公开(公告)号：US20190025341A1

公开(公告)日：2019-01-24

申请号：US16026428

申请日：2018-07-03

Applicant: IMEC vzw

Inventor： Kristof Paredis ,  Umberto Celano ,  Wilfried Vandervorst ,  Oberon Dixon-Luinenburg

IPC: G01Q60/30

Abstract: A method of measuring an electrical characteristic of a current path is disclosed. In one aspect, the method includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source and a logarithmic SSRM amplifier, when a modulation at a predefined frequency is applied to either the contact force of the probe or to the bias voltage, the device comprising electronic circuitry for producing in real time a signal representative of the electrical characteristic, according to the formula lognA=±VSSRM±logn(dV)+Vmultiplier.

公开(公告)号：US20180240642A1

公开(公告)日：2018-08-23

申请号：US15899905

申请日：2018-02-20

Applicant: IMEC VZW

Inventor： Umberto Celano ,  Kristof Paredis ,  Wilfried Vandervorst

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/305 ,  H01J37/304

CPC classification number: H01J37/222 ,  H01J37/20 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/2067 ,  H01J2237/2583 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31747

Abstract: The disclosure is related to a method and apparatus for transmission electron microscopy wherein a TEM specimen is subjected to at least one thinning step by scratching at least an area of the specimen with an SPM probe, and wherein the thinned area is subjected to an SPM acquisition step, using the same SPM probe or another probe.