公开(公告)号：US07567269B2

公开(公告)日：2009-07-28

申请号：US11115111

申请日：2005-04-27

申请人： Shinji Sakano ,  Kanji Tabeya ,  Masahito Hirokawa

发明人： Shinji Sakano ,  Kanji Tabeya ,  Masahito Hirokawa

IPC分类号： H04N7/14 ,  H04L12/66

CPC分类号： H04L29/06027 ,  H04L12/66 ,  H04L65/1006 ,  H04N7/148 ,  H04N21/6137 ,  H04N21/6187 ,  H04N21/632 ,  H04N21/64322

摘要： A television phone adapter which permits an ordinary analog telephone to switch between being a telephone with a video function and a telephone without a video function. The television phone adapter includes a telephone adapter unit that detects dial operation of an analog telephone connected to a router with an IP telephone function, a video adapter unit that connects and disconnects a video connection using an IP network, sends a video taken by a camera to a communication partner and outputs a video received from the communication partner to a display 4 through the video connection in the connected state. A translation table stores correspondence between dial operation and a setting content. A main control unit controls connection and disconnection of the video connection by the video adapter unit, according to setting/content items corresponding to dial numbers or dial tones detected by the telephone adapter unit, when the control content translation table stores the setting/content items corresponding to the dial numbers or tones detected by the telephone adapter unit.

摘要翻译： 一种允许普通模拟电话在具有视频功能的电话和没有视频功能的电话之间切换的电视电话适配器。 电视电话适配器包括电话适配器单元，其检测连接到具有IP电话功能的路由器的模拟电话的拨号操作，使用IP网络连接和断开视频连接的视频适配器单元，发送由相机拍摄的视频 并且通过连接状态下的视频连接将从通信伙伴接收的视频输出到显示器4。 翻译表存储拨号操作与设置内容之间的对应关系。 当控制内容转换表存储设置/内容项目时，主控制单元根据与电话适配器单元检测到的拨号号码或拨号音相对应的设置/内容项目来控制视频适配器单元的视频连接的连接和断开 对应于由电话适配器单元检测到的拨号号码或音调。

公开(公告)号：US20080107281A1

公开(公告)日：2008-05-08

申请号：US11933482

申请日：2007-11-01

申请人： Masahito Togami ,  Shinji Sakano ,  Toshiyuki Matsuda

发明人： Masahito Togami ,  Shinji Sakano ,  Toshiyuki Matsuda

IPC分类号： H04B3/20

CPC分类号： H04M9/082

摘要： An acoustic echo canceller system having a filter with high suppression performance of acoustic echo, generated by using microphone array having a plurality of microphone elements, judging a band where only a speaker sound is present, based on phase difference among microphones, and carrying out adaptation of an adaptive filter for only such a band.

摘要翻译： 一种声学回声消除器系统，具有具有高回声抑制性能的滤波器，该滤波器通过使用具有多个麦克风元件的麦克风阵列产生，根据麦克风之间的相位差来判断仅存在扬声器声音的频带，并且执行适配 仅适用于这种频带的自适应滤波器。

公开(公告)号：US07302176B2

公开(公告)日：2007-11-27

申请号：US10853864

申请日：2004-05-26

申请人： Shinji Sakano ,  Yasushi Sawada ,  Hideaki Tsushima ,  Yoshiaki Ikoma

发明人： Shinji Sakano ,  Yasushi Sawada ,  Hideaki Tsushima ,  Yoshiaki Ikoma

IPC分类号： G02F1/00 ,  H04B10/12 ,  H04B10/00

CPC分类号： H04J14/0294 ,  H04B10/032 ,  H04J14/0206 ,  H04J14/0209 ,  H04J14/0213 ,  H04J14/0219 ,  H04J14/0221 ,  H04J14/0227 ,  H04J14/0228 ,  H04J14/0238 ,  H04J14/0241 ,  H04J14/0283 ,  H04J14/0297 ,  H04Q11/0066 ,  H04Q2011/0081 ,  H04Q2011/0098

