Non-contacting resistivity instrument with structurally related
conductance and distance measuring transducers
    11.
    发明授权
    Non-contacting resistivity instrument with structurally related conductance and distance measuring transducers 失效
    具有结构相关电导和距离测量传感器的非接触电阻率仪器

    公开(公告)号:US4302721A

    公开(公告)日:1981-11-24

    申请号:US39303

    申请日:1979-05-15

    摘要: An instrument for computing resistivity based upon measurements of thickness and conductance. A conductance transducer is a solenoid in an annular ferrite cup connected to a tank circuit for an eddy current measurement of conductance. Within the center of the annular ferrite cup concentric acoustic wave sending and receiving channels are disposed for making an acoustic pressure wave measurement which is used for a thickness measurement using two gauge heads, spaced on opposite sides of an article to be measured. Each gauge head contains identical conductance and thickness transducers. The thickness measurement is divided by the conductance measurement to derive resistivity.

    摘要翻译: 基于厚度和电导测量计算电阻率的仪器。 电导传感器是连接到用于电导涡流测量的电路的环形铁氧体杯中的螺线管。 在环形铁氧体杯的中心内,设置同心声波发送和接收通道,用于进行声压测量,其用于使用两个测量头进行厚度测量,间隔在待测物品的相对两侧。 每个测量头包含相同的电导和厚度换能器。 厚度测量除以电导测量以导出电阻率。

    Generating a logic design
    14.
    发明授权

    公开(公告)号:US06983427B2

    公开(公告)日:2006-01-03

    申请号:US09942102

    申请日:2001-08-29

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5045 G06F17/5022

    摘要: A technique to generate a logic design for use in designing an integrated circuit (IC). The technique includes embedding a combinatorial one-dimensional logic block within a two-dimensional schematic presentation to form a unified database. The technique also includes following a set of design capture rules, importing the combinatorial one-dimensional logic block, and notifying a designer when importing the combinatorial data block violates the set of design capture rules.

    Constant-force profilometer with stylus-stabilizing sensor assembly,
dual-view optics, and temperature drift compensation
    16.
    发明授权
    Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation 失效
    恒力轮廓仪带触笔稳定传感器组件,双视光学元件和温度漂移补偿

    公开(公告)号:US5705741A

    公开(公告)日:1998-01-06

    申请号:US362818

    申请日:1994-12-22

    IPC分类号: G01B3/00 G01B7/34 G01B5/28

    CPC分类号: G01B3/008 G01B7/34

    摘要: A profilometer has a constant force mechanism for biasing of the stylus arm. The mechanism has a centrally-aligned configuration of the moving magnet relative to the magnetic coil and also has a magnetic shield isolating these elements from other ferromagnetic materials in the assembly. The moving magnet is made of a material that is hard magnetically and the magnetic shield is made of a series of low hysteresis, high permeability materials. The force thus generated by the stylus biasing device is very linear with the drive current upon the magnetic coil at any particular position of the stylus, thereby allowing for control and predictability of the stylus force upon the surface to be profiled. This predictability is used for dynamic stylus force adjustments during profiling of a specimen. The profilometer is also equipped with a balanced, spring-loaded stylus-stabilizing sensor assembly, task-specific dual-view optics for protection of the delicate stylus assembly, and a temperature drift compensator.

    摘要翻译: 轮廓仪具有用于偏置触针臂的恒力机构。 该机构具有相对于电磁线圈的移动磁体的中心对准配置,并且还具有将这些元件与组件中的其它铁磁材料隔离的磁屏蔽。 移动磁铁由硬磁材料制成,磁屏蔽由一系列低磁滞,高磁导率材料制成。 由触针偏置装置产生的力与在触控笔的任何特定位置处的磁性线圈上的驱动电流非常线性,从而允许在要被刻蚀的表面上的触针力的控制和可预测性。 这种可预测性用于在样品成型期间的动态触针力调节。 轮廓仪还配备有平衡的弹簧加载的触控笔稳定传感器组件,用于保护精巧触针组件的任务特定双视点光学元件和温度漂移补偿器。

    Wafer chuck with wafer cleaning feature
    17.
    发明授权
    Wafer chuck with wafer cleaning feature 失效
    晶圆夹头采用晶圆清洗功能

    公开(公告)号:US4433835A

    公开(公告)日:1984-02-28

    申请号:US325688

    申请日:1981-11-30

    摘要: A wafer chuck and a wafer loading and unloading system wherein a flat support surface of the chuck has a plurality of peaks and valleys, with the peaks minimizing contact with the wafer, yet having sufficient contact area for wafer support without deformation. The peaks are provided with a top edge serving to dislodge particles from a wafer surface when loading the wafer onto the chuck. The loading system includes wafer pushing members for bringing a wafer to a desired position on the support surface.

