公开(公告)号：US06842306B2

公开(公告)日：2005-01-11

申请号：US10284988

申请日：2002-10-31

申请人： Marie-Claire Cyrille ,  Wen-Chien David Hsiao ,  Yongho Sungtaek Ju ,  Wen-Yaung Lee ,  Stefan Maat ,  Howard Gordon Zolla

发明人： Marie-Claire Cyrille ,  Wen-Chien David Hsiao ,  Yongho Sungtaek Ju ,  Wen-Yaung Lee ,  Stefan Maat ,  Howard Gordon Zolla

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/235

CPC分类号： G11B5/3906

摘要： A magnetic head has highly thermally conductive insulator materials containing cobalt-oxide so that heat can more effectively dissipate from the magnetic head. In one illustrative example, the magnetic head has first and second gap layers and a read sensor disposed between the first and the second gap layers. The first and the second gap layers are advantageously made of cobalt-oxide (CoOx) (e.g. CoO or Co2O3), which may exhibit a thermal conductivity of between 5-8 watts/meter-Kelvin or greater. In another illustrative example, a magnetic head is made of a substrate; first and second shield layers; an undercoat layer formed between the substrate and the first shield layer; first and second gap layers formed between the first and the second shield layers; and a read sensor formed between the first and the second gap layers. The undercoat layer is also made of CoOx. The improved dissipation of heat from the magnetic head improves the read sensor performance and reduces the likelihood of other problems, such as head-to-disk interface problems.

摘要翻译： 磁头具有含有氧化钴的高导热绝缘体材料，使得热量可以更有效地从磁头中消散。 在一个说明性示例中，磁头具有第一和第二间隙层以及设置在第一间隙层和第二间隙层之间的读取传感器。 第一和第二间隙层有利地由氧化钴（CoO x）（例如CoO或Co 2 O 3）制成，其可以表现出5-8瓦/米 - 开尔文或更高的热导率。 在另一示例性实例中，磁头由衬底制成; 第一和第二屏蔽层; 形成在所述基板和所述第一屏蔽层之间的底涂层; 形成在第一和第二屏蔽层之间的第一和第二间隙层; 以及形成在第一间隙层和第二间隙层之间的读取传感器。 底涂层也由CoOx制成。 来自磁头的热量的改善消耗提高了读取传感器的性能，并降低了其他问题的可能性，例如磁头到磁盘的接口问题。

公开(公告)号：US08320078B1

公开(公告)日：2012-11-27

申请号：US13408213

申请日：2012-02-29

申请人： Alexander M. Zeltser ,  Stefan Maat ,  Wen-Chien David Hsiao

发明人： Alexander M. Zeltser ,  Stefan Maat ,  Wen-Chien David Hsiao

IPC分类号： G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/147 ,  G11B5/3116 ,  G11B5/3146

摘要： A perpendicular magnetic recording write head has an improved antiparallel-coupled laminated main pole (MP) with a tapered trailing edge. The laminated MP has three ferromagnetic layers and two non-magnetic antiparallel-coupling (APC) layers. A first ferromagnetic layer (FM1) has a thickness T1 and a planar end face at the air-bearing surface (ABS). A second ferromagnetic layer (FM2) has a total thickness T2 and includes a first portion with a thickness T4 that has an end face coplanar with the end face of FM1 and a second portion with a tapered end face. A first APC layer separates FM1 and FM2. A third ferromagnetic layer (FM3) has a thickness T3 and a tapered end face that is coplanar with the tapered end face of FM2. A second APC layer separates FM2 and FM3. The net flux is minimized at both the ABS and at MP cross-sections recessed from the ABS.

摘要翻译： 垂直磁记录写头具有改进的具有锥形后缘的反并联耦合层叠主极（MP）。 层压MP具有三个铁磁层和两个非磁性反平行耦合（APC）层。 第一铁磁层（FM1）具有厚度T1和空气轴承表面（ABS）处的平坦端面。 第二铁磁层（FM2）具有总厚度T2，并且包括具有与FM1的端面共面的端面的厚度T4的第一部分和具有锥形端面的第二部分。 第一APC层分离FM1和FM2。 第三铁磁层（FM3）具有与FM2的锥形端面共面的厚度T3和锥形端面。 第二个APC层分离FM2和FM3。 在ABS和从ABS嵌入的MP截面处，净通量都被最小化。