摘要： A medium-scale IP telecommunications network is configured in a low-cost optical network with good reliability and expandability. A physical configuration example has a center node 2-1 and eight local nodes 2-11 through 2-18 connected in one OADM ring 2-21/2-22. The logical configuration is a star configuration with the central node 2-1 at its origin with all traffic passing through the center node 2-1. The local nodes 2-11 through 2-18 are connected to the central node 2-1 by wavelength-unit optical channels or optical paths λ1 through λ8. Channels are added as required. Initially, for example, the center node 2-1 and the local node 2-5 are connected by λ5, but λ13 can added when the need arises. Since the logical star network is limited to approximately two add/drop optical channels at local nodes, costs are reduced by using inexpensive filters (e.g., dielectric interference film filters or fiber Bragg reflectors) that are capable of extracting only the specific wavelength of the optical channel. High reliability is provided through the use of optical switches for correction of fiber transmission path failures.

摘要翻译： 中等规模的IP电信网络配置在低成本的光网络中，具有良好的可靠性和可扩展性。 物理配置示例具有连接在一个OADM环2-21/2-22中的中心节点2-1和8个本地节点2-11至2-18。 逻辑配置是一个星型配置，其中心节点2-1位于其原点，所有业务通过中心节点2 - 1。 局部节点2至11至2-18通过波长单位光学信道或光学路径λ1至λ8连接到中心节点2-1。 根据需要添加渠道。 最初，例如，中心节点2-1和本地节点2-5通过λ5连接，但是当需要时可以添加lambda 13。 由于逻辑星形网络在局部节点处限制在大约两个加/减光通道，所以通过使用廉价的滤波器（例如，介质干涉膜滤波器或光纤布拉格反射器），能够仅提取光学特定波长的成本降低 渠道。 通过使用光学开关提供光纤传输路径故障的高可靠性。

公开(公告)号：US4803692A

公开(公告)日：1989-02-07

申请号：US903376

申请日：1986-09-03

申请人： Shinji Sakano ,  Hiroyoshi Matsumura

发明人： Shinji Sakano ,  Hiroyoshi Matsumura

IPC分类号： H01S5/00 ,  H01S3/107 ,  H01S5/0625 ,  H01S5/068 ,  H01S5/125 ,  H01S5/14 ,  H01S3/19

CPC分类号： H01S3/107 ,  H01S5/141 ,  H01S5/06256 ,  H01S5/125

摘要： It is possible to narrow the emission spectrum linewidth of a semiconductor laser device by coupling optically an external resonator with one end surface of the semiconductor laser. However, the structure of the external resonator should match the phase of the light emitted by the laser. Heretofore, this matching has been effected by adjusting the length of the external resonator, and hence productivity and reproducibility have not been good. According to this invention, characteristics of the external resonator can be adjusted electrically to be matched with the phase of the emitted light owing to the fact that the external resonator is made of a material, whose refractive index can be varied electrically. Therefore the semiconductor laser device according to this invention is very practical.

摘要翻译： 通过将外部谐振器与半导体激光器的一个端面光学耦合，可以缩小半导体激光器件的发射光谱线宽。 然而，外部谐振器的结构应与激光发射的光的相位相匹配。 迄今为止，这种匹配是通过调节外部谐振器的长度而实现的，因此生产率和再现性不好。 根据本发明，外部谐振器的特性可以被电调节以与发射光的相位匹配，这是由于外部谐振器由折射率可以变化的材料制成。 因此，根据本发明的半导体激光器件非常实用。

公开(公告)号：US07774082B2

公开(公告)日：2010-08-10

申请号：US11867421

申请日：2007-10-04

申请人： Shigeru Kubota ,  Shinji Sakano

发明人： Shigeru Kubota ,  Shinji Sakano

IPC分类号： G06F19/00 ,  G06F11/30 ,  G21C17/00 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

CPC分类号： H01L21/67745 ,  H01L21/67276

摘要： First feedforward calculation is executed when a preprocessing surface profile is measured and a processing chamber with its processing parameter value having been obtained through the first feedforward calculation judged to be within an allowable range is determined. Wafer transfer is executed only in conjunction with a processing chamber having a processing parameter value judged to be within the allowable range, and the wafer is carried to the entry point of the processing chamber. Then, second feedforward calculation is executed by reflecting the results of feedback calculation executed based upon the most recent processing having been executed in the particular processing chamber and wafer processing is executed in the processing chamber based upon the processing parameter value calculated in the second feedforward calculation.

