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11.
公开(公告)号:US20110217469A1
公开(公告)日:2011-09-08
申请号:US12973736
申请日:2010-12-20
申请人: Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
发明人: Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
IPC分类号: H01L21/677 , H01L21/673 , B05D3/04 , C23C16/44
CPC分类号: B05D3/04 , C23C16/44 , H01L21/673 , H01L21/677
摘要: In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.
摘要翻译: 根据本文描述的一些实施例,提供了用于转移衬底的方法。 该方法包括将一个或多个基底装载到一个或多个移动室的相应移动室中。 移动室可在与两个或更多个处理模块相邻定位的第一轨上移动。 每个移动室被构造成维持指定的气体状态。 相应的移动室沿着第一轨道移动。 相应的移动室被对接到两个或更多个处理模块的相应处理模块。 一个或多个基板中的至少一个从相应的移动室传送到相应的处理模块。
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12.
公开(公告)号:US07897525B2
公开(公告)日:2011-03-01
申请号:US12319231
申请日:2008-12-31
申请人: Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
发明人: Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
IPC分类号: H01L21/00
CPC分类号: H01L21/67173 , H01L21/6719 , H01L21/67706 , H01L21/67712 , H01L21/67727 , H01L21/67736 , H01L21/67748 , Y10S414/135
摘要: In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.
摘要翻译: 根据本文描述的一些实施例,提供了一种用于将衬底转移到两个或更多个工艺模块的方法,包括将至少一个衬底加载到一个或多个移动横向室中,所述移动横向室承载在邻近 两个或更多个处理模块,并且其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 一个或多个驱动系统被致动以沿着轨道推进一个或多个移动横向室中的至少一个。 所述至少一个移动传送室与所述处理模块中的至少一个对接,并且所述基板从所述移动横向室传送到所述至少一个处理模块。
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