公开(公告)号：US08179634B2

公开(公告)日：2012-05-15

申请号：US12005786

申请日：2007-12-27

申请人： Wen-Chien David Hsiao ,  Ming Jiang ,  Changqing Shi

发明人： Wen-Chien David Hsiao ,  Ming Jiang ,  Changqing Shi

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： Methods and structures for the fabrication of a thin film, perpendicular recording write head are disclosed. The structure provides a pole tip separated from a rear pole by a non-magnetic separation layer located adjacent the flare point. The rear pole contains an imbedded non-magnetic layer. The separated pole tip and imbedded layer aid in the high data rate recording as well as the erasure performance of the write pole structure. The fabrication involves the deposition of two different oxide layers which have mutually high etch selectivities. This characteristic allows a write pole structure to be built wherein the track width is independent of the location of the flare point. The process also produces a structure wherein the placement of the throat height of the shield is self aligned to the flare point of the write pole.

摘要翻译： 公开了用于制造薄膜垂直记录写头的方法和结构。 该结构提供了通过位于火炬点附近的非磁性分离层与后极分离的极尖。 后极包含嵌入的非磁性层。 分离的极尖和嵌入层有助于高数据速率记录以及写柱结构的擦除性能。 该制造涉及沉积具有相互高蚀刻选择性的两个不同的氧化物层。 该特征允许构建写极结构，其中轨道宽度独立于耀斑点的位置。 该过程还产生一种结构，其中屏蔽件的喉部高度的放置与写入极的扩张点自对准。

公开(公告)号：US08110085B2

公开(公告)日：2012-02-07

申请号：US12345828

申请日：2008-12-30

申请人： Wen-Chien David Hsiao ,  Yinshi Liu ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yinshi Liu ,  Yi Zheng

IPC分类号： C25D5/02 ,  G11B5/127 ,  H04R31/00

CPC分类号： C25D7/001 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a magnetic write head using a damascene process that does not form voids in the magnetic structure. An opening is formed in an alumina layer, the opening being configured to define a trench. Then a first layer of magnetic material is deposited into the trench. A CMP process is then performed to remove any voids that have formed in the first magnetic layer. Then a second layer of magnetic material is deposited over the first layer of magnetic material. In another embodiment of the invention, a opening is formed in the alumina layer, and a first layer of magnetic material is electroplated into the opening. A thin layer of non-magnetic material is then deposited, and a second layer of magnetic material is deposited over the thin layer of non-magnetic material. The thin layer of alumina advantageously provides a laminate structure that avoids data erasure.

摘要翻译： 一种使用在磁性结构中不形成空隙的镶嵌工艺形成磁写头的方法。 在氧化铝层中形成开口，该开口构造成限定沟槽。 然后将第一层磁性材料沉积到沟槽中。 然后执行CMP处理以去除在第一磁性层中形成的任何空隙。 然后在第一层磁性材料上沉积第二层磁性材料。 在本发明的另一个实施例中，在氧化铝层中形成开口，并将第一层磁性材料电镀到开口中。 然后沉积薄的非磁性材料层，并且第二层磁性材料沉积在非磁性材料的薄层上。 氧化铝的薄层有利地提供了避免数据擦除的层压结构。

公开(公告)号：US07990652B2

公开(公告)日：2011-08-02

申请号：US11949620

申请日：2007-12-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Quan-chiu Harry Lam ,  Yansheng Luo ,  Vladimir Nikitin ,  Changqing Shi

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Quan-chiu Harry Lam ,  Yansheng Luo ,  Vladimir Nikitin ,  Changqing Shi

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/315

摘要： A magnetic write head for perpendicular magnetic data recording having a notched write pole for reduced magnetic core width (MCW) dependence on skew. The write pole is configured with a notch that can extend to or slightly beyond the flare point of the write pole, and is formed on the leading portion of the write pole. The notch can have a notch depth, as measured from the ABS of 50-200 nm or about 120 nm. The notch can have a notch height, measured in the down track direction that is 40-90 nm or 20-90 percent of the write pole height.

