公开(公告)号：US07038892B2

公开(公告)日：2006-05-02

申请号：US10674831

申请日：2003-09-30

申请人： Phong V. Chau ,  James Mac Freitag ,  Mustafa Michael Pinarbasi ,  Hua Ai Zeng ,  Howard Gordon Zolla

发明人： Phong V. Chau ,  James Mac Freitag ,  Mustafa Michael Pinarbasi ,  Hua Ai Zeng ,  Howard Gordon Zolla

IPC分类号： G11B5/39

CPC分类号： G11B5/3932

摘要： An apparatus having improved hard bias properties of layers of a magnetoresistance sensor is disclosed. Properties of the hard bias layer are improved using a seedlayer structure that includes at least a layer of silicon and a layer comprising chromium or chromium molybdenum. Further, benefits are achieved when the seedlayer structure includes a layer of tantalum.

摘要翻译： 公开了一种具有改进的磁阻传感器层的硬偏置特性的装置。 使用包括至少一层硅层和包含铬或铬钼的层的种子层结构来改善硬偏置层的性质。 此外，当种子层结构包括一层钽时，实现了益处。

公开(公告)号：US06972928B2

公开(公告)日：2005-12-06

申请号：US10898799

申请日：2004-07-26

申请人： Clinton David Snyder ,  Howard Gordon Zolla ,  Hong Xu ,  James Bernard Kruger

发明人： Clinton David Snyder ,  Howard Gordon Zolla ,  Hong Xu ,  James Bernard Kruger

IPC分类号： G11B5/31 ,  G11B5/235 ,  G11B5/23

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032

摘要： An isotropic deposition method for trench narrowing of thin film magnetic write head features to be created by reactive ion etching. According to the method, a photolithographically defined photoresist trench is formed over a hardmask and underlying polymer layer as part of tri-layer resist process. Instead of performing the usual hardmask and polymer etching steps using the photoresist mask pattern, a spacer layer is deposited isotropically or directionally at an angle to cover the vertical side walls of the trench. The spacer layer is etchable by the hardmask etch process but resistant to the polymer etch process. When the hardmask etch process is performed, the spacer layer material applied to the trench side walls remains intact, thereby defining a narrowed trench that is extended by the subsequent base layer etch process.

公开(公告)号：US06909674B2

公开(公告)日：2005-06-21

申请号：US10460836

申请日：2003-06-11

申请人： Yongho Ju ,  Michael Salo ,  Howard Gordon Zolla

发明人： Yongho Ju ,  Michael Salo ,  Howard Gordon Zolla

IPC分类号： G11B5/31 ,  G11B5/00 ,  G11B5/012 ,  G11B5/02 ,  G11B5/127 ,  G11B5/39 ,  G11B11/00

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/012 ,  G11B5/02 ,  G11B5/127 ,  G11B5/3133 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A magnetic head system, and method for manufacturing a magnetic head are provided. Included is at least one layer and a heating element positioned adjacent the at least one layer. The at least one layer includes a plurality of sub-layers for providing an optimal thermal barrier.

摘要翻译： 提供一种磁头系统，以及制造磁头的方法。 包括至少一层和邻近该至少一层定位的加热元件。 至少一层包括用于提供最佳热障的多个子层。

公开(公告)号：US06862798B2

公开(公告)日：2005-03-08

申请号：US10054621

申请日：2002-01-18

申请人： James Bernard Kruger ,  Benjamin Lu chen Wang ,  Patrick Rush Webb ,  Howard Gordon Zolla

发明人： James Bernard Kruger ,  Benjamin Lu chen Wang ,  Patrick Rush Webb ,  Howard Gordon Zolla

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1272 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/4906

摘要： A method of making a magnetic head assembly wherein the magnetic head assembly has a write head with a pole tip includes the steps of forming a shaping layer on an underlying layer wherein the shaping layer has a side surface and a top surface, ion beam sputter depositing a ferromagnetic material layer on the underlying layer and on the side and top surfaces of the shaping layer and removing first and second portions of the ferromagnetic material layer from the underlying layer and the top surface of the shaping layer, respectively, leaving a remaining portion of the ferromagnetic material layer on the side surface of the shaping layer which is the aforementioned pole tip.

