle forming step of forming a liquid puddle of the surface treatment liquid by supplying the surface treatment liquid from a nozzle to one location of a peripheral portion of the substrate; and a liquid puddle moving step of then moving the liquid puddle formed at the peripheral portion of the substrate to a central portion of the substrate by moving the nozzle from a position above the peripheral portion of the substrate to a position above the central portion of the substrate while continuing the supply of the surface treatment liquid.
摘要翻译： 本公开是一种将表面处理液体供给到具有形成在其上形成有高斥水性的膜的基板的表面上的基板处理方法，该方法包括：液体水坑形成步骤，通过以下方式形成表面处理液体的液体熔池： 将所述表面处理液体从喷嘴供给到所述基板的周边部分的一个位置; 以及液体搅拌移动步骤，然后通过将所述喷嘴从所述基板的周边部分上方的位置移动到所述基板的中心部分上方的位置，将形成在所述基板的周边部分处的所述液体熔池移动到所述基板的中心部分 同时继续供应表面处理液体。
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公开(公告)号：US08947476B2
公开(公告)日：2015-02-03
申请号：US13520243
申请日：2011-01-06
申请人： Yuichi Yoshida , Kazunari Tomizawa , Tomohiko Mori
发明人： Yuichi Yoshida , Kazunari Tomizawa , Tomohiko Mori
CPC分类号： G09G3/3648 , G02F2201/52 , G09G3/2074 , G09G5/026 , G09G2300/0452 , G09G2320/0242 , G09G2320/0666 , G09G2340/06
摘要： A liquid crystal display device includes a liquid crystal display panel and a driving circuit that supplies display signals to a plurality of subpixels of the liquid crystal display panel. The plurality of subpixels are a red subpixel, a green subpixel, a blue subpixel, and a yellow subpixel. When achromatic colors of at least some gray levels among all gray levels are to be displayed by the pixel, display signals which are supplied to a first subpixel group composed of certain two subpixels are display signals of the same grayscale level, whereas display signals which are supplied to a second subpixel group composed of the other two subpixels are display signals of a different grayscale level from the grayscale level of the display signals supplied to the first subpixel group. The first subpixel group includes the yellow subpixel, and the second subpixel group includes the blue subpixel.
摘要翻译： 液晶显示装置包括液晶显示面板和向液晶显示面板的多个子像素提供显示信号的驱动电路。 多个子像素是红色子像素，绿色子像素，蓝色子像素和黄色子像素。 当由像素显示所有灰度级中的至少一些灰度级的无彩色时，提供给由特定两个子像素构成的第一子像素组的显示信号是相同灰度级的显示信号，而显示信号 提供给由其他两个子像素构成的第二子像素组是从提供给第一子像素组的显示信号的灰度级别的不同灰度级的显示信号。 第一子像素组包括黄色子像素，第二子像素组包括蓝色子像素。
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公开(公告)号：US20140253422A1
公开(公告)日：2014-09-11
申请号：US14241766
申请日：2012-08-28
IPC分类号： G09G3/36
CPC分类号： G09G3/3607 , G02F1/133514 , G09G2320/0242 , G09G2320/028 , G09G2340/06 , G09G2360/16
摘要： This liquid crystal display device (100) includes a pixel defined by a plurality of subpixels that includes red, green, blue and yellow subpixels (R, G, B, Ye). As long as the sum of respective luminances of all of the subpixels but the blue subpixel (B) falls within the range of 0% to 50% while the color displayed by the pixel is changing from the color blue in which the blue subpixel (B) is at the highest grayscale level and the other subpixels are at the lowest grayscale level into the color white in which all of those subpixels are at the highest grayscale level substantially without changing its hue, the yellow subpixel (Ye) starts to increase its grayscale level at a different timing, and/or has its grayscale level increased at a different ratio with respect to an increase in the pixel's luminance, from the red and green subpixels (R, G) do.
摘要翻译： 该液晶显示装置（100）包括由包括红色，绿色，蓝色和黄色子像素（R，G，B，Ye）的多个子像素限定的像素。 只要所有子像素而蓝色子像素（B）的各亮度的和落在0％〜50％的范围内，而由像素显示的颜色从蓝色子像素（B ）处于最高灰度级，其他子像素处于最低灰度级，进入白色，其中所有这些子像素基本上处于最高灰度级，而不改变其色调，黄色子像素（Ye）开始增加其灰度 在与红色和绿色子像素（R，G）do相对于像素亮度增加的不同比例增加和/或其灰度等级增加。
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公开(公告)号：US20140118423A1
公开(公告)日：2014-05-01
申请号：US14128643
申请日：2012-06-22
IPC分类号： G09G3/20
CPC分类号： G09G3/2074 , G09G3/2003 , G09G3/3607 , G09G2320/0247 , G09G2320/0276 , G09G2320/028 , G09G2360/16
摘要： Viewing angle characteristics on the entire display surface are improved while suppressing harmful effects such as flicker and banding caused by viewing angle improvement control. A liquid crystal display apparatus (1) includes: a liquid crystal panel (11) which includes a plurality of pixels arranged in a matrix; a drive control unit (24) which performs viewing angle improvement processing by converting a gradation of a video signal input to the pixel; and a processing object determination unit (22) which determines whether or not an image displayed on each of the pixels of the liquid crystal panel (11) is an image having an intermediate color. The drive control unit (24) is configured to perform the viewing angle improvement processing on the pixel determined by the processing object determination unit (22) such that the pixel displays the image having the intermediate color.
