公开(公告)号：US07012939B2

公开(公告)日：2006-03-14

申请号：US10648238

申请日：2003-08-27

申请人： Kwang Seong Choi ,  Heung Woo Park ,  Ho Gyeong Yun ,  Byung Seok Choi ,  Yong Sung Eom ,  Jong Hyun Lee ,  Jong Tae Moon

发明人： Kwang Seong Choi ,  Heung Woo Park ,  Ho Gyeong Yun ,  Byung Seok Choi ,  Yong Sung Eom ,  Jong Hyun Lee ,  Jong Tae Moon

IPC分类号： H01S3/13 ,  G01B9/02

CPC分类号： H04B10/572

摘要： A wavelength stabilization module having a light-receiving element array and a method of manufacturing the same are disclosed. The wavelength stabilization module having a laser diode which irradiates a laser beam at the front side and the rear side thereof comprises a collimator for paralleling the laser beam irradiated at the rear side; a beam splitter for splitting the laser beam passed through the collimator into the two directional laser beams; a light-receiving element for receiving one of the split laser beams; a filter for transmitting a specific wavelength of the other of the split laser beams; a light-receiving element array for receiving the laser beam passed through the filter; and a controller for controlling the output wavelength of the laser diode by using the signals output from the light-receiving element and the light-receiving element array, and the filter and the light-receiving element array are tilted at a predetermined angle with respect to the laser beam and lock the wavelength by using an incident angle dependency of the laser beam passed through the filter.

摘要翻译： 公开了具有光接收元件阵列的波长稳定模块及其制造方法。 具有在其前侧和后侧照射激光束的激光二极管的波长稳定模块包括用于与在后侧照射的激光束并联的准直器; 用于将穿过准直器的激光束分成两个定向激光束的分束器; 用于接收所述分离激光束中的一个的光接收元件; 用于传输另一个分离激光束的特定波长的滤波器; 用于接收通过过滤器的激光束的光接收元件阵列; 以及控制器，用于通过使用从光接收元件和光接收元件阵列输出的信号来控制激光二极管的输出波长，并且滤光器和光接收元件阵列相对于 激光束并通过使用通过过滤器的激光束的入射角依赖性来锁定波长。

公开(公告)号：US08973230B2

公开(公告)日：2015-03-10

申请号：US13178162

申请日：2011-07-07

申请人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

发明人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

IPC分类号： H04R17/00 ,  H01L41/257

CPC分类号： H01L41/257 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49007

摘要： Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

摘要翻译： 本文公开了一种制造惯性传感器的方法，该惯性传感器使用在封装压电元件之后执行轮询的压电元件的轮询方法，制造惯性传感器的方法包括：在柔性基板上形成驱动电极和感测电极， 沉积压电材料; 电连接驱动电极和感测电极; 包装柔性基材; 通过向驱动电极和感测电极施加电压和热量来轮询; 以及通过向驱动电极和感测电极施加热量来使驱动电极与感测电极分离。

公开(公告)号：US08701489B2

公开(公告)日：2014-04-22

申请号：US13213948

申请日：2011-08-19

申请人： Jong Woon Kim ,  Jung Won Lee ,  Seung Hun Han ,  Won Kyu Jeung ,  Yun Sung Kang ,  Heung Woo Park

发明人： Jong Woon Kim ,  Jung Won Lee ,  Seung Hun Han ,  Won Kyu Jeung ,  Yun Sung Kang ,  Heung Woo Park

IPC分类号： G01P15/08 ,  G01P1/02

CPC分类号： G01C19/56

摘要： Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

摘要翻译： 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110，设置在膜110的中心部分111下方并包括集成电路的质量体130，以及设置有柱140 在膜110的边缘112下方围绕质量体130，从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积，以实现薄而小的惯性传感器100。

公开(公告)号：US08607638B2

公开(公告)日：2013-12-17

申请号：US13324918

申请日：2011-12-13

申请人： Won Kyu Jeung ,  Jong Woon Kim ,  Heung Woo Park

发明人： Won Kyu Jeung ,  Jong Woon Kim ,  Heung Woo Park

IPC分类号： G01L9/16 ,  H01L29/84

CPC分类号： G01C19/56 ,  G01L9/0047 ,  G01L9/0048 ,  G01P15/08 ,  G01P15/14 ,  G01P2015/084 ,  G01P2015/0871 ,  H03B5/30 ,  H03H9/2405

摘要： Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.

摘要翻译： 这里公开了一种MEMS部件。 根据本发明的示例性实施例的MEMS部件包括：板状膜110; 设置在膜110的边缘115下方的柱130; 止挡件140，其设置在膜110的下方并且比柱130更靠内侧设置，以便在止动件140和柱130之间形成空间143; 以及设置在柱130下方以覆盖柱130的盖150，由此可以通过使用设置在空间上方的膜110的预定区域145来中断来自外部环境的发生的干扰或噪声的影响或来自周围的传感器的干扰的影响 143。

公开(公告)号：US20130074598A1

公开(公告)日：2013-03-28

申请号：US13325177

申请日：2011-12-14

申请人： Heung Woo Park ,  Min Kyu Choi

发明人： Heung Woo Park ,  Min Kyu Choi

IPC分类号： G01P15/08

CPC分类号： G01P1/023 ,  G01C19/5783 ,  G01P15/09

摘要： Disclosed herein is an inertial sensor including: a sensor part including a driving body, a flexible substrate part displaceably supporting the driving body, a support part supporting the flexible substrate part so that the driving body is freely movable in a state in which it is floated, and a lower cap covering a lower portion of the driving body and coupled to the support part; an application specific integrated circuit (ASIC) including the sensor part stacked thereon and coupled thereto; a printed circuit board including the ASIC stacked thereon and coupled thereto and electrically connected to the sensor part and the ASIC by a wire; and a cap covering the sensor part and the ASIC and coupled to the printed circuit board, wherein the cap includes an air discharging hole formed in order to discharge internal air to the outside.