    摘要翻译: 晶片卡盘和晶片装载和卸载系统,其中卡盘的平坦支撑表面具有多个峰和谷,其中峰最小化与晶片的接触,但是对于晶片支撑没有变形具有足够的接触面积。 顶部设置有顶部边缘,用于在将晶片装载到卡盘上时从晶片表面移除颗粒。 装载系统包括用于将晶片带到支撑表面上所需位置的晶片推动构件。

    Acoustic method and apparatus for measuring surfaces of wafers and
similar articles
    18.
    发明授权
    Acoustic method and apparatus for measuring surfaces of wafers and similar articles 失效
    用于测量晶片和类似物品的表面的声学方法和装置

    公开(公告)号:US4280354A

    公开(公告)日:1981-07-28

    申请号:US120932

    申请日:1980-02-12

    IPC分类号: G01B17/08 G10K11/35 G01N29/00

    CPC分类号: G10K11/355 G01B17/08

    摘要: A measurement system wherein an acoustic distance measuring transducer is moved over a flat reference surface, measuring the distance from the transducer to a calibration surface and then to a test surface. The transducer is moved along a path within a ring while the top edge of the ring is used to support the calibration surface and then the test surface. The ring is mounted for rotation so that the transducer can scan a supported surface at a locus of points. Scans across the calibration surface and then the test surface are compared to measure deviations of the test surface from calibration surface.

    摘要翻译: 一种测量系统,其中声学距离测量传感器在平坦的参考表面上移动,测量从换能器到校准表面的距离,然后测量到测试表面。 传感器沿着环内的路径移动,而环的顶部边缘用于支撑校准表面,然后测试表面。 环安装为旋转,以便换能器可以在点的轨迹扫描受支撑的表面。 扫描校准表面,然后将测试表面进行比较,以测量测试表面与校准表面的偏差。

    Gauge for measuring distance to planar surfaces and thicknesses of
planar members
    19.
    发明授权
    Gauge for measuring distance to planar surfaces and thicknesses of planar members 失效
    用于测量平面表面距离和平面构件厚度的量具

    公开(公告)号:US4175441A

    公开(公告)日:1979-11-27

    申请号:US903493

    申请日:1978-05-08

    CPC分类号: G01R31/2648 G01S15/32

    摘要: Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.

    摘要翻译: 用于通过感测测量头孔口附近的声压测量仪表头孔和物体的前平面之间的距离的装置。 声压最初由音频振荡器产生,该音频振荡器激活通过第一孔口发出声波的扬声器。 通过靠近第一孔的第二孔检测声压,并将压力转换成电信号,该信号被处理以产生显示器的距离信号。 使用在已知距离处的平面构件的相对侧上间隔开的两个相似的距离计,以计算平面构件的厚度。

    High vacuum gate valve
    20.
    发明授权
    High vacuum gate valve 失效
    高真空闸阀

    公开(公告)号:US4044993A

    公开(公告)日:1977-08-30

    申请号:US652038

    申请日:1976-01-26

    CPC分类号: F16K51/02 F16K3/10 F16K3/186

    摘要: Gate valve having a closure member mounted on a swinging arm pivotally mounted for movement transversely of the axis of the valve openings. A wedge member carried by the arm drives the closure member in a direction parallel to the axis of the openings when moved longitudinally of the arm. An actuator pivots a cam which bears against the wedge member to swing the arm to a predetermined position in which the closure member is aligned with the openings and thereafter to move the cam to drive the closure member axially and seal one of the openings. Resilient members urge the closure member toward its retracted position and prevent the wedge member from moving forward until the arm reaches the predetermined position.

    摘要翻译: 闸阀具有安装在摆动臂上的闭合构件,所述摆动臂枢转地安装成用于横向于阀开口的轴线移动。 由臂支撑的楔形构件在臂的纵向移动时沿着平行于开口的轴线的方向驱动闭合构件。 致动器枢转凸轮,该凸轮支撑在楔形构件上,以将臂摆动到预定位置,在该位置闭合构件与开口对准,然后移动凸轮以轴向驱动闭合构件并密封其中一个开口。 弹性构件将闭合构件推向其缩回位置,并防止楔构件向前移动,直到臂到达预定位置。