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公开(公告)号：US5011794A
公开(公告)日：1991-04-30
申请号：US345923
申请日：1989-05-01
IPC分类号： H01L21/26 , H01L21/00 , H01L21/265 , H01L21/324
CPC分类号： H01L21/67115 , H01L21/3245 , Y10S148/003 , Y10S148/071
摘要： This invention is directed to the fabrication of semiconductor devices, especially those comprising III-V and II-VI compound semiconductor materials, and involves Rapid Thermal Annealing (RTA) of semiconductor wafers, especially those implanted with a dopant(s). The invention is also concerned with a black-box implement used in combination with the RTA. The process includes enclosing a wafer to be annealed within a "black-box" comprising components of a black body material and subjecting the black box with the wafer therein to an RTA. In a preferred embodiment the RTA comprises (a) a pre-anneal step which includes heating to a temperature and for a period sufficient to preheat the wafer so as to reduce thermal shock due to a main annealing step, (b) the main annealing step being at a temperature and for a period sufficient to remove damage caused to said surface by the dopant implantation and to activate implanted dopant, and (c) a post-anneal step carried out at a temperature and for a period sufficient to relieve stresses which may result from the main-annealing step. The combined use of the RTA and the black box leads to wafers substantially free or slip lines and with reproducibly high mobilities and uniform activation.
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公开(公告)号：US4731293A
公开(公告)日：1988-03-15
申请号：US876442
申请日：1986-06-20
申请人： David T. Ekholm , William H. Grodkiewicz , Bertram Schwartz , Shobha Singh , LeGrand G. Van Uitert , George J. Zydzik
发明人： David T. Ekholm , William H. Grodkiewicz , Bertram Schwartz , Shobha Singh , LeGrand G. Van Uitert , George J. Zydzik
IPC分类号： C23C14/08 , C03B8/04 , C03C3/097 , C23C14/10 , C23C14/24 , C23C14/30 , C23C14/34 , G02B1/10 , H01L21/203 , H01L21/285 , H01L21/316 , B32B17/06
CPC分类号： H01L21/02129 , C03C3/097 , C23C14/10 , G02B1/105 , H01L21/02266
摘要： A fabrication technique is described for making various devices in which a type of glass is used as a surface protection layer. The glass layers are put down by particle bombardment (generally sputtering or e-beam bombardment) of a phosphorus-containing silicate glass target. Devices with such layers are also described. Such glass layers are highly advantageous as encapsulating material, diffusion barrier layers, etc., particularly for optical type devices and certain semiconductor devices. Particularly important is the preparation procedure for the glass target used in the bombardment process. The glass layers are moisture stable, act as excellent barriers against diffusion, and are usable up to quite high temperatures without cracking or peeling. The glass layers also provide long-term protection against atmosphere components including water vapor, oxygen, atmosphere pollution contaminants, etc.
摘要翻译： 描述了一种制造技术，用于制造其中使用一种类型的玻璃作为表面保护层的各种装置。 通过含磷硅酸盐玻璃靶的粒子轰击（通常是溅射或电子束轰击）来放下玻璃层。 还描述了具有这些层的装置。 这样的玻璃层作为封装材料，扩散阻挡层等是非常有利的，特别是对于光学类型器件和某些半导体器件。 特别重要的是用于轰击过程中的玻璃靶的制备方法。 玻璃层是湿气稳定的，作为阻止扩散的优良屏障，并且可以在相当高的温度下使用，而不会开裂或剥落。 玻璃层还可以长期保护大气成分，包括水蒸气，氧气，大气污染物等。
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公开(公告)号：US4297005A
公开(公告)日：1981-10-27
申请号：US51807
申请日：1979-06-25
CPC分类号： G02F1/1521 , G02F1/1533
摘要： Display devices are described which contain, in addition to organic quinones and suitable organic solvent, a solid ionic conductor. Such display devices are advantageous because of exceptional persistence of the display. Thus, an image may be retained without application of electrical energy. In addition, these displays exhibit high optical contrast and low power consumption. Under certain conditions, these devices are non-linear (exhibit sharp thresholds) which permit multiplexing. This is highly advantageous in display device applications.
