摘要:
An IC card 10A has a mica capacitor that comprises a mica film 1 and electrodes 6a, 6b formed on both sides thereof, where the mica film 1 serves as a mounting substrate for an antenna coil 2 and an IC chip 3, thereby reducing profile of an IC card and also reducing its cost of manufacture and to stabilize its resonance frequency.
摘要:
Provide a micro-dispersion water of super-fine titanium-group metal particles offering hair-repairing effects, as well as its production method and apparatus. Efficiently produce a concentration-adjustable water solution of super-fine titanium-group metal particles using a highly safe, compact production apparatus that comprises a power supply for high-voltage/current discharge, a titanium-group metal electrode feeder, an electrode-vibrating/sliding device, a high-voltage discharge generator equipped with a titanium-group metal electrode and a counter electrode, a water tank, a water inlet to the water tank, and an outlet for generated water solution of super-fine titanium-group particles, wherein plasma discharge is caused between the titanium-group metal electrode and counter electrode in water to let ion vapor of titanium-group metal contact and dissolve in water.
摘要:
A damping brace having an axial force member for providing bearing forces against tensile or compressive forces, a constraining member for constraining the axial force member, and a stiffening part for supplementing the stiffness of the axial force member. An adhesion preventive coating is provided for preventing adhesion between the constraining member and the stiffening part. A length of the stiffening part extending along the axial direction and the gap between the stiffening part and the constraining member are defined in such a way as to prevent an end of the axial force member from rotating in the axial direction beyond a specific angle when the compressive force is applied to the force member.
摘要:
Due to its lack of appreciable thickness, the reticle used in charged-particle-beam (CPB) microlithography is prone to bending and flexing, causing instability in reticle axial height position relative to the projection-lens system, with consequent errors in image focus, rotation and magnification. Apparatus and methods are disclosed for monitoring changes in axial height position of the reticle, to facilitate making compensatory changes. Representative apparatus include a device for detecting the axial height position of the reticle. The device produces one or more beams of light (IR to visible) to strike the reticle at an oblique angle of incidence, detects light reflected from the reticle surface, and detects lateral shifts of the reflected light as received by a height detector. Hence, reticle focus is detected easily and in real time. Multiple detection beams can be used, thereby allowing detection of both axial height position and inclination of the reticle with high accuracy. Reticle-position data can be used to regulate one or more parameters of exposure and/or axial position of the reticle or wafer.
摘要:
A scanning exposure method includes relatively moving a mask and an illuminated area of an exposure beam during a scanning exposure, an image of a pattern of said mask being projected onto a substrate through a projection system; and performing, during the scanning exposure, an imaging adjustment in order to compensate for change of the image projected onto the substrate that would be caused by a scanning error of the mask, the scanning error causing a positional variation of a pattern surface of the mask along an axis of the projection system.
摘要:
The resist to be used for the method of this invention in producing a semiconductor device is patterned by a procedure which comprises the steps of disposing in the direction of a semiconductor wafer a first mask having circuit patterns repeatedly formed at a plurality of positions, then shielding those of said plurality of circuit patterns which overlap the edge of the semiconductor wafer with a blind to an extent such that the remaining circuit patterns are not shielded, exposing a resist overlying the semiconductor wafer by using the first mask held in a state partially shielded by the blind, projecting light through a second mask provided with a light passing pattern defined by a shielding film to an area of the resist to which the edge of the blind is transferred, and developing the resist
摘要:
A process for the transesterification of substrates comprising (a) fat and oil and (b) one or more compounds selected from the group consisting of fatty acid, fatty acid ester and other fat and oil with the use of a lipase, wherein said transesterification is effected in the presence of a monohydric lower alcohol.
摘要:
A simple illumination control device provides illuminating light with improved uniformity in intensity and without speckle fringes.A speckle pattern, formed with a specific periodicity by the irradiation of a pulse on a first object or a second object, is moved within a predetermined range at least in one direction. The minimum number of pulses required for substantially smoothing the speckle pattern on the second object by irradiation of plural pulses during the movement of the speckle pattern over the predetermined range, is stored. Based on the minimum number of pulses, the number of pulses required for obtaining desired exposure, the amount of light of each pulse, and the number of pulses for moving the speckle pattern substantially by a cycle, are determined.
摘要:
In a power MOS FET and the method of manufacturing such FET, in which a material, such as platinum, having a small resistivity compensation effect is diffused as a lifetime killer into the vicinity of a PN diode junction formed by the drain region and the base region. The diffusion is made through an opening formed in a covering insulator layer. An example of the lifetime killer is platinum and the preferable temperature range for diffusing platinum is not higher than 900.degree. C.
摘要:
In a power MOS FET and the method of manufacturing such FET, in which a material, such as platinum, having a small resistivity compensation effect is diffused as a lifetime killer into the vicinity of a PN diode junction formed by the drain region and the base region. The diffusion is made through an opening formed in a covering insulator layer. An example of the lifetime killer is platinum and the preferable temperature range for diffusing platinum is not higher than 900.degree.C.