摘要翻译： 当测量预处理表面轮廓并且确定通过判断为在允许范围内的通过第一前馈计算获得其处理参数值的处理室时，执行第一前馈计算。 晶片传送仅与被判定为在容许范围内的处理参数值的处理室结合执行，并且晶片被传送到处理室的入口点。 然后，通过反映基于在特定处理室中执行的最近处理而执行的反馈计算的结果来执行第二前馈计算，并且基于在第二前馈计算中计算的处理参数值在处理室中执行晶片处理 。

公开(公告)号：US07054786B2

公开(公告)日：2006-05-30

申请号：US10332011

申请日：2001-07-03

申请人： Shinji Sakano ,  Tsuyoshi Sendoda

发明人： Shinji Sakano ,  Tsuyoshi Sendoda

IPC分类号： G06F19/00

CPC分类号： H01J37/32935 ,  H01L21/31116 ,  H01L22/20

摘要： In an operation monitoring method according to the present invention, operation data of a plasma processing system (1) are detected for every wafer (W) by means of a plurality of detectors, and a principal component analysis using the operation data is carried out by means of a controller (10). An operation state of the plasma processing system (1) is evaluated by using the results of the principal component analysis.

摘要翻译： 在根据本发明的操作监视方法中，通过多个检测器，针对每个晶片（W）检测等离子体处理系统（1）的操作数据，并且使用该操作数据的主成分分析由 控制器（10）的装置。 使用主成分分析的结果对等离子体处理系统（1）的运转状态进行评价。

公开(公告)号：US20050125090A1

公开(公告)日：2005-06-09

申请号：US10984932

申请日：2004-11-10

申请人： Shinji Sakano ,  Satoshi Harada

发明人： Shinji Sakano ,  Satoshi Harada

IPC分类号： G05B13/04 ,  G05B23/02 ,  G06F19/00 ,  H01L21/3065 ,  H01L21/66

CPC分类号： G05B13/048 ,  G05B23/0254 ,  H01J37/32862

摘要： A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.

摘要翻译： 一种用于预测处理结果的方法包括对在第一标准处理期间获得的多个检测数据执行主成分分析的过程，以构建主成分分析模型; 获得主成分分析模型残差作为第一残差的过程; 执行第二标准处理的处理; 以及在第二标准处理期间从多个检测器获得多个检测数据的处理。 并且，将在第二标准处理期间获得的检测数据应用于主成分分析模型，以获得第二残差。 该方法还包括基于加权参考来加权第二残差的过程，以及使用加权的第二残差构建新的多变量分析模型; 以及使用多变量分析模型预测第二标准处理的处理结果的处理。

公开(公告)号：US06586262B1

公开(公告)日：2003-07-01

申请号：US09926544

申请日：2001-11-16

申请人： Susumu Saito ,  Shinji Sakano

发明人： Susumu Saito ,  Shinji Sakano

IPC分类号： H01L2100

CPC分类号： H01J37/32935 ,  H01J37/32972

摘要： The present invention is a method for end point detection where emission spectra are detected during etching of an object to be processed, such as a semiconductor wafer, by a spectrometer, and an end point of the etching is detected, comprising performing etching of a sample, corresponding to a product, prior to etching of a semiconductor wafer which is the product, sequentially measuring full-spectra of plasma, performing principal component analysis of the emission spectra using the emission intensities of all wavelengths of each of the full-spectra, holding the results as data, thereafter obtaining a principal component score for each of the full-spectra sequentially measured during etching of a semiconductor wafer to be manufactured on the basis of the emission intensities of all the wavelengths, and then detecting an end point of etching on the basis of a substantial change of the principal component score for each of the full-spectra sequentially measured.