摘要翻译： 描述了除有机醌和合适的有机溶剂之外还含有固体离子导体的显示装置。 这种显示装置由于显示器的特殊持久性而是有利的。 因此，可以保持图像而不施加电能。 此外，这些显示器具有高的光学对比度和低功耗。 在某些条件下，这些器件是非线性的（表现出尖锐的阈值），允许复用。 这在显示设备应用中是非常有利的。
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公开(公告)号：US4819039A
公开(公告)日：1989-04-04
申请号：US945016
申请日：1986-12-22
IPC分类号： H01L31/10 , C03B19/00 , C03C3/06 , C03C3/064 , C03C3/091 , H01L21/314 , H01L21/316 , H01L31/107 , H01L33/00 , B05D5/12 , H04N9/27
CPC分类号： H01L21/02129 , C03C3/064 , C03C3/091 , H01L21/02145 , H01L21/02161 , H01L21/02266 , H01L21/31625
摘要： Semiconductor devices are described which are made by a process involving the use of certain types of glass layers. These glass layers have high silica content, small amounts of boron oxide and optionally small amounts of aluminum oxide. The glass layers are put down by e-beam deposition procedure using a glass target made from restructured glass. Commercial availability of such glass makes the procedure very convenient. Such glass layers are advantageously used as barrier layers in annealing procedures used when semiconductors are doped (e.g., ion implantation in semiconductors) and as encapsulating layers in finished devices.
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公开(公告)号：US4749255A
公开(公告)日：1988-06-07
申请号：US806492
申请日：1985-12-09
申请人： Utpal K. Chakrabarti , Aland K. Chin , George J. Przybylek , LeGrand G. Van Uitert , George J. Zydzik
发明人： Utpal K. Chakrabarti , Aland K. Chin , George J. Przybylek , LeGrand G. Van Uitert , George J. Zydzik
IPC分类号： H01L31/0264 , C23C14/08 , C23C14/30 , G02B1/11 , H01L21/314 , H01L21/316 , H01L31/04 , H01L33/00 , H01S5/00 , H01S5/028 , G02B1/10
CPC分类号： H01S5/028 , C23C14/083 , C23C14/30 , G02B1/113
摘要： Disclosed is a device including a surface coating for passivation or anti-reflection, and a method of manufacture. The coating comprises ZrO.sub.2 doped with yttrium, magnesium or calcium. The doped ZrO.sub.2 is preferably deposited on the device surface by electron-beam evaporation from a single crystal source of ZrO.sub.2 and Y.sub.2 O.sub.3, MgO or CaO.
摘要翻译： 公开了一种包括用于钝化或抗反射的表面涂层的装置及其制造方法。 该涂层包含掺杂有钇，镁或钙的ZrO 2。 掺杂的ZrO 2优选通过从ZrO 2和Y 2 O 3，MgO或CaO的单晶源的电子束蒸发沉积在器件表面上。
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公开(公告)号：US4407061A
公开(公告)日：1983-10-04
申请号：US270504
申请日：1981-06-04
CPC分类号： C03C3/122 , Y10S148/091 , Y10S148/094
摘要： A fabrication technique is described for making various devices in which a certain type of glass is used as a surface protection layer. The glass layers are formed by particle bombardment (generally sputtering or E-beam) of a glass target. Devices with such surface layers are also described. Such glass layers are highly advantageous as encapsulating layers, diffusion barrier layers, etc., particularly for optical type devices and certain semiconductor devices. Particularly important is the preparation procedure for the glass target used in the bombardment process. The glass layers are moisture stable, act as excellent barriers against diffusion, and are usable up to quite high temperatures (i.e., in diffusion doping procedures) without cracking or peeling. The glass layers also provide long-term protection against atmosphere components including water vapor, oxygen, atmosphere pollution contaminants, etc., and can be removed by standard etching techniques.
