公开(公告)号：US06768124B2

公开(公告)日：2004-07-27

申请号：US09828300

申请日：2001-04-06

申请人： Kazuaki Suzuki ,  Mikio Ushijima

发明人： Kazuaki Suzuki ,  Mikio Ushijima

IPC分类号： G03F900

CPC分类号： G03F7/70775 ,  B82Y10/00 ,  B82Y40/00 ,  G03F9/7026 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/31794

摘要： Due to its lack of appreciable thickness, the reticle used in charged-particle-beam (CPB) microlithography is prone to bending and flexing, causing instability in reticle axial height position relative to the projection-lens system, with consequent errors in image focus, rotation and magnification. Apparatus and methods are disclosed for monitoring changes in axial height position of the reticle, to facilitate making compensatory changes. Representative apparatus include a device for detecting the axial height position of the reticle. The device produces one or more beams of light (IR to visible) to strike the reticle at an oblique angle of incidence, detects light reflected from the reticle surface, and detects lateral shifts of the reflected light as received by a height detector. Hence, reticle focus is detected easily and in real time. Multiple detection beams can be used, thereby allowing detection of both axial height position and inclination of the reticle with high accuracy. Reticle-position data can be used to regulate one or more parameters of exposure and/or axial position of the reticle or wafer.

摘要翻译： 由于其缺乏可观的厚度，用于带电粒子束（CPB）微光刻的掩模版易于弯曲和弯曲，导致相对于投影透镜系统的标线轴高度位置不稳定，导致图像聚焦的误差， 旋转和放大。 公开了用于监测标线的轴向高度位置变化的装置和方法，以便于进行补偿性变化。 代表性装置包括用于检测掩模版的轴向高度位置的装置。 该装置产生一个或多个光束（IR到可见）以倾斜的入射角撞击光罩，检测从标线片表面反射的光，并且检测由高度检测器接收的反射光的横向偏移。 因此，准确地检测到掩模版焦点。 可以使用多个检测光束，从而能够高精度地检测光罩的轴向高度位置和倾斜度。 标线片位置数据可用于调节掩模版或晶片的曝光和/或轴向位置的一个或多个参数。

公开(公告)号：US08018577B2

公开(公告)日：2011-09-13

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/54

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US07812264B2

公开(公告)日：2010-10-12

申请号：US12230602

申请日：2008-09-02

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H01L23/28

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

公开(公告)号：US20100175247A1

公开(公告)日：2010-07-15

申请号：US12659740

申请日：2010-03-19

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H05K3/34

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

摘要翻译： 功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。 使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。 在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线是 裸露。 具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。 由此，封装构件与液体密封树脂接触。 通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

公开(公告)号：US20090038843A1

公开(公告)日：2009-02-12

申请号：US12230602

申请日：2008-09-02

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H01L23/28 ,  H05K7/00

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

摘要翻译： 功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。 使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。 在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线为 裸露。 具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。 由此，封装构件与液体密封树脂接触。 通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

公开(公告)号：US07314499B2

公开(公告)日：2008-01-01

申请号：US10468110

申请日：2002-02-26

申请人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

发明人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

IPC分类号： B22F9/04

CPC分类号： B22F1/0022 ,  A01N59/16 ,  A23L33/16 ,  A23V2002/00 ,  A61L9/01 ,  B22F9/12 ,  B22F2998/00 ,  B82Y30/00 ,  C02F1/68 ,  C02F2103/02 ,  C02F2103/026 ,  A01N25/04 ,  A01N2300/00 ,  A23V2250/154 ,  A23V2250/1568

摘要： Produce high-function water useful for consumption as healthy drinking water or in the production of health supplements, cosmetic products, food preservatives, freshness-keeping agents for food, insect repellents or deodorizers, wherein such water contains micro-dispersed ultra-fine gold particles and a small amount of dissolved gold and is produced by constructing in the upper section of a high-pressure water tank a combustion chamber equipped with an injector nozzle for oxygen-hydrogen mixture gas, an ignition device and a gold-rod or gold-wire feeder, igniting the injector nozzle for oxygen-hydrogen mixture gas using the ignition device in the combustion chamber to melt and evaporate the gold rod or wire supplied from the feeder or water in which gold foil was dispersed beforehand and to allow the produced gold vapor to contact high-pressure water, and thereby causing the produced ultra-fine gold particles to float and disperse in water.

