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    INERTIAL SENSOR
    1.
    发明申请
    INERTIAL SENSOR 审中-公开
    惯性传感器

    公开(公告)号：US20130081464A1

    公开(公告)日：2013-04-04

    申请号：US13324879

    申请日：2011-12-13

    申请人： Heung Woo Park ,  Min Kyu Choi ,  Jong Woon Kim ,  Sung Jun Lee

    发明人： Heung Woo Park ,  Min Kyu Choi ,  Jong Woon Kim ,  Sung Jun Lee

    IPC分类号： G01C19/56

    CPC分类号： G01P15/0802 ,  B81B3/0051 ,  B81B2201/0235 ,  G01C19/5783 ,  G01P2015/0871

    摘要： Disclosed herein is an inertial sensor. The inertial sensor includes a sensor part including a driving mass, a flexible substrate part displaceably supporting the driving mass, and a support part supporting the flexible substrate part so that the driving mass is freely movable in a state in which the driving mass is floated; a lower cap covering a lower portion of the driving mass and coupled with the support part and provided with a stopper part limiting a displacement of the driving mass; and a dry film resist coupling the sensor part with the cover and providing an interval between the driving mass and the stopper.

    摘要翻译： 这里公开了惯性传感器。 惯性传感器包括传感器部件，其包括驱动质量块，可移动地支撑驱动质量块的柔性基板部分和支撑柔性基板部分的支撑部件，使得驱动质量块在驱动质量块浮起的状态下可自由移动; 下盖覆盖驱动质量块的下部并与支撑部分联接并设置有限制驱动质量块的位移的止动部分; 以及将传感器部分与盖接合并且提供驱动质量块和止动件之间的间隔的干膜。

    INERTIAL SENSOR
    3.
    发明申请
    INERTIAL SENSOR 审中-公开
    惯性传感器

    公开(公告)号：US20130074598A1

    公开(公告)日：2013-03-28

    申请号：US13325177

    申请日：2011-12-14

    申请人： Heung Woo Park ,  Min Kyu Choi

    发明人： Heung Woo Park ,  Min Kyu Choi

    IPC分类号： G01P15/08

    CPC分类号： G01P1/023 ,  G01C19/5783 ,  G01P15/09

    摘要： Disclosed herein is an inertial sensor including: a sensor part including a driving body, a flexible substrate part displaceably supporting the driving body, a support part supporting the flexible substrate part so that the driving body is freely movable in a state in which it is floated, and a lower cap covering a lower portion of the driving body and coupled to the support part; an application specific integrated circuit (ASIC) including the sensor part stacked thereon and coupled thereto; a printed circuit board including the ASIC stacked thereon and coupled thereto and electrically connected to the sensor part and the ASIC by a wire; and a cap covering the sensor part and the ASIC and coupled to the printed circuit board, wherein the cap includes an air discharging hole formed in order to discharge internal air to the outside.

    摘要翻译： 这里公开了一种惯性传感器，包括：传感器部分，包括驱动体，可移动地支撑驱动体的柔性基板部分，支撑柔性基板部分的支撑部分，使得驱动体在浮动状态下自由移动 以及覆盖所述驱动体的下部并且联接到所述支撑部的下盖; 专用集成电路（ASIC），其包括堆叠在其上并耦合到其上的传感器部分; 印刷电路板，包括堆叠在其上并与之耦合的ASIC，并通过电线电连接到传感器部分和ASIC; 以及盖，其覆盖所述传感器部分和所述ASIC并且耦合到所述印刷电路板，其中所述盖包括形成为将内部空气排出到外部的空气排出孔。

    INERTIAL SENSOR
    5.
    发明申请
    INERTIAL SENSOR 审中-公开
    惯性传感器

    公开(公告)号：US20120125096A1

    公开(公告)日：2012-05-24

    申请号：US13283517

    申请日：2011-10-27

    申请人： Heung Woo Park ,  Won Kyu Jeung ,  Hyun Kee Lee ,  Si Joong Yang

    发明人： Heung Woo Park ,  Won Kyu Jeung ,  Hyun Kee Lee ,  Si Joong Yang

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5783

    摘要： Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values.

    摘要翻译： 本文公开了一种惯性传感器，其包括感测单元，该感测单元包括安装成在柔性基板部件上移位的质量，移动该质量块的驱动单元和检测该质量块的位移的位移检测单元，该惯性传感器包括：顶部 帽盖覆盖柔性基板部分的顶部; 以及覆盖该质量块底部的底盖。 因此，惯性传感器可以以经济的EMC成型包装形式实现，同时保护质量和压电元件。 此外，惯性传感器优化覆盖质量块和压电元件的盖的厚度以及质量块和压电元件之间的间隔，以提高空间利用设计的自由度以及改善的驱动特性和Q值 。

    Inertial sensor and angular velocity detection method using the same
    6.
    发明授权
    Inertial sensor and angular velocity detection method using the same 有权
    惯性传感器和角速度检测方法使用相同

    公开(公告)号：US08789417B2

    公开(公告)日：2014-07-29

    申请号：US13303334

    申请日：2011-11-23

    申请人： Jong Woon Kim ,  Heung Woo Park ,  Won Kyu Jeung

    发明人： Jong Woon Kim ,  Heung Woo Park ,  Won Kyu Jeung

    IPC分类号： G01C19/56

    CPC分类号： G01P15/08 ,  G01C19/5747 ,  G01P15/18

    摘要： Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.