摘要翻译： 描述制造技术，用于制造其中使用某种类型的玻璃作为表面保护层的各种装置。 玻璃层通过玻璃靶的粒子轰击（通常是溅射或电子束）形成。 还描述了具有这种表面层的装置。 这种玻璃层作为封装层，扩散阻挡层等是非常有利的，特别是对于光学类型器件和某些半导体器件。 特别重要的是用于轰击过程中的玻璃靶的制备方法。 玻璃层是湿气稳定的，作为阻止扩散的优良屏障，并且可以在不破裂或剥离的情况下可用于相当高的温度（即扩散掺杂方法）。 玻璃层还提供长期保护，防止大气成分，包括水蒸汽，氧气，大气污染污染物等，并可通过标准蚀刻技术去除。
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公开(公告)号：US4240693A
公开(公告)日：1980-12-23
申请号：US973188
申请日：1978-12-26
CPC分类号： G02F1/1506 , G02F1/313
摘要： Electrically activated optical switches, couplers, and modulators are disclosed which can be incorporated in waveguide networks in optical communications systems. Disclosed devices comprise an electroplating medium in combination with a suitable source of an electric field whose strength can be varied to cause transition of the electroplating medium between plated and unplated states. Changes of reflectivity and refractive index are the bases of switching and coupling applications, respectively.
摘要翻译： 公开了电激活的光开关，耦合器和调制器，其可并入光通信系统中的波导网络中。 公开的装置包括电镀介质，其与电场的适当源组合，其强度可以改变以使电镀介质在镀层和未镀层状态之间转变。 反射率和折射率的变化分别是开关和耦合应用的基础。
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公开(公告)号：US4332440A
公开(公告)日：1982-06-01
申请号：US131080
申请日：1980-03-17
CPC分类号： G02F1/1533 , G02F1/1521
摘要： Display devices are described in which certain structural features prevent cross-talk effects between individual display elements. This ensures sharp delineation between individual display elements which promotes high contrast and sharp displays. These structural features are particularly advantageous for multiplexed display systems so as to simplify circuit arrangements and ensure sharp, high-contrast displays.
摘要翻译： 描述了显示装置，其中某些结构特征防止各个显示元件之间的串扰效应。 这确保了各个显示元件之间的尖锐描绘，从而促进高对比度和尖锐的显示。 这些结构特征对于多路复用的显示系统特别有利，以便简化电路布置并确保清晰，高对比度的显示。
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公开(公告)号：US4245883A
公开(公告)日：1981-01-20
申请号：US973162
申请日：1978-12-26
摘要： Electrically activated components such as switches, modulators, attenuators, and mode selectors are disclosed which can be used in networks of waveguides in optical communications systems. Disclosed components comprise an electrochromic medium in combination with a suitable ion source and means for producing a variable electric field across the medium. A change of color in the medium in response to variation of the electric field strength is instrumental in influencing direction and intensity of light propagating in a network.
摘要翻译： 公开了诸如开关，调制器，衰减器和模式选择器的电激活组件，其可以用在光通信系统中的波导网络中。 公开的组分包括与合适的离子源组合的电致变色介质和用于在整个介质上产生可变电场的装置。 响应于电场强度的变化，介质中的颜色变化有助于影响在网络中传播的光的方向和强度。
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公开(公告)号：US4265980A
公开(公告)日：1981-05-05
申请号：US866024
申请日：1977-12-30
CPC分类号： C30B19/02 , C30B29/28 , Y10S117/902 , Y10S428/90
摘要： Magnetic garnet compositions grown from a novel flux comprising a mixture of Li.sub.2 MoO.sub.4 and R.sub.2 (MoO.sub.4).sub.3 wherein R represents yttrium or a rare earth element having an atomic number from 62 to 71 have appropriate magnetic properties for use in bubble domain devices. Items produced are uniform in composition and may be of submicron thickness.
摘要翻译： 从包含Li 2 MoO 4和R 2（MoO 4）3的混合物的新型助熔剂生长的磁性石榴石组合物，其中R表示钇或具有62至71的原子序数的稀土元素具有用于气泡域装置的适当磁性。 产生的产品组成均匀且可能为亚微米厚度。
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