公开(公告)号：US20050011540A1

公开(公告)日：2005-01-20

申请号：US10917750

申请日：2004-08-12

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B9/08 ,  B08B9/28 ,  H01L21/00 ,  H01L21/673 ,  C23G1/00 ,  B08B7/00

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。

公开(公告)号：US06830057B2

公开(公告)日：2004-12-14

申请号：US10286317

申请日：2002-11-01

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B302

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。

公开(公告)号：US20060203419A1

公开(公告)日：2006-09-14

申请号：US11420591

申请日：2006-05-26

申请人： Kert Dolechek ,  Raymon Thompson

发明人： Kert Dolechek ,  Raymon Thompson

IPC分类号： H01T23/00

CPC分类号： H01L29/06 ,  H01L21/302 ,  H01L21/30604 ,  H01L21/3083 ,  H01L21/67126 ,  H01L21/68735 ,  Y10S438/959

摘要： The present invention provides system and apparatus for use in processing wafers. The new system and apparatus allows for the production of thinner wafers that at same time remain strong. As a result, the wafers produced by the present process are less susceptible to breaking. The unique system also offers an improved structure for handling thinned wafers and reduces the number of processing steps. This results in improved yields and improved process efficiency.

公开(公告)号：US20060118515A1

公开(公告)日：2006-06-08

申请号：US10923363

申请日：2004-08-20

申请人： Kert Dolechek ,  Raymon Thompson

发明人： Kert Dolechek ,  Raymon Thompson

IPC分类号： B44C1/22 ,  H01L21/302

CPC分类号： H01L21/6835 ,  H01L2924/3025

摘要： Abstract of the DisclosureThe present invention provides an apparatus and method for use in processing semiconductor workpieces. The new apparatus and method allows for the production of thinner workpieces that at the same time remain strong. Particularly, a chuck is provided that includes a body, a retainer removeably attached to the body and a seal forming member. When a workpiece is placed on the chuck body and the retainer is engaged to the body, a peripheral portion of the back side of the workpiece is covered by the retainer while an interior region of the back side of the workpiece is exposed. The exposed back side of the workpiece is then subjected to a wet chemical etching process to thin the workpiece and form a relatively thick rim comprised of semiconductor material at the periphery of the workpiece. The thick rim or hoop imparts strength to the otherwise fragile, thinned semiconductor workpiece. Semiconductor workpieces made according to the present invention offer an improved structure for handling thinned wafers in conventional automated equipment. This results in improved yields and improved process efficiency.

摘要翻译： 发明内容本发明提供一种用于处理半导体工件的装置和方法。 新的设备和方法允许生产更薄的工件，同时保持坚固。 特别地，提供一种卡盘，其包括主体，可移除地附接到主体的保持器和密封形成构件。 当将工件放置在卡盘主体上并且保持器与主体接合时，工件后侧的周边部分被保持器覆盖，同时工件后侧的内部区域被暴露。 然后将工件的暴露的背面进行湿化学蚀刻工艺以使工件变薄，并在工件的周边形成由半导体材料组成的相对较厚的边缘。 较厚的边缘或箍将其强度提升到其他脆弱的，变薄的半导体工件。 根据本发明制造的半导体工件提供了用于在常规自动化设备中处理薄化晶片的改进的结构。 这导致产量提高和工艺效率提高。

公开(公告)号：US20060040086A1

公开(公告)日：2006-02-23

申请号：US10923132

申请日：2004-08-20

申请人： Kert Dolechek ,  Raymon Thompson

发明人： Kert Dolechek ,  Raymon Thompson

IPC分类号： B32B3/02 ,  B32B13/04 ,  H01L29/12

CPC分类号： H01L21/68721 ,  H01L21/67126 ,  Y10T428/12528 ,  Y10T428/21 ,  Y10T428/219

摘要： The present invention provides an apparatus and method for use in processing semiconductor workpieces. The new apparatus and method allows for the production of thinner workpieces that at the same time remain strong. Particularly, a chuck is provided that includes a body, a retainer removeably attached to the body and a seal forming member. When a workpiece is placed on the chuck body and the retainer is engaged to the body, a peripheral portion of the back side of the workpiece is covered by the retainer while an interior region of the back side of the workpiece is exposed. The exposed back side of the workpiece is then subjected to a wet chemical etching process to thin the workpiece and form a relatively thick rim comprised of semiconductor material at the periphery of the workpiece. The thick rim or hoop imparts strength to the otherwise fragile, thinned semiconductor workpiece. Semiconductor workpieces made according to the present invention offer an improved structure for handling thinned wafers in conventional automated equipment. This results in improved yields and improved process efficiency.

摘要翻译： 本发明提供一种用于处理半导体工件的装置和方法。 新的设备和方法允许生产更薄的工件，同时保持坚固。 特别地，提供一种卡盘，其包括主体，可移除地附接到主体的保持器和密封形成构件。 当将工件放置在卡盘主体上并且保持器与主体接合时，工件后侧的周边部分被保持器覆盖，同时工件后侧的内部区域被暴露。 然后将工件的暴露的背面进行湿化学蚀刻工艺以使工件变薄，并在工件的周边形成由半导体材料组成的相对较厚的边缘。 较厚的边缘或箍将其强度提升到其他脆弱的，变薄的半导体工件。 根据本发明制造的半导体工件提供了用于在常规自动化设备中处理薄化晶片的改进的结构。 这导致产量提高和工艺效率提高。