    摘要翻译： 本文公开了一种惯性传感器，包括：可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极，其在预定方向上检测作用在所述驱动部件上的力，其中所述驱动部件包括：位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块，并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块，侧驱动块和支撑件彼此连接的连接桥。

    Wavelength stabilization module having light-receiving element array and method of manufacturing the same
    7.
    发明授权
    Wavelength stabilization module having light-receiving element array and method of manufacturing the same 失效
    具有光接收元件阵列的波长稳定模块及其制造方法

    公开(公告)号：US07012939B2

    公开(公告)日：2006-03-14

    申请号：US10648238

    申请日：2003-08-27

    申请人： Kwang Seong Choi ,  Heung Woo Park ,  Ho Gyeong Yun ,  Byung Seok Choi ,  Yong Sung Eom ,  Jong Hyun Lee ,  Jong Tae Moon

    发明人： Kwang Seong Choi ,  Heung Woo Park ,  Ho Gyeong Yun ,  Byung Seok Choi ,  Yong Sung Eom ,  Jong Hyun Lee ,  Jong Tae Moon

    IPC分类号： H01S3/13 ,  G01B9/02

    CPC分类号： H04B10/572

    摘要： A wavelength stabilization module having a light-receiving element array and a method of manufacturing the same are disclosed. The wavelength stabilization module having a laser diode which irradiates a laser beam at the front side and the rear side thereof comprises a collimator for paralleling the laser beam irradiated at the rear side; a beam splitter for splitting the laser beam passed through the collimator into the two directional laser beams; a light-receiving element for receiving one of the split laser beams; a filter for transmitting a specific wavelength of the other of the split laser beams; a light-receiving element array for receiving the laser beam passed through the filter; and a controller for controlling the output wavelength of the laser diode by using the signals output from the light-receiving element and the light-receiving element array, and the filter and the light-receiving element array are tilted at a predetermined angle with respect to the laser beam and lock the wavelength by using an incident angle dependency of the laser beam passed through the filter.

    摘要翻译： 公开了具有光接收元件阵列的波长稳定模块及其制造方法。 具有在其前侧和后侧照射激光束的激光二极管的波长稳定模块包括用于与在后侧照射的激光束并联的准直器; 用于将穿过准直器的激光束分成两个定向激光束的分束器; 用于接收所述分离激光束中的一个的光接收元件; 用于传输另一个分离激光束的特定波长的滤波器; 用于接收通过过滤器的激光束的光接收元件阵列; 以及控制器，用于通过使用从光接收元件和光接收元件阵列输出的信号来控制激光二极管的输出波长，并且滤光器和光接收元件阵列相对于 激光束并通过使用通过过滤器的激光束的入射角依赖性来锁定波长。

    Polling method of piezoelectric element and method of manufacturing inertial sensor
    8.
    发明授权
    Polling method of piezoelectric element and method of manufacturing inertial sensor 有权
    压电元件的轮询方法和制造惯性传感器的方法

    公开(公告)号：US08973230B2

    公开(公告)日：2015-03-10

    申请号：US13178162

    申请日：2011-07-07

    申请人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

    发明人： Heung Woo Park ,  Seung Hun Han ,  Jung Won Lee

    IPC分类号： H04R17/00 ,  H01L41/257

    CPC分类号： H01L41/257 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49007

    摘要： Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

    摘要翻译： 本文公开了一种制造惯性传感器的方法，该惯性传感器使用在封装压电元件之后执行轮询的压电元件的轮询方法，制造惯性传感器的方法包括：在柔性基板上形成驱动电极和感测电极， 沉积压电材料; 电连接驱动电极和感测电极; 包装柔性基材; 通过向驱动电极和感测电极施加电压和热量来轮询; 以及通过向驱动电极和感测电极施加热量来使驱动电极与感测电极分离。

    Inertial sensor
    9.
    发明授权
    Inertial sensor 失效
    惯性传感器

    公开(公告)号：US08701489B2

    公开(公告)日：2014-04-22

    申请号：US13213948

    申请日：2011-08-19

    申请人： Jong Woon Kim ,  Jung Won Lee ,  Seung Hun Han ,  Won Kyu Jeung ,  Yun Sung Kang ,  Heung Woo Park

    发明人： Jong Woon Kim ,  Jung Won Lee ,  Seung Hun Han ,  Won Kyu Jeung ,  Yun Sung Kang ,  Heung Woo Park

    IPC分类号： G01P15/08 ,  G01P1/02

    CPC分类号： G01C19/56

    摘要： Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

    摘要翻译： 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110，设置在膜110的中心部分111下方并包括集成电路的质量体130，以及设置有柱140 在膜110的边缘112下方围绕质量体130，从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积，以实现薄而小的惯性传感器100。

    Micro electro mechanical systems component
    10.
    发明授权
    Micro electro mechanical systems component 有权
    微机电系统组件

    公开(公告)号：US08607638B2

    公开(公告)日：2013-12-17

    申请号：US13324918

    申请日：2011-12-13

    申请人： Won Kyu Jeung ,  Jong Woon Kim ,  Heung Woo Park

    发明人： Won Kyu Jeung ,  Jong Woon Kim ,  Heung Woo Park

    IPC分类号： G01L9/16 ,  H01L29/84

    CPC分类号： G01C19/56 ,  G01L9/0047 ,  G01L9/0048 ,  G01P15/08 ,  G01P15/14 ,  G01P2015/084 ,  G01P2015/0871 ,  H03B5/30 ,  H03H9/2405

    摘要： Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.

    摘要翻译： 这里公开了一种MEMS部件。 根据本发明的示例性实施例的MEMS部件包括：板状膜110; 设置在膜110的边缘115下方的柱130; 止挡件140，其设置在膜110的下方并且比柱130更靠内侧设置，以便在止动件140和柱130之间形成空间143; 以及设置在柱130下方以覆盖柱130的盖150，由此可以通过使用设置在空间上方的膜110的预定区域145来中断来自外部环境的发生的干扰或噪声的影响或来自周围的传感器的干扰的影响 143。