摘要翻译： 本发明是一种终点检测方法，其中通过光谱仪在诸如半导体晶片的待处理物体的蚀刻期间检测发射光谱，并且检测蚀刻的终点，包括进行样品的蚀刻 对应于产品，在蚀刻作为产品的半导体晶片之前，顺序地测量等离子体的全谱，使用每个全光谱的所有波长的发射强度进行发射光谱的主成分分析，保持 结果作为数据，然后根据所有波长的发射强度获得在待制造的半导体晶片的蚀刻期间顺序测量的每个全频谱的主分量得分，然后检测蚀刻终点 依次测量每个全频谱的主分量得分的实质变化的基础。

公开(公告)号：US06433925B1

公开(公告)日：2002-08-13

申请号：US09098738

申请日：1998-06-17

申请人： Shinji Sakano ,  Ichiro Yokota ,  Junya Kosaka ,  Takayuki Suzuki

发明人： Shinji Sakano ,  Ichiro Yokota ,  Junya Kosaka ,  Takayuki Suzuki

IPC分类号： H01S317

CPC分类号： H04B10/296 ,  H04B10/0777 ,  H04B2210/003 ,  H04B2210/078 ,  H04B2210/08

摘要： A variable attenuator is inserted into an optical input part and a feedback control is performed so that an optical input to an amplifying optical fiber becomes constant. Further, a control for changing a total optical output and an optical input to the amplifying optical fiber is performed on the basis of channel number information obtained from a supervisory signal. When light to/from an intermediate optical component is detected and the absence of the component is detected, pumping is suppressed, thereby avoiding occurrence of an optical surge at the time of connection of the optical component and a signal indicative of detachment of the optical component is generated.

摘要翻译： 将可变衰减器插入到光输入部分中，并执行反馈控制，使得放大光纤的光输入变为恒定。 此外，基于从监控信号获得的信道号信息，执行用于将总光输出和光输入改变为放大光纤的控制。 当检测到来自中间光学部件的光并且检测到不存在部件时，泵浦被抑制，从而避免在光学部件的连接时发生光学浪涌和表示光学部件的脱离的信号 被生成。

公开(公告)号：US06297902B1

公开(公告)日：2001-10-02

申请号：US08793151

申请日：1997-02-18

申请人： Junya Kosaka ,  Shinji Sakano ,  Yoshiaki Sato ,  Kazuo Aida

发明人： Junya Kosaka ,  Shinji Sakano ,  Yoshiaki Sato ,  Kazuo Aida

IPC分类号： G02F135

CPC分类号： H04B10/2931 ,  H01S3/06754 ,  H01S3/1301 ,  H01S5/0683 ,  H01S5/06832 ,  H01S5/50 ,  H01S2301/06 ,  H03G3/3084

摘要： In a light amplification apparatus in which a part of a light output from a light amplification medium is transmitted through a branching means to a light detection means so that light power of the light output is detected by the light detection means whereby at least one of an excitation source and a return means is controlled through a control means so that light branch from a branching means is returned as a return light to the light amplification medium through the branching means again in a state in which light power is adjusted by the return means, and, as a result, the light power of the light output from the light amplification medium can be kept in a desired value while the occurrence of a light surge is suppressed, a light amplification medium control method and a light amplification apparatus wherein a signal light input can be amplified while the occurrence of a light surge is suppressed by a simple structure and with good control response, and a system using the same.

摘要翻译： 在光放大装置中，从光放大介质输出的光的一部分通过分支装置传输到光检测装置，从而光检测装置检测光输出的光功率，由此至少一个 激励源和返回装置通过控制装置进行控制，使得来自分支装置的光分支作为返回光通过分支装置在通过返回装置调节光功率的状态下再次返回到光放大介质， 结果，能够将从光放大介质输出的光的光功率保持在期望值，同时抑制光浪涌的发生，光放大介质控制方法和光放大装置，其中信号光 可以通过简单的结构和良好的控制响应抑制光浪涌的发生，并且使用该输入的系统可以放大输入。