公开(公告)号：US06403966B1

公开(公告)日：2002-06-11

申请号：US09339851

申请日：1999-06-25

申请人： Michio Oka

发明人： Michio Oka

IPC分类号： G01J142

CPC分类号： G02B21/16

摘要： A measurement method and a measurement apparatus for measuring the structure of a micro-structure or the structure along the depth of an object for measurement. The laser light from a solid-state laser light source is subjected to wavelength conversion to generate the ultraviolet laser light, and measurement is made of the object for measurement by heterodyne detection or homodyne detection employing the ultraviolet laser light. This enables measurement of a structure of a micro-structure. Alternatively, the laser light is split into multiple laser light beams and frequency shifted so that the laser light beams will be of different frequencies. The laser light beams are imaged at respective different focal point positions to perform heterodyne detection. The resulting heterodyne signals are separated into respective frequency bands and measurement is made of the structure of the object for measurement in association with the respective imaging points. This enables measurement of the structure of the object for measurement in the direction along its depth.

摘要翻译： 一种测量方法和测量装置，用于测量沿着测量对象的深度的微结构或结构的结构。 对来自固态激光光源的激光进行波长转换以产生紫外激光，并且通过使用紫外激光的外差检测或零差检测来测量测量对象。 这使得能够测量微结构的结构。 或者，激光被分成多个激光束并且频移，使得激光束将具有不同的频率。 激光束在各个不同的焦点位置成像，以进行外差检测。 所得到的外差信号被分离成相应的频带，并且与各个成像点相关联地测量用于测量的对象的结构。 这使得能够沿着其深度的方向测量被测物体的结构。

公开(公告)号：US06181461B2

公开(公告)日：2001-01-30

申请号：US09162105

申请日：1998-09-28

申请人： Hiroyuki Wada ,  Hisashi Masuda ,  Kenji Kondo ,  Michio Oka ,  Yuushi Kaneda

发明人： Hiroyuki Wada ,  Hisashi Masuda ,  Kenji Kondo ,  Michio Oka ,  Yuushi Kaneda

IPC分类号： G02F135

CPC分类号： G02F1/37 ,  G02F2001/3542

摘要： In an optical system having at least one optical part other than mirrors, for example, a wavelength conversion optical system which uses an external resonator, an optical system which is capable of solving the problem of transverse mode generation due to the existence of scattering matter and the optical crystal used and capable of supplying a stable output (stable wavelength conversion output) is provided. At least at one point in a stable resonator having optical parts (optical crystal) other than mirrors, an aperture having a circular hole with a diameter 1 to 10 times the diameter of a beam at the aperture, a slit having a width 1 to 10 times the diameter of the beam, or an aperture of an arbitrary shape having an edge is located, or a knife edge having an linear or curved edge is Located so that the nearest distance between the edge and the beam is 1 to 10 times the radius of the beam from the center of the beam.

摘要翻译： 在具有除反射镜之外的至少一个光学部件的光学系统中，例如，使用外部谐振器的波长转换光学系统，能够解决由于散射物质的存在而产生横向模式的问题的光学系统，以及 提供了使用并且能够提供稳定输出（稳定的波长转换输出）的光学晶体。 至少在具有除了镜子之外的光学部件（光学晶体）的稳定谐振器中的一个点处，具有直径在光阑的光束直径的1至10倍的圆形孔的孔，具有宽度1至10的狭缝 或者具有边缘的任意形状的孔的位置，或者具有线性或弯曲边缘的刀刃被定位成使得边缘和梁之间的最近距离为半径的1至10倍 的梁的中心。

公开(公告)号：US5930283A

公开(公告)日：1999-07-27

申请号：US869478

申请日：1997-06-05

申请人： Yutaka Imai ,  Michio Oka

发明人： Yutaka Imai ,  Michio Oka

IPC分类号： H01S3/083 ,  H01S3/0941 ,  H01S3/16 ,  H01S3/23

CPC分类号： H01S3/083 ,  H01S3/07 ,  H01S3/0813 ,  H01S3/0816 ,  H01S3/09415 ,  H01S3/10092

摘要： The laser beam generating apparatus (light source apparatus) comprising a laser oscillator structured as a ring resonator is provided with a plurality of excitation light sources and a plurality of solid state laser active media excited by these excitation light sources respectively, and these solid state laser active media are disposed separately each other on the optical path in the ring resonator. A high power laser beam is obtained stably and efficiently.

