公开(公告)号：US20100035053A1

公开(公告)日：2010-02-11

申请号：US12527588

申请日：2008-12-02

申请人： Yukio Kishi ,  Masuo Koyama ,  Masato Saito

发明人： Yukio Kishi ,  Masuo Koyama ,  Masato Saito

IPC分类号： C08F126/06 ,  B32B27/28 ,  B32B27/36

CPC分类号： C08F290/06 ,  C08G18/3853 ,  C08K5/06 ,  C08K5/10 ,  C09D4/00 ,  G02B1/105 ,  G02B1/14 ,  Y10T428/264 ,  Y10T428/265

摘要： A hard coat layer on which adhered fingerprints are inconspicuous is provided. The hard coat layer 1 consists of a cured product. The cured product is formed by curing a curable composition by irradiating it with an ultraviolet ray. The curable composition contains a curable resin. The curable resin contains reactive monomers. The reactive monomers contain an isocyanuric acid derivative. The isocyanuric acid derivative is preferably tri(meth)acrylate of an ethylene oxide and ε-caprolactone adduct of isocyanuric acid.

摘要翻译： 提供粘附指纹不显眼的硬涂层。 硬涂层1由固化产物组成。 固化产物通过用紫外线照射固化可固化组合物而形成。 可固化组合物含有可固化树脂。 可固化树脂含有反应性单体。 反应性单体含有异氰脲酸衍生物。 异氰尿酸衍生物优选为环氧乙烷的三（甲基）丙烯酸酯和异氰脲酸的ε-己内酯加成物。

公开(公告)号：US20090142588A1

公开(公告)日：2009-06-04

申请号：US11917633

申请日：2006-06-16

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Hitoshi Morinaga ,  Yasuhiro Kawase ,  Masafumi Kitano ,  Fumikazu Mizutani ,  Makoto Ishikawa ,  Yukio Kishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Hitoshi Morinaga ,  Yasuhiro Kawase ,  Masafumi Kitano ,  Fumikazu Mizutani ,  Makoto Ishikawa ,  Yukio Kishi

IPC分类号： B32B15/00

CPC分类号： C23C4/02 ,  C23C8/80 ,  C23C28/00 ,  C23C28/042 ,  C25D11/02 ,  C25D11/04 ,  C25D11/08 ,  C25D11/10 ,  C25D11/16 ,  C25D11/18 ,  Y10T428/26 ,  Y10T428/265 ,  Y10T428/31678

摘要： Multifunction production equipment enabling a plurality of processes in which deposition of reaction products on the inner wall of the processing chamber of equipment for producing a semiconductor or a flat-plate display, metal contamination due to corrosion of the inner wall, or the like, and fluctuation of the process due to discharged gas are suppressed, and a protective film structure for use therein. On the surface of a metal material, a first coating layer having an oxide coating of 1μ thick or less formed as an underlying layer by direct oxidation of a parent material, and a second coating layer of about 200 μm thick are formed. With such an arrangement, corrosion resistance against irradiation with ions or radicals can be imparted to a second layer protective film, and the effect of a protective layer for preventing corrosion of the surface of parent metal caused by diffusing molecules or ions into the second layer protective film can be imparted to the first layer oxide film. Consequently, contamination of the substrate with metals generated from each metal member and the inner surface of the process chamber is reduced, and stripping of the second layer protective film due to lowering in adhesion of the second layer protective film due to corrosion of the interface between the parent material and the second layer protective film can be suppressed.

摘要翻译： 多功能生产设备能够实现多个工艺，其中在用于制造半导体或平板显示器的设备的处理室的内壁上沉积反应产物，由于内壁的腐蚀而引起的金属污染等，以及 排出气体的处理的波动被抑制，以及用于其中的保护膜结构。 在金属材料的表面上，形成通过母材直接氧化形成作为下层的1μm厚以下的氧化物被膜的第1被覆层和200μm厚的第2被覆层。 通过这样的布置，可以对第二层保护膜赋予对离子或自由基的照射的耐腐蚀性，以及用于防止母体金属表面由于扩散分子或离子而导致的第二层保护层的腐蚀的保护层的效果 可以将膜施加到第一层氧化物膜。 因此，由金属构件和处理室的内表面产生的金属对衬底的污染减少，并且由于第二层保护膜的粘附性的降低而导致的第二层保护膜的剥离 可以抑制母材和第二层保护膜。

公开(公告)号：US20090133713A1

公开(公告)日：2009-05-28

申请号：US11988648

申请日：2006-07-12

申请人： Tadahiro Ohmi ,  Akinobu Teramoto ,  Hitoshi Morinaga ,  Yukio Kishi ,  Hiromichi Ohtaki ,  Yoshihumi Tsutai

发明人： Tadahiro Ohmi ,  Akinobu Teramoto ,  Hitoshi Morinaga ,  Yukio Kishi ,  Hiromichi Ohtaki ,  Yoshihumi Tsutai

IPC分类号： B08B3/12 ,  B32B5/16

CPC分类号： C23C4/00 ,  B08B3/02 ,  B08B3/12 ,  B08B2203/0288 ,  C23C4/02 ,  C23C4/11 ,  C23C16/405 ,  C23C16/545 ,  C23C26/00 ,  C23C28/04 ,  Y10T428/25 ,  Y10T428/252

摘要： It has been difficult to provide a large-sized ceramic member quickly and economically. A multilayer structure is produced by forming a ceramic film on a base which is made of a material that can be shaped comparatively easily. The ceramic film is formed by a plasma spraying method, CVD method, PVD method, sol-gel method or the like. Alternatively, the ceramic film may be formed by a method combined with a spray deposit film.

摘要翻译： 很难快速，经济地提供大型陶瓷件。 通过在可以相对容易地成形的材料制成的基底上形成陶瓷膜来制造多层结构体。 陶瓷膜通过等离子喷涂法，CVD法，PVD法，溶胶 - 凝胶法等形成。 或者，陶瓷膜可以通过与喷雾沉积膜结合的方法形成。

公开(公告)号：US06651293B2

公开(公告)日：2003-11-25

申请号：US09778902

申请日：2001-02-08

申请人： Yukio Kishi

发明人： Yukio Kishi

IPC分类号： A47L902

CPC分类号： B08B5/04 ,  B08B3/024 ,  B08B2203/0229 ,  E01H1/103

摘要： Cavitation is produced through injection of pressurized water from an injection outlet of an injection nozzle 17a toward the pavement surface in liquid of a liquid storage part T1 formed on the pavement surface. A clogging object in a cavity of a pavement is isolated by impactive force of the cavitation, and the isolated clogging object is removed by suction with water.

摘要翻译： 通过从注射喷嘴17a的喷射出口向路面表面的液体存储部分T1的液体中注入加压水而产生气蚀。 通过空化的冲击力隔离路面空洞中的堵塞物体，用水抽吸除去隔离的堵塞物体。