公开(公告)号：US11060917B2

公开(公告)日：2021-07-13

申请号：US16203648

申请日：2018-11-29

Applicant: Keyence Corporation

Inventor： Shoma Kuga

IPC: G01J3/45 ,  G01B11/00 ,  G01B11/06 ,  G01J3/52 ,  G01J3/02 ,  G02B6/42 ,  G02B6/38 ,  G01J3/46 ,  G01D5/26 ,  G02B6/36 ,  G02B6/24

Abstract: Provided are a multi-wavelength photoelectric measurement device, a confocal measurement device, an interference measurement device, and a color measurement device capable of measuring the characteristic amount of a measurement object such as the thickness, distance, displacement, or color with high accuracy using multi-wavelength light such as white light. The multi-wavelength photoelectric measurement device includes a laser light source, a light source optical member for concentrating light from the laser light source, a phosphor excited by light concentrated by the light source optical member, an optical fiber unit that includes one or a plurality of optical fibers and the phosphor disposed on a first end, receives light emitted by the phosphor from the first end, and transmits the received light toward a second end, and a head optical member that concentrates light emitted from the second end of the optical fiber unit toward a measurement object.

公开(公告)号：US10591280B2

公开(公告)日：2020-03-17

申请号：US16364209

申请日：2019-03-26

Applicant: Keyence Corporation

Inventor： Suketaka Fujimoto ,  Hideto Takei ,  Yohei Masuguchi ,  Shoma Kuga

IPC: G01B11/06

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

公开(公告)号：US20190204071A1

公开(公告)日：2019-07-04

申请号：US16296264

申请日：2019-03-08

Applicant: Keyence Corporation

Inventor： Shoma Kuga

IPC: G01B11/06 ,  G01B11/00 ,  G01D5/34

CPC classification number: G01B11/0608 ,  G01B11/00 ,  G01B11/002 ,  G01B2210/50 ,  G01D5/268 ,  G01D5/34

Abstract: To provide a confocal displacement sensor capable of easily and accurately measuring displacement of a measurement object. Light having a chromatic aberration is converged by a lens unit 220 and irradiated on a measurement object S from a measurement head 200. Light having a wavelength reflected while focusing on the surface of the measurement object S passes through the optical fiber 314 in the measurement head 200. The light passed through the optical fiber 314 is guided to a spectral section 130 in a processing device 100 and spectrally dispersed. In the processing device 100, the light spectrally dispersed by the spectral section 130 is received by a light receiving section 140. A light reception signal output from the light receiving section 140 is acquired by a control section 152. The control section 152 measures displacement on the basis of the acquired light reception signal and gives the light reception signal to a PC 600 on the outside. A CPU 601 of the PC 600 causes a display section 700 to display, as change information, a change from a light reception signal acquired at a point in time before a present point in time to a light reception signal acquired at the present point in time.

公开(公告)号：US10267621B2

公开(公告)日：2019-04-23

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/14 ,  G01B11/02 ,  G02B21/00 ,  G01B9/02

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.

公开(公告)号：US10260859B2

公开(公告)日：2019-04-16

申请号：US15989215

申请日：2018-05-25

Applicant: Keyence Corporation

Inventor： Shoma Kuga

IPC: G01B11/06 ,  G01D5/26 ,  G01B11/00

Abstract: To provide a confocal displacement sensor capable of reducing a measurement error. Light having a plurality of wavelengths is emitted by a light processing section 120. A chromatic aberration along an optical axis direction is caused by a lens unit 220 in the light emitted by the light projecting section 120. The light having the chromatic aberration converged and irradiated on a measurement object S by the lens unit 220. In the light irradiated on the measurement object S by the lens unit 220, light having a wavelength reflected while focusing on the surface of the measurement object S passes through a plurality of pinholes. Displacement of the measurement object S is calculated by an arithmetic processing section 150 on the basis of signal intensity for each wavelength of an average signal corresponding to an average of intensities for each wavelength concerning a plurality of lights passed through the plurality of pinholes.

公开(公告)号：US20170122808A1

公开(公告)日：2017-05-04

申请号：US15375190

申请日：2016-12-12

Applicant: Keyence Corporation

Inventor： Shoma Kuga

IPC: G01J3/45 ,  G01B11/06 ,  G01D5/26 ,  G01J3/46

CPC classification number: G01J3/45 ,  G01B11/00 ,  G01B11/06 ,  G01D5/266 ,  G01J3/0218 ,  G01J3/46 ,  G01J3/52

Abstract: Provided are a multi-wavelength photoelectric measurement device, a confocal measurement device, an interference measurement device, and a color measurement device capable of measuring the characteristic amount of a measurement object such as the thickness, distance, displacement, or color with high accuracy using multi-wavelength light such as white light. The multi-wavelength photoelectric measurement device includes a laser light source, a light source optical member for concentrating light from the laser light source, a phosphor excited by light concentrated by the light source optical member, an optical fiber unit that includes one or a plurality of optical fibers and the phosphor disposed on a first end, receives light emitted by the phosphor from the first end, and transmits the received light toward a second end, and a head optical member that concentrates light emitted from the second end of the optical fiber unit toward a measurement object.