摘要翻译： 包括构成环形谐振器的激光振荡器的激光束发生装置（光源装置）分别设置有多个激发光源和由这些激发光源激发的多个固态激光活性物质，这些固态激光器 活性介质在环形谐振器的光路上分开设置。 获得稳定高效的高功率激光束。

公开(公告)号：US5349603A

公开(公告)日：1994-09-20

申请号：US976276

申请日：1992-11-13

申请人： Yushi Kaneda ,  Michio Oka

发明人： Yushi Kaneda ,  Michio Oka

IPC分类号： H01S3/08 ,  H01S3/094 ,  H01S3/139 ,  H01S3/16

CPC分类号： H01S3/08 ,  H01S3/08072 ,  H01S3/09408 ,  H01S3/09415

摘要： A solid-state laser resonator includes a pair of reflectors 4, 5, a bar-like laser medium 6, a plurality of point laser sources 1, 2 and resonator including a plurality of resonator portions. At least one of the paired reflectors 4, 5 has a curved-surface mirror. The laser medium 6 is interposed between the paired reflectors 4, 5. Laser beams 8 emitted from the point laser sources 1, 2 are passed through one of the paired reflectors 4, 5 and irradiated as pumping lights on one end face of the laser medium 6. The resonators include the pair of reflectors, the laser sources 1, 2 and a plurality of thermal lenses. The thermal lenses are formed within the laser medium 6. The resonators produce output laser beam to produce from the other end face of the laser medium 6 through other one of the reflector 5.

摘要翻译： 固体激光谐振器包括一对反射器4,5，棒状激光介质6，多个点激光源1,2和包括多个谐振器部分的谐振器。 配对反射器4,5中的至少一个具有曲面反射镜。 激光介质6插入在成对反射器4,5之间。从点激光源1,2发射的激光束8通过成对的反射器4,5中的一个，并在激光介质的一个端面上作为泵浦光照射 谐振器包括一对反射器，激光源1,2和多个热透镜。 热透镜形成在激光介质6内。谐振器产生输出激光束，以通过反射器5中的另一个从激光介质6的另一端面产生。

公开(公告)号：US20120307620A1

公开(公告)日：2012-12-06

申请号：US13464539

申请日：2012-05-04

申请人： Michio Oka ,  Hiroshi Yoshida ,  Kenji Tanaka

发明人： Michio Oka ,  Hiroshi Yoshida ,  Kenji Tanaka

IPC分类号： G11B7/135 ,  G02B3/02 ,  H01S5/06

CPC分类号： G11B7/126 ,  G11B7/127 ,  G11B7/1356 ,  G11B7/1372 ,  G11B7/1378 ,  H01S5/0657 ,  H01S5/1064 ,  H01S5/50

摘要： A light source device configured as a master oscillator power amplifier includes a mode locked laser unit having an external resonator and a semiconductor optical amplifier that amplifies and modulates laser light emitted from the mode locked laser unit. The width in a lateral direction of a waveguide on an incident side of the semiconductor optical amplifier is set so that a horizontal lateral mode of the waveguide on the incident side of the semiconductor optical amplifier becomes multiple modes, and a magnification conversion unit that converts a magnification of incident light from the mode locked laser unit to the semiconductor optical amplifier is disposed so that a basic mode is selectively excited in optical coupling on the incident side of the semiconductor optical amplifier.

摘要翻译： 配置为主振荡器功率放大器的光源装置包括具有外部谐振器的模式锁定激光器单元和放大并调制从锁模激光器单元发射的激光的半导体光放大器。 在半导体光放大器的入射侧的波导的横向的宽度被设定为使得半导体光放大器的入射侧的波导的水平横向模式变为多个模式，并且将倍率转换单元 从模式锁定激光单元到半导体光放大器的入射光的放大率被设置为使得在半导体光放大器的入射侧的光耦合中选择性地激发基本模式。

公开(公告)号：US07106315B2

公开(公告)日：2006-09-12

申请号：US10124293

申请日：2002-04-17

申请人： Suehiro Nakamura ,  Michio Oka

发明人： Suehiro Nakamura ,  Michio Oka

IPC分类号： G09G5/00 ,  G09G3/32

CPC分类号： G09G3/02 ,  G06F3/147 ,  H04N9/3132 ,  H04N2005/91392

摘要： An image display unit includes a linear display device. The linear display device is line-scanned to display a two-dimensional image. The linear display device has a video signal protection function. In the linear display device, video protection can be implemented using a very simple system for turning off some pixels. Device ID information can be embedded into a display terminal using the image display unit.

