公开(公告)号：US08138556B2

公开(公告)日：2012-03-20

申请号：US12338174

申请日：2008-12-18

申请人： Stéphane Caplet

发明人： Stéphane Caplet

IPC分类号： H01L29/72

CPC分类号： B81C1/00944 ,  B81C2201/019

摘要： A pre-released structure device comprising: at least one first stacking, comprising at least one first layer based on at least one first material, arranged against a second stacking comprising at least one second layer based on at least one second material, at least one closed cavity, formed in the first and/or the second stacking, and arranged between a portion of the first stacking forming the pre-released structure and the second stacking, at least one spacer arranged in the cavity and linking the portion of the first stacking to the second stacking.

摘要翻译： 一种预释放的结构装置，包括：至少一个第一堆叠，包括至少一个基于至少一个第一材料的第一层，该第一层被布置成抵抗第二堆叠，所述第二堆叠包括至少一个基于至少一个第二材料的第二层， 闭合腔，形成在第一和/或第二堆叠中，并且布置在形成预释放结构的第一堆叠的一部分和第二堆叠之间，布置在空腔中的至少一个间隔件，并且将第一堆叠部分 到第二堆叠。

公开(公告)号：US06861719B2

公开(公告)日：2005-03-01

申请号：US10399866

申请日：2001-11-06

申请人： Jean-Louis Ouvrier-Buffet ,  Sylvette Bisotto ,  Stéphane Caplet

发明人： Jean-Louis Ouvrier-Buffet ,  Sylvette Bisotto ,  Stéphane Caplet

IPC分类号： H01L21/60 ,  H01L31/0203 ,  H01L21/00

CPC分类号： H01L31/0203 ,  G01J5/04 ,  G01J5/045 ,  H01L24/18 ,  H01L24/82 ,  H01L2224/16225 ,  H01L2224/18 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01052 ,  H01L2924/01056 ,  H01L2924/01058 ,  H01L2924/01061 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01094 ,  H01L2924/01322 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/30105 ,  H01L2924/3025 ,  H04N5/33 ,  H01L2924/00

摘要： A device for detecting electromagnetic radiation including at least one detection circuit including a non-cooled thermal detector and an associated reading circuit, and a method for producing the device. The device includes a substrate forming a cavity under vacuum, in which are placed the thermal detector and the reading circuit. A window transparent to radiation is placed above the cavity and ensures the sealing of the cavity. A sealing mechanism hermetically attaches the window on the substrate, and an electrical connection is inserted in the window ensuring a leaktight connection between the detection circuit and processing elements outside the cavity.

摘要翻译： 一种用于检测电磁辐射的装置，包括至少一个包括非冷却热检测器和相关读取电路的检测电路，以及一种用于制造该装置的方法。 该装置包括在真空下形成空腔的基板，其中放置有热检测器和读取电路。 将透明透明的窗口放置在空腔上方，并确保空腔的密封。 密封机构将窗口气密地附接到基板上，并且电连接被插入到窗口中，确保检测电路和腔外的处理元件之间的密封连接。

公开(公告)号：US06392158B1

公开(公告)日：2002-05-21

申请号：US09529411

申请日：2000-08-08

申请人： Stéphane Caplet ,  Marie-Thérèse Delaye

发明人： Stéphane Caplet ,  Marie-Thérèse Delaye

IPC分类号： H05K103

CPC分类号： G01L19/0069 ,  G01B7/003 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49165 ,  H01L2924/00012 ,  H01L2924/00

摘要： A stack including a micro-system having an electrical contact to connect the micro-system to the outside world, a substrate having a first layer formed on the substrate, a through hole extending in an axial direction of the substrate and configured to reveal a rear side of the first layer and to provide a passage to electrically connect to the electrical contact, and a cavity located at an end of the through hole close to the first layer, wherein the cavity has dimensions transverse to the axial direction larger than a diameter of the through hole and forms an overhanging edge around the through hole.

摘要翻译： 一种包括具有用于将微系统连接到外界的电触点的微系统的堆叠，具有形成在基板上的第一层的基板，沿着基板的轴向方向延伸并且被配置为露出后部的通孔 并且提供电气连接到电接触的通道，以及位于靠近第一层的通孔端部的空腔，其中空腔具有横向于轴向方向的尺寸大于直径 该通孔在通孔周围形成伸出的边缘。