摘要翻译： 生产用作健康饮用水或生产保健品，化妆品，食品防腐剂，食品保鲜剂，驱虫剂或除臭剂的高功能水，其中这种水含有微分散的超细金颗粒 和少量的溶解金，并且通过在高压水箱的上部构造具有配备有用于氧 - 氢混合气体的喷射器喷嘴的燃烧室，点火装置和金棒或金线 使用燃烧室中的点火装置点燃用于氧 - 氢混合气体的喷射器喷嘴，以熔融并蒸发从进料器提供的金棒或丝线，其中预先分散有金箔的水，并允许产生的金蒸汽 接触高压水，从而使生成的超细金颗粒漂浮并分散在水中。

公开(公告)号：US20060290916A1

公开(公告)日：2006-12-28

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/32

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US20060080190A1

公开(公告)日：2006-04-13

申请号：US11237861

申请日：2005-09-29

申请人： Isao Furukawa ,  Shoichi Nakagami ,  Takashi Yanagita ,  Hirohisa Shimonaga ,  Junichi Matsuda ,  Kazuaki Suzuki

发明人： Isao Furukawa ,  Shoichi Nakagami ,  Takashi Yanagita ,  Hirohisa Shimonaga ,  Junichi Matsuda ,  Kazuaki Suzuki

IPC分类号： G06Q99/00

CPC分类号： G06Q10/08 ,  G06Q10/087

摘要： The present invention provides a goods trace information storing method comprising the steps of: acquiring identification information from an RFID (Radio Frequency Identifier) tag in each distribution level by an identification information read mechanism, and acquiring physical property information of goods, where the RFID tag is attached, by a physical quantity measurement mechanism; a comparison determination mechanism's comparing the physical property information with predetermined threshold information and outputting determination information comprising information for indicating whether or not the physical property information is out of a range of the threshold information; and a registration mechanism's making the acquired identification information, physical property information, and determination information correspond to information for identifying the information group, including information for specifying an acquisition time and an acquired distribution level, and storing them in a memory mechanism.

摘要翻译： 本发明提供了一种货物追踪信息存储方法，其特征在于包括以下步骤：通过识别信息读取机构从每个分发级别的RFID（射频标识符）标签获取识别信息，并且获取货物的物理属性信息，其中RFID标签 通过物理量测量机制; 比较确定机构将物理属性信息与预定阈值信息进行比较，并输出包括用于指示物理属性信息是否在阈值信息的范围之外的信息的确定信息; 以及登记机构使获取的识别信息，物理属性信息和确定信息对应于用于识别信息组的信息，包括用于指定获取时间和获取的分配级别的信息，并将其存储在存储机构中。

公开(公告)号：US06879258B2

公开(公告)日：2005-04-12

申请号：US10736603

申请日：2003-12-17

申请人： Nobukazu Kuroda ,  Kazuaki Suzuki

发明人： Nobukazu Kuroda ,  Kazuaki Suzuki

IPC分类号： G06K19/00 ,  B42D15/10 ,  G06K19/07 ,  G06K19/077 ,  H05K1/03 ,  H05K1/16 ,  G08B13/14

CPC分类号： G06K19/0723 ,  H05K1/0306 ,  H05K1/162

摘要： An IC card 10A has a mica capacitor that comprises a mica film 1 and electrodes 6a, 6b formed on both sides thereof, where the mica film 1 serves as a mounting substrate for an antenna coil 2 and an IC chip 3, thereby reducing profile of an IC card and also reducing its cost of manufacture and to stabilize its resonance frequency.

摘要翻译： IC卡10A具有云母电容器，其包括云母膜1和形成在其两侧的电极6a，6b，其中云母膜1用作天线线圈2的安装基板和IC芯片3，由此减小 一个IC卡，同时也降低了其制造成本和稳定其共振频率。

公开(公告)号：US20050019289A1

公开(公告)日：2005-01-27

申请号：US10492392

申请日：2002-10-10

申请人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

发明人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

IPC分类号： A61K8/04 ,  A61K8/29 ,  A61K33/24 ,  A61P17/16 ,  A61Q5/00 ,  A61K7/06

CPC分类号： A61K8/044 ,  A61K8/29 ,  A61K33/24 ,  A61K2800/412 ,  A61Q5/00

摘要： Provide a micro-dispersion water of super-fine titanium-group metal particles offering hair-repairing effects, as well as its production method and apparatus. Efficiently produce a concentration-adjustable water solution of super-fine titanium-group metal particles using a highly safe, compact production apparatus that comprises a power supply for high-voltage/current discharge, a titanium-group metal electrode feeder, an electrode-vibrating/sliding device, a high-voltage discharge generator equipped with a titanium-group metal electrode and a counter electrode, a water tank, a water inlet to the water tank, and an outlet for generated water solution of super-fine titanium-group particles, wherein plasma discharge is caused between the titanium-group metal electrode and counter electrode in water to let ion vapor of titanium-group metal contact and dissolve in water.

摘要翻译： 提供提供毛发修复效果的超细钛族金属微粒的微分散水及其制备方法和装置。 使用高度安全，紧凑的生产设备有效地生产超细钛族金属颗粒的浓度可调的水溶液，其包括用于高压/电流放电的电源，钛族金属电极馈电器，电极振动 滑动装置，配备钛族金属电极和对电极的高压放电发生器，水箱，水箱的入水口，以及超细钛族粒子的产生水溶液的出口 其中在钛族金属电极和对电极之间在水中引起等离子体放电，使钛族金属的离子蒸气接触并溶解在水中。