摘要翻译： 这里公开了一种惯性传感器，包括：传感器部分，包括驱动体，可移动地支撑驱动体的柔性基板部分，支撑柔性基板部分的支撑部分，使得驱动体在浮动状态下自由移动 以及覆盖所述驱动体的下部并且联接到所述支撑部的下盖; 专用集成电路（ASIC），其包括堆叠在其上并耦合到其上的传感器部分; 印刷电路板，包括堆叠在其上并与之耦合的ASIC，并通过电线电连接到传感器部分和ASIC; 以及盖，其覆盖所述传感器部分和所述ASIC并且耦合到所述印刷电路板，其中所述盖包括形成为将内部空气排出到外部的空气排出孔。

公开(公告)号：US20130019679A1

公开(公告)日：2013-01-24

申请号：US13303334

申请日：2011-11-23

申请人： Jong Woon Kim ,  Heung Woo Park ,  Won Kyu Jeung

发明人： Jong Woon Kim ,  Heung Woo Park ,  Won Kyu Jeung

IPC分类号： G01C19/56

CPC分类号： G01P15/08 ,  G01C19/5747 ,  G01P15/18

摘要： Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.

摘要翻译： 本文公开了一种惯性传感器，包括：可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极，其在预定方向上检测作用在所述驱动部件上的力，其中所述驱动部件包括：位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块，并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块，侧驱动块和支撑件彼此连接的连接桥。

公开(公告)号：US20120159754A1

公开(公告)日：2012-06-28

申请号：US13178162

申请日：2011-07-07

申请人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

发明人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

IPC分类号： H01L41/22

CPC分类号： H01L41/257 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49007

摘要： Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

摘要翻译： 本文公开了一种制造惯性传感器的方法，该惯性传感器使用在封装压电元件之后执行轮询的压电元件的轮询方法，制造惯性传感器的方法包括：在柔性基板上形成驱动电极和感测电极， 沉积压电材料; 电连接驱动电极和感测电极; 包装柔性基材; 通过向驱动电极和感测电极施加电压和热量来轮询; 以及通过向驱动电极和感测电极施加热量来使驱动电极与感测电极分离。

公开(公告)号：US20130036818A1

公开(公告)日：2013-02-14

申请号：US13275397

申请日：2011-10-18

申请人： Jong Woon Kim ,  Sung Jun Lee ,  Won Kyu Jeung ,  Min Kyu Choi ,  Heung Woo Park

发明人： Jong Woon Kim ,  Sung Jun Lee ,  Won Kyu Jeung ,  Min Kyu Choi ,  Heung Woo Park

IPC分类号： G01C19/00 ,  C23F1/00 ,  B29C65/48

CPC分类号： G01C25/00 ,  B32B37/0076 ,  B32B37/02 ,  B32B37/12 ,  B32B37/18 ,  B32B38/10 ,  B32B2457/00 ,  C23F1/02 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/135 ,  G01P2015/084 ,  Y10T156/1064

摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

公开(公告)号：US20120152020A1

公开(公告)日：2012-06-21

申请号：US13165436

申请日：2011-06-21

申请人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

发明人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC分类号： G01P15/125 ,  G01P15/09 ,  G01P15/12 ,  G01P15/00

CPC分类号： G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

摘要： Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.

摘要翻译： 这里公开了惯性传感器。 设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

公开(公告)号：US09052333B2

公开(公告)日：2015-06-09

申请号：US13592198

申请日：2012-08-22

申请人： Jung Tae Park ,  Seung Heon Han ,  Jong Woon Kim ,  Heung Woo Park ,  Jung Won Lee ,  Jung Eun Noh ,  Won Kyu Jeung ,  Sung Jun Lee

发明人： Jung Tae Park ,  Seung Heon Han ,  Jong Woon Kim ,  Heung Woo Park ,  Jung Won Lee ,  Jung Eun Noh ,  Won Kyu Jeung ,  Sung Jun Lee

IPC分类号： G01P15/11 ,  G01P15/08 ,  G01P15/12 ,  G01C19/56 ,  G01P15/09 ,  G01P15/097

CPC分类号： G01P15/12 ,  G01C19/56 ,  G01P15/09 ,  G01P15/097 ,  G01P2015/084

摘要： Disclosed herein is an inertial sensor including: a membrane; a mass body provided under the membrane; a plurality of patterned magnets provided under the mass body; and a magnetoresistive element provided to be spaced apart from the mass body and measuring static DC acceleration acting on the mass body through resistance changed according to magnetic fields of the plurality of patterned magnets. The plurality of patterned magnets and the magnetoresistive element are included, thereby making it possible to measure static DC acceleration (particularly, gravity acceleration) that is difficult to measure using an existing to piezoelectric element.

摘要翻译： 本文公开了一种惯性传感器，包括：膜; 设置在膜下面的质量体; 设置在所述质量体下方的多个图案化磁体; 以及设置成与质量体间隔开的磁阻元件，并且通过根据多个图案化磁体的磁场而改变的电阻测量作用在质量体上的静态直流加速度。 包括多个图案化磁体和磁阻元件，从而可以测量使用现有的压电元件难以测量的静态直流加速度（特别是重力加速度）。