公开(公告)号：US5909456A

公开(公告)日：1999-06-01

申请号：US944457

申请日：1997-10-06

申请人： Michio Oka

发明人： Michio Oka

IPC分类号： G02F1/37 ,  H01S3/08 ,  H01S3/081 ,  H01S3/098 ,  H01S3/109 ,  H01S3/131 ,  H01S3/16 ,  H01S3/10

CPC分类号： H01S3/1312 ,  H01S3/109 ,  G02F1/37 ,  H01S3/08018 ,  H01S3/08054 ,  H01S3/08072 ,  H01S3/0815 ,  H01S3/1611 ,  H01S3/1643 ,  H01S3/1665 ,  H01S3/1673

摘要： A laser beam generator includes first and second mirrors, a laser light source, a laser medium, a non-linear optical crystal element and a birefringent element. The laser light source generates a pumping light beam. The laser medium, arranged between the first and second mirrors, is irradiated with the pumping light beam via one of the mirrors to generate a fundamental laser beam based on the pumping light beam. The non-linear optical crystal element is arranged between the first and second mirrors to generate a second harmonic laser beam under the type II phase matching as the fundamental laser beam from the laser medium is passed through it in resonant oscillation. The birefringent element has its one surface at a pumping light beam inlet side coated with a high reflectance coating and has its opposite surface parallel to it with a nonreflective coating. The birefringent element is set so that its optical axis is inclined at a predetermined azimuth angle with respect to the crystal axis of the non-linear optical crystal element. The surface of the birefringent element coated with a high reflectance coating constitutes one of the first or second mirrors.

摘要翻译： 激光束发生器包括第一和第二反射镜，激光光源，激光介质，非线性光学晶体元件和双折射元件。 激光光源产生泵浦光束。 布置在第一和第二反射镜之间的激光介质通过其中一个反射镜用泵浦光束照射，以产生基于激发光束的基本激光束。 非线性光学晶体元件布置在第一和第二反射镜之间，以在激光介质的基本激光束以共振振荡的方式通过时，在II型相位匹配下产生二次谐波激光束。 双折射元件的一个表面在泵浦光束入口侧涂覆有高反射率涂层，并且其相对表面与非反射涂层平行。 双折射元件被设置为使得其光轴相对于非线性光学晶体元件的晶轴以预定的方位角倾斜。 涂覆有高反射率涂层的双折射元件的表面构成第一或第二反射镜之一。

公开(公告)号：US5822287A

公开(公告)日：1998-10-13

申请号：US648147

申请日：1996-06-05

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G11B7/00 ,  G11B7/0045 ,  G11B7/09 ,  G11B7/125 ,  G11B7/135 ,  G11B7/24 ,  G11B7/26 ,  G11B19/12 ,  G11B20/00 ,  G11B23/28 ,  G11B23/36

CPC分类号： G11B7/127 ,  G11B23/36 ,  G11B7/0045 ,  G11B7/0903 ,  G11B7/128 ,  G11B7/1372 ,  G11B7/24 ,  G11B20/00086 ,  G11B2019/121 ,  G11B23/284 ,  G11B7/0908 ,  G11B7/26

摘要： The UV laser light outgoing from a UV laser light source 1 is modulated in intensity by a light modulator 2 in accordance with the subsidiary information so as to fall on a mirror 14 via lenses 3, 4, a phase diffraction lattice 5 and a half mirror 11. The UV laser light is then reflected by the mirror 14 and condensed by an objective lens 6 so as to be radiated on an optical disc 8. The UV laser light outgoing from the UV laser light source 1 falls on a phase diffraction lattice via a light modulator 2 and lenses 3 and 4 so as to be radiated on the optical disc 8 via the half mirror 11, mirror 14 and the objective lens 6. On the other hand, the reflected light of the visible laser light reflected by the optical disc 8 falls on the half mirror 11 via the objective lens 6 and the mirror 14 so as to be reflected by the half mirror 11 to fall on a photodetector 13 via a cylindrical lens 12. By effecting focusing control and tracking control based upon an output signal of the photodetector 13, a light spot of the UV laser may be formed at a precise position in the subsidiary information recording area for correctly recording the subsidiary information.

摘要翻译： PCT No.PCT / JP95 / 01895第 371日期：1996年6月5日 102（e）日期1996年6月5日PCT 1995年9月20日PCT PCT。 公开号WO96 / 10250 PCT 日期1996年04月4日根据辅助信息，通过光调制器2强度地从UV激光光源1输出的UV激光经由透镜3,4落在反射镜14上，相位衍射光栅 5和半反射镜11.然后，UV激光被反射镜14反射并被物镜6聚光，以便辐射在光盘8上。从UV激光光源1出射的UV激光落在 经由光调制器2和透镜3和4的相位衍射格栅，以便经由半反射镜11，反射镜14和物镜6照射在光盘8上。另一方面，可见激光的反射光 由光盘8反射的光经由物镜6和反射镜14落在半反射镜11上，以被半反射镜11反射，经由柱面透镜12落在光电检测器13上。通过进行聚焦控制和跟踪 基于t的输出信号进行控制 在紫外线激光器的光点可以形成在辅助信息记录区域中的精确位置，以正确地记录辅助信息。