摘要翻译： 一种制造磁头组件的方法，其中磁头组件具有带磁极端头的写入头包括以下步骤：在下层上形成成形层，其中成形层具有侧表面和顶表面，离子束溅射沉积 在成形层的下层和侧表面和顶表面上的铁磁材料层，分别从成形层的下层和顶表面去除铁磁材料层的第一和第二部分，留下剩余部分 作为上述极尖的成形层的侧面上的铁磁材料层。

公开(公告)号：US06842306B2

公开(公告)日：2005-01-11

申请号：US10284988

申请日：2002-10-31

申请人： Marie-Claire Cyrille ,  Wen-Chien David Hsiao ,  Yongho Sungtaek Ju ,  Wen-Yaung Lee ,  Stefan Maat ,  Howard Gordon Zolla

发明人： Marie-Claire Cyrille ,  Wen-Chien David Hsiao ,  Yongho Sungtaek Ju ,  Wen-Yaung Lee ,  Stefan Maat ,  Howard Gordon Zolla

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/235

CPC分类号： G11B5/3906

摘要： A magnetic head has highly thermally conductive insulator materials containing cobalt-oxide so that heat can more effectively dissipate from the magnetic head. In one illustrative example, the magnetic head has first and second gap layers and a read sensor disposed between the first and the second gap layers. The first and the second gap layers are advantageously made of cobalt-oxide (CoOx) (e.g. CoO or Co2O3), which may exhibit a thermal conductivity of between 5-8 watts/meter-Kelvin or greater. In another illustrative example, a magnetic head is made of a substrate; first and second shield layers; an undercoat layer formed between the substrate and the first shield layer; first and second gap layers formed between the first and the second shield layers; and a read sensor formed between the first and the second gap layers. The undercoat layer is also made of CoOx. The improved dissipation of heat from the magnetic head improves the read sensor performance and reduces the likelihood of other problems, such as head-to-disk interface problems.

摘要翻译： 磁头具有含有氧化钴的高导热绝缘体材料，使得热量可以更有效地从磁头中消散。 在一个说明性示例中，磁头具有第一和第二间隙层以及设置在第一间隙层和第二间隙层之间的读取传感器。 第一和第二间隙层有利地由氧化钴（CoO x）（例如CoO或Co 2 O 3）制成，其可以表现出5-8瓦/米 - 开尔文或更高的热导率。 在另一示例性实例中，磁头由衬底制成; 第一和第二屏蔽层; 形成在所述基板和所述第一屏蔽层之间的底涂层; 形成在第一和第二屏蔽层之间的第一和第二间隙层; 以及形成在第一间隙层和第二间隙层之间的读取传感器。 底涂层也由CoOx制成。 来自磁头的热量的改善消耗提高了读取传感器的性能，并降低了其他问题的可能性，例如磁头到磁盘的接口问题。

公开(公告)号：US07742258B2

公开(公告)日：2010-06-22

申请号：US11707524

申请日：2007-02-12

申请人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

发明人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032

摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

摘要翻译： 描述了制造具有梯形极片尖端的磁头的方法。 主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

公开(公告)号：US20080100970A1

公开(公告)日：2008-05-01

申请号：US11554469

申请日：2006-10-30

申请人： Satoru Araki ,  John Contreras ,  Klaas Berend Klaassen ,  Ramona Marie Patterson ,  David John Seagle ,  Howard Gordon Zolla

发明人： Satoru Araki ,  John Contreras ,  Klaas Berend Klaassen ,  Ramona Marie Patterson ,  David John Seagle ,  Howard Gordon Zolla

IPC分类号： G11B5/33

CPC分类号： G11B5/1278

摘要： A current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) read head structure has the MR read head located between first and second shields (S1, S2) on a substrate with a shunt resistor R1 connecting S1 to the substrate and a shunt resistor R2 connecting S2 to the substrate, with R1 and R2 being approximately equal. Because R1 and R2 are close enough in value there is no significant interference pickup in the low frequency region. The shunt resistors can be formed from high-resistivity metal nitrides or cermets. The spacing between the substrate and S1 may be selected to make the capacitance between S1 and the substrate approximately equal to the capacitance between S2 and the substrate to substantially reduce interference pickup in the high frequency region. Equalization conductors (EC1, EC2) may be connected to the substrate and spaced from S2 and S1, respectively, by electrically insulating material to create additional capacitances with values selected to substantially equalize the total parasitic capacitance on S2 with the total parasitic capacitance on S1.

摘要翻译： 电流垂直于平面（CPP）磁阻（MR）读头结构具有位于衬底上的第一和第二屏蔽（S1，S2）之间的MR读取头，其中分流电阻器R 1连接S 1 并将R 2和R 2近似相等的分流电阻R 2与S 2连接。 由于R 1和R 2的值足够接近，所以在低频区域中没有显着的干扰拾取。 分流电阻可由高电阻金属氮化物或金属陶瓷形成。 可以选择衬底和S 1之间的间隔，以使S 1和衬底之间的电容大致等于S 2与衬底之间的电容，以显着降低高频区域中的干扰拾取。 均衡导体（EC 1，EC 2）可以分别连接到衬底，并且通过电绝缘材料分别与S 2和S 1隔开，以产生额外的电容，其值被选择为使S 2上的总寄生电容基本上相等于总共 S 1上的寄生电容。