摘要翻译： 改善了整个显示面上的视角特性，同时抑制由视角改善控制引起的闪烁和带状等有害影响。 液晶显示装置（1）包括：液晶面板（11），包括以矩阵排列的多个像素; 驱动控制单元（24），其通过转换输入到像素的视频信号的灰度来执行视角改善处理; 以及处理对象确定单元（22），其确定在液晶面板（11）的每个像素上显示的图像是否是具有中间颜色的图像。 驱动控制单元（24）被配置为对由处理对象确定单元（22）确定的像素执行视角改善处理，使得像素显示具有中间颜色的图像。
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19.发明授权Method of adjusting fuel distribution, membrane which adjusts fuel distribution, method of producing membrane which adjusts fuel distribution, fuel cell, and method of producing fuel cell 失效调整燃料分配的方法，调整燃料分配的膜，调节燃料分配的膜的制造方法，燃料电池及燃料电池的制造方法公开(公告)号：US08354200B2
公开(公告)日：2013-01-15
申请号：US11859240
申请日：2007-09-21
CPC分类号： H01M8/04007 , H01M8/0289 , H01M8/04186 , H01M8/1011 , H01M8/1065 , Y02E60/523 , Y02P70/56
摘要： A method of adjusting a fuel distribution includes: adjusting a distribution of a fuel supply amount to a membrane electrode assembly so that a temperature distribution in the membrane electrode assembly becomes substantially uniform by a membrane provided in a fuel supply side of the membrane electrode assembly of a fuel cell. A membrane adjusts a fuel distribution, which is provided in a fuel supply side of a membrane electrode assembly of a fuel cell. The membrane is provided with openings so that a temperature distribution in the membrane electrode assembly becomes substantially uniform.
摘要翻译： 调节燃料分配的方法包括：调节与膜电极组件的燃料供给量的分布，使得膜电极组件中的温度分布通过设置在膜电极组件的燃料供给侧的膜变得基本均匀 燃料电池 膜调节燃料分布，其设置在燃料电池的膜电极组件的燃料供给侧。 膜具有开口，使得膜电极组件中的温度分布变得基本均匀。
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20.发明授权公开(公告)号：US08102512B2
公开(公告)日：2012-01-24
申请号：US11575392
申请日：2005-09-16
申请人： Makoto Shibuta , Yuichi Yoshida , Hiroaki Takaiwa
发明人： Makoto Shibuta , Yuichi Yoshida , Hiroaki Takaiwa
CPC分类号： G03F7/70341 , G03F7/707 , H01L21/6715 , H01L21/6838 , H01L21/68735 , H01L21/6875 , Y10T29/49002
摘要： To provide a substrate holding apparatus which can prevent a liquid from entering into a rear surface side of a substrate. A substrate holding apparatus (PH) is provided with a base material (PHB), a first holding portion (PH1) formed on the base material (PHB) for holding the substrate (P), and a second holding portion (PH2) formed on the base material (PHB) for holding a plate member (T) by surrounding the circumference of a processing substrate (P) held by the first holding portion (PH1). The second holding portion (PH2) holds the plate member (T) so as to form a second space (32) on the side of the rear surface (Tb) of the plate member (T). On the rear surface (Tb) of the plate member (T), an absorbing member (100) is arranged for absorbing the liquid (LQ) entered from a gap (A) between the substrate (P) held by the first holding portion (PH1) and the plate member (T) held by the second holding portion (PH2).
摘要翻译： 提供一种能够防止液体进入基板的背面侧的基板保持装置。 基板保持装置（PH）设置有基材（PHB），形成在用于保持基板（P）的基材（PHB）上的第一保持部分（PH1），以及形成在第一保持部分 用于通过围绕由第一保持部分（PH1）保持的处理衬底（P）的周围来保持板构件（T）的基底材料（PHB）。 第二保持部（PH2）保持板构件（T），以在板构件（T）的后表面（Tb）侧形成第二空间（32）。 在板状构件（T）的后表面（Tb）上设置吸收构件（100），用于吸收从由第一保持部（T）保持的基板（P）之间的间隙（A）进入的液体（LQ） PH1）和由第二保持部（PH2）保持的板构件（T）。
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