公开(公告)号：US5638168A

公开(公告)日：1997-06-10

申请号：US313387

申请日：1994-09-27

申请人： Shigeo Kubota ,  Michio Oka

发明人： Shigeo Kubota ,  Michio Oka

IPC分类号： G01M11/00 ,  G01M11/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

CPC分类号： G03F7/706 ,  G01M11/0292

摘要： A lens evaluating device for measuring the optical transfer function of the lens under evaluation for evaluating the lens. The lens evaluating device includes an exposure light source, a converging lens for converging a light beam radiated from the exposure light source at a point, a characteristics evaluating pattern onto which the light beam outputted from the converging lens is converged by the lens under evaluation to form an image on it, a detection unit for receiving a return light beam having scanned the characteristics evaluating pattern via the lens under evaluation for detecting changes in reflection intensity of the return light beam, and an analysis unit for executing frequency analysis of the detected results from the detection unit for measuring the optical transfer function. The results of detection by the detection unit are subjected to a frequency analysis using a spectrum analyzer for measuring the optical transfer function of the lens under evaluation for evaluating the lens. An exposure light source includes a first resonator and a second resonator. The first resonator has a laser medium illuminated by an excited light radiated by an exciting light source and a first non-linear optical crystal device for wavelength-converting the light beam radiated from the laser medium. The second resonator has a second non-linear optical crystal device for wavelength-converting a light beam radiated from the first resonator.

摘要翻译： 一种用于测量透镜评估透镜的光学传递函数的透镜评估装置。 透镜评估装置包括曝光光源，用于将从曝光光源照射的光束会聚在一点的会聚透镜，从会聚透镜输出的光束被评估的镜片会聚的特性评估图案， 在其上形成图像;检测单元，用于接收通过经评估的镜片扫描特性评估图案的返回光束，用于检测返回光束的反射强度的变化;以及分析单元，用于执行检测结果的频率分析 来自用于测量光学传递函数的检测单元。 使用用于测量透镜评估用透镜的光学传递函数的光谱分析仪对检测单元的检测结果进行频率分析。 曝光光源包括第一谐振器和第二谐振器。 第一谐振器具有由激发光源辐射的激发光照射的激光介质和用于对从激光介质辐射的光束进行波长转换的第一非线性光学晶体装置。 第二谐振器具有用于对从第一谐振器辐射的光束进行波长转换的第二非线性光学晶体装置。

公开(公告)号：US5473409A

公开(公告)日：1995-12-05

申请号：US309874

申请日：1994-09-20

申请人： Minoru Takeda ,  Shigeo Kubota ,  Michio Oka ,  Tohru Ogawa

发明人： Minoru Takeda ,  Shigeo Kubota ,  Michio Oka ,  Tohru Ogawa

IPC分类号： G03F7/20 ,  G03B27/42

CPC分类号： G03F7/70575

摘要： An exposure device in which a reticle having a circuit pattern of a semiconductor device formed on it is irradiated with light beam emanated from a light source, such as a laser light source, for exposing the circuit pattern formed on the reticle on a semiconductor wafer. The exposure device includes a light beam generator for illuminating the reticle having a semiconductor circuit pattern formed on it, an image-forming optical system for forming an image on a wafer of a light image produced on radiating a light beam on the reticle from the light beam generator. The exposure device also includes a movement unit for moving the wafer relative to the image-forming optical system, and an alignment unit for detecting the position on the wafer of the image formed on the wafer by the image-forming optical system for position matching the image by the image-forming optical system relative to the wafer. The light beam generator includes a light source for excitation, a first resonator and a second resonator. The first resonator is illuminated by the light beam from the light source for excitation and outputs the light beam from the light source for excitation after waveform conversion. The second resonator is illuminated by the light beam from the first resonator and outputs the light beam from the first resonator after waveform conversion.

摘要翻译： 照射具有形成在其上的半导体器件的电路图形的掩模版的曝光装置，用于从诸如激光源的光源发射的光束照射用于使形成在半导体晶片上的掩模版上的电路图案曝光。 曝光装置包括用于照亮其上形成有半导体电路图案的掩模版的光束发生器，用于在光线上形成光图像的图像的图像形成光学系统，该光图像在光线上从光线照射光线 光束发生器。 曝光装置还包括用于相对于图像形成光学系统移动晶片的移动单元和用于通过图像形成光学系统检测在晶片上形成的图像在晶片上的位置的对准单元，用于位置匹配 通过图像形成光学系统相对于晶片的图像。 光束发生器包括用于激发的光源，第一谐振器和第二谐振器。 第一谐振器由来自光源的光束照射用于激发，并且在波形转换之后输出来自光源的光束用于激发。 第二谐振器由来自第一谐振器的光束照射，并且在波形转换之后从第一谐振器输出光束。