公开(公告)号：US20050035046A1

公开(公告)日：2005-02-17

申请号：US10860384

申请日：2004-06-03

申请人： Kyle Hanson ,  Kert Dolechek

发明人： Kyle Hanson ,  Kert Dolechek

IPC分类号： B01D63/00 ,  C23F1/00 ,  C25D17/00 ,  G01M3/04

CPC分类号： H01L21/6723 ,  B01D61/425 ,  C25D17/00 ,  H01L21/67005 ,  H01L21/6719 ,  H01L21/67742 ,  H01L21/68707

摘要： A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing component disposed in the fixed unit and/or the detachable unit. The fixed unit can have a first flow system configured to direct a processing fluid through the fixed unit and a mounting fixture for fixedly attaching the fixed unit to a platform or deck of an integrated processing tool. The detachable unit can include a second flow system configured to direct the processing fluid to and/or from the first flow system of the fixed unit. The seal has an orifice through which processing fluid can flow between the first and second flow systems, and the processing component can impart a property to the processing fluid for processing a surface on a microfeature workpiece having submicron microfeatures.

公开(公告)号：US06536450B1

公开(公告)日：2003-03-25

申请号：US09372849

申请日：1999-08-12

申请人： Kert Dolechek

发明人： Kert Dolechek

IPC分类号： B08B310

CPC分类号： H01L21/67098 ,  A61K31/55 ,  A61K31/575 ,  A61K31/585 ,  A61K45/06 ,  F24H1/162 ,  Y10S134/902 ,  A61K2300/00

摘要： A system for heating solvents in processing semiconductor wafers has a coiled solvent tube, a coiled cooling water tube, and electric heater elements, cast in place within an aluminum casting. The solvent flows through the solvent tube and is heated by conduction of heat through the casting. The solvent is safely isolated from the heating elements. Water is pumped through the cooling water tube, to cool the casting if solvent flow is interrupted, or if the measured casting temperature exceeds a predetermined set point temperature. Solvent temperature is maintained by controlling power to the heating elements based on the measured solvent temperature at the processing chamber.

摘要翻译： 用于加热半导体晶片处理溶剂的系统具有卷绕的溶剂管，盘绕的冷却水管和电加热器元件，在铝铸件中铸造就位。 溶剂流过溶剂管，并通过热量通过铸件加热。 溶剂与加热元件安全隔离。 水被泵送通过冷却水管，如果溶剂流动被中断或者测量的铸造温度超过预定的设定点温度，则冷却铸件。 通过根据处理室处测得的溶剂温度控制加热元件的功率来维持溶剂温度。

公开(公告)号：US07060138B2

公开(公告)日：2006-06-13

申请号：US10917750

申请日：2004-08-12

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B3/02

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。

公开(公告)号：US20060040111A1

公开(公告)日：2006-02-23

申请号：US10922762

申请日：2004-08-20

申请人： Kert Dolechek ,  Raymon Thompson

发明人： Kert Dolechek ,  Raymon Thompson

IPC分类号： B32B13/04 ,  B32B9/04

CPC分类号： H01L21/6708 ,  H01L21/67126 ,  H01L21/67313 ,  H01L21/67754

摘要： The present invention provides a system and method for processing batches of semiconductor wafers or workpieces. The system includes placing a batch of workpieces in a carrier that is loaded into a rotor assembly in a process chamber. The process chamber has a two spray manifolds with a dual inlet ports, and radially opposing vent and drain troughs extending from substantially a first end of a chamber body to substantially the second end of the chamber body. In the process chamber a variety of process fluids are sprayed on the workpieces to process the workpieces.

摘要翻译： 本发明提供一种用于处理半导体晶片或工件批次的系统和方法。 该系统包括将一批工件放置在载入到处理室中的转子组件中的载体中。 处理室具有两个具有双入口端口的喷射歧管，以及径向相对的排气槽和排水槽，其从室主体的基本上的第一端延伸到室主体的基本上的第二端。 在处理室中，各种工艺流体喷涂在工件上以处理工件。

公开(公告)号：US06895981B2

公开(公告)日：2005-05-24

申请号：US10200073

申请日：2002-07-19

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： H01L21/00 ,  B08B3/00

CPC分类号： H01L21/67034 ,  H01L21/67028

摘要： A centrifugal processor includes an elongated inlet and outlet in fluid communication with a rotor housing having an eccentric bowl. A rotor having fan blades and adapted to hold flat media is rotatably disposed within the rotor housing. An intake gate is pivotably mounted to the rotor housing to swing about the rotor into a closed position during a rinse mode and into an open position during a drying mode. The gate has a wedge that is designed to almost contact the rotor when the gate is in the open position for drying. The geometry of the elongated inlet, outlet, and eccentric bowl, in combination with the design of the rotor and that of the intake gate, work together to create a cross flow fan having a flow path across the flat media and one that exposes the flat media to large volumes of incoming air only once.

摘要翻译： 离心处理器包括与具有偏心碗的转子壳体流体连通的细长入口和出口。 具有风扇叶片并且适于保持扁平介质的转子可旋转地设置在转子壳体内。 进气门可枢转地安装到转子壳体上，以在冲洗模式期间围绕转子摆动到关闭位置，并且在干燥模式期间进入打开位置。 闸门具有楔形件，当楔门处于打开位置进行干燥时，该楔形件设计成几乎接触转子。 细长的入口，出口和偏心碗的几何结构与转子的设计和进气门的几何结合在一起，以形成横流式风扇，该横流式风扇具有穿过平面介质的流动路径， 媒体大量进入空气只有一次。