ABRASIVE SLURRY REGENERATION METHOD
    13.
    发明申请

    公开(公告)号:US20180339399A1

    公开(公告)日:2018-11-29

    申请号:US15775128

    申请日:2016-12-01

    Abstract: An object of the present invention is to provide an abrasive slurry regeneration method capable of efficiently regenerating an abrasive slurry having a high polishing rate. The abrasive slurry regeneration method is an abrasive slurry regeneration method for polishing a polishing target containing silicon oxide as a main component using an abrasive slurry containing abrasive particles and a plurality of kinds of additives and then regenerating a collected abrasive slurry, characterized by including a regeneration step of collecting an additive having a molecular weight of 500 or more and an additive adsorbed by the abrasive particles among additives contained in the collected abrasive slurry together with the abrasive particles while an abrasive concentration (% by mass) is maintained within a range of 0.2 to 3000% with respect to an abrasive concentration (% by mass) of an unused abrasive slurry when being used for polishing a polishing target.

    Polishing Material Particles, Method For Producing Polishing Material, And Polishing Processing Method
    14.
    发明申请
    Polishing Material Particles, Method For Producing Polishing Material, And Polishing Processing Method 有权
    抛光材料颗粒,抛光材料的制造方法和抛光加工方法

    公开(公告)号:US20160194538A1

    公开(公告)日:2016-07-07

    申请号:US14910986

    申请日:2014-07-28

    Abstract: Disclosed are polishing material particles which have polishing performance suitable for precision polishing and also have a high polishing speed and high monodispersibility; a polishing material containing the polishing material particles; and a polishing processing method using the polishing material. The polishing material particles are spherical particles having an average aspect ratio of 1.00 to 1.15, wherein the particle diameter (D50 (nm)) of the polishing material particles as determined from a particle diameter cumulative distribution curve falls within the range from 50 to 1500 nm. The average content of cerium or the total content of cerium and at least one element selected from lanthanum (La), praseodymium (Pr), neodymium (Nd), samarium (Sm) and europium (Eu) in the polishing material particles is 81 mol % or more relative to the total content of all of rare earth elements that constitute the polishing material particles.

    Abstract translation: 公开了具有适合于精密抛光的抛光性能并且还具有高抛光速度和高单分散性的抛光材料颗粒; 包含抛光材料颗粒的抛光材料; 以及使用研磨材料的研磨处理方法。 抛光材料颗粒是平均纵横比为1.00至1.15的球形颗粒,其中由粒径累积分布曲线确定的抛光材料颗粒的粒径(D50(nm))落在50至1500nm的范围内 。 在研磨材料颗粒中,铈的平均含量或铈和至少一种选自镧(La),镨(Pr),钕(Nd),钐(Sm)和铕(Eu)的元素的含量为81mol 相对于构成抛光材料颗粒的所有稀土元素的总含量为%以上。

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