公开(公告)号：US07340824B2

公开(公告)日：2008-03-11

申请号：US10883141

申请日：2004-06-30

申请人： Michael Feldbaum ,  John I. Kim ,  Murali Ramasubramanian ,  Howard Gordon Zolla

发明人： Michael Feldbaum ,  John I. Kim ,  Murali Ramasubramanian ,  Howard Gordon Zolla

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/127 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A first magnetic shield layer of the read head sensor is deposited upon a slider substrate surface. A patterned photoresist is then photolithographically fabricated upon the first magnetic shield layer with openings that are formed alongside the location at which the read sensor will be fabricated. An ion milling step is performed to create pockets within the surface of the magnetic shield layer at the location of the openings in the photoresist layer. The photoresist layer is then removed, and a fill layer is deposited across the surface of the magnetic shield layer in a depth greater than the depth of the pocket. Thereafter, a polishing step is conducted to remove portions of the fill layer down to the surface of the magnetic shield layer. A G1 insulation layer is deposited and a magnetic head sensor element is then fabricated upon the insulation layer.

摘要翻译： 读头传感器的第一磁屏蔽层沉积在滑块基板表面上。 然后将图案化的光致抗蚀剂光刻地制造在具有开口的第一磁屏蔽层上，该开口沿着读取传感器将被制造的位置形成。 执行离子铣削步骤以在光致抗蚀剂层中的开口的位置处在磁屏蔽层的表面内产生凹坑。 然后去除光致抗蚀剂层，并且以大于凹穴深度的深度横跨磁屏蔽层的表面沉积填充层。 此后，进行抛光步骤以将填充层的部分向下移动到磁屏蔽层的表面。 沉积G 1绝缘层，然后在绝缘层上制造磁头传感器元件。

公开(公告)号：US06934121B2

公开(公告)日：2005-08-23

申请号：US10684035

申请日：2003-10-09

申请人： Robert Dennis Miller ,  Alfred Floyd Renaldo ,  Willi Volksen ,  Howard Gordon Zolla

发明人： Robert Dennis Miller ,  Alfred Floyd Renaldo ,  Willi Volksen ,  Howard Gordon Zolla

IPC分类号： G11B5/31 ,  G11B5/147

CPC分类号： G11B5/3106 ,  G11B5/3116 ,  G11B5/3163

摘要： A process for planarizing a patterned metal structure for a magnetic thin film head includes the steps of applying an encapsulation/planarizing material on a substrate, spinning the substrate in a photoresist spinner or similar machine, curing the encapsulation/planarizing layer by energetic particles such as an electron beam. The planarizing process further comprises the step of polishing the entire structure using a conventional chemical-mechanical polishing step. The curing step takes place at the substrate temperature less than 200° C., which prevents the damages of the thin film head structures such as MR and GMR sensors. This process is cheap, efficient and easy to apply.

摘要翻译： 用于平坦化用于磁性薄膜头的图案化金属结构的方法包括以下步骤：在衬底上施加封装/平面化材料，将衬底旋转在光致抗蚀剂旋涂器或类似机器中，通过高能粒子固化封装/平坦化层，例如 电子束。 平面化处理还包括使用常规化学机械抛光步骤对整个结构进行抛光的步骤。 固化步骤在低于200℃的基板温度下进行，这防止了诸如MR和GMR传感器的薄膜头结构的损坏。 这个过程便宜，高效，易于应用。

公开(公告)号：US07649712B2

公开(公告)日：2010-01-19

申请号：US11116753

申请日：2005-04-27

申请人： Quang Le ,  Nian-Xiang Sun ,  Howard Gordon Zolla

发明人： Quang Le ,  Nian-Xiang Sun ,  Howard Gordon Zolla

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/1475 ,  G11B5/23 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A write element for use in perpendicular magnetic recording. The write element including a write pole and a self aligned wrap around shield that can have a trailing shield gap thickness that is different from its side shield gap thickness. The materials making up the trailing shield gap and the side shield gaps can be different materials or can be the same material deposited in two different steps. The side or wrap around portions of the trailing shield can extend down to the level of the leading edge of the write pole or can terminate at some point between the levels of the leading and trailing edge to form a partial wrap around trailing shield.

摘要翻译： 用于垂直磁记录的写入元件。 写入元件包括写入极和自对准的围绕屏蔽的外壳，其可以具有与其侧屏蔽间隙厚度不同的后屏蔽间隙厚度。 构成后屏蔽间隙和侧屏蔽间隙的材料可以是不同的材料，或者可以是在两个不同步骤中沉积的相同材料。 后挡板的侧面或环绕的部分可以向下延伸到写柱的前缘的水平面，或者可以在前缘和后缘的水平面之间的某个点处终止，以形成围绕后挡板的部分包裹。