摘要翻译： 用于垂直磁数据记录的磁写头，具有用于减小磁芯宽度（MCW）的偏斜写入极对偏斜的依赖性。 写入极配置有可以延伸到或稍微超过写入极的闪点的凹口，并且形成在写入极的引导部分上。 切口可以具有从50-200nm或约120nm的ABS测量的切口深度。 切口可以具有沿向下方向测量的切口高度，其为40-90nm或写入极高度的20-90％。

公开(公告)号：US20100159154A1

公开(公告)日：2010-06-24

申请号：US12341866

申请日：2008-12-22

申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method in one embodiment includes forming a layer of a nonmagnetic material above an upper surface of a substrate; forming a resist structure above the layer of nonmagnetic material, wherein the resist structure has an undercut; removing a portion of the layer of nonmagnetic material not covered by the resist structure; depositing a layer of magnetic material above the substrate adjacent a remaining portion of the layer of nonmagnetic material such that at least portions of the layer of magnetic material and the remaining portion of the layer of nonmagnetic material lie in a common plane; removing the resist structure; and forming a write pole above the layer of magnetic material and the remaining portion of the layer of nonmagnetic material. Additional methods are also presented.

摘要翻译： 一个实施例中的方法包括在衬底的上表面上方形成非磁性材料层; 在非磁性材料层之上形成抗蚀剂结构，其中抗蚀剂结构具有底切; 去除未被抗蚀剂结构覆盖的非磁性材料层的一部分; 在所述基板的上方邻近所述非磁性材料层的剩余部分沉积一层磁性材料，使得所述磁性材料层和所述非磁性材料层的剩余部分的至少部分位于公共平面中; 去除抗蚀剂结构; 以及在磁性材料层和非磁性材料层的剩余部分之上形成写入极。 还介绍了其他方法。

公开(公告)号：US07675709B2

公开(公告)日：2010-03-09

申请号：US11525789

申请日：2006-09-21

申请人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

发明人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

IPC分类号： G11B5/31 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

摘要翻译： 磁写头结构，使写入场强度最大化，同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量，同时也避免杂散场。 磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于 磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

公开(公告)号：US07639453B2

公开(公告)日：2009-12-29

申请号：US11497202

申请日：2006-08-01

申请人： Hardayal Singh Gill ,  Kuok San Ho ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin

发明人： Hardayal Singh Gill ,  Kuok San Ho ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin

IPC分类号： G11B5/127

CPC分类号： G11B5/3123 ,  G11B5/1278 ,  G11B5/3967

摘要： A magnetic head structure for use in perpendicular magnetic recording. The magnetic head includes a magnetic write head having a return pole with a magnetic shunt structure extending from the back end opposite the ABS. The magnetic shunt structure prevents magnetic field from the write coil from reaching and affecting the read head. More specifically the shunt structure prevents magnetic field from the portion of the write coil beyond the back gap (as measured from the ABS) from magnetizing a magnetic shield of the read head. The shunt structure is also configured so as to avoid stray field writing. The size and shape of the shunt structure is therefore, limited to avoid attracting stray fields that might cause such stray field writing.

摘要翻译： 用于垂直磁记录的磁头结构。 磁头包括具有从与ABS相对的后端延伸的磁分路结构的返回极的磁写头。 磁分路结构防止来自写入线圈的磁场到达并影响读取头。 更具体地说，分流结构防止来自写入线圈的部分的磁场超过后隙（从ABS测量）来磁化读取磁头的磁屏蔽。 分流结构也被配置为避免杂散场写入。 因此，分流结构的尺寸和形状受到限制，以避免吸引可能导致这种杂散场写入的杂散场。

公开(公告)号：US20090154011A1

公开(公告)日：2009-06-18

申请号：US11955277

申请日：2007-12-12

申请人： Wen-Chien David Hsiao ,  Edward Hin Lee ,  Jennifer Ai-Ming Leung

发明人： Wen-Chien David Hsiao ,  Edward Hin Lee ,  Jennifer Ai-Ming Leung

IPC分类号： G11B5/17

CPC分类号： G11B5/3123 ,  G11B5/3136

摘要： A magnetic write head having a write coil configured to dissipate heat away from the write head to minimize thermal protrusion. The write coil is formed as a helical coil having upper and lower leads that are connected by electrically conductive studs formed therebetween. The first and leads extend beyond the studs to form heat conducting fins that conduct heat away from the write head where it can be dissipated into surrounding structure.

摘要翻译： 具有写入线圈的磁写头，该写入线圈构造成从写入头部散发热量以最小化热突起。 写入线圈形成为螺旋线圈，其具有通过在它们之间形成的导电柱而连接的上引线和下引线。 第一和引线延伸超过螺柱，以形成导热翅片，其将热量从写入头传导到可以被散发到周围结构中。

公开(公告)号：US20090152235A1

公开(公告)日：2009-06-18

申请号：US11956292

申请日：2007-12-13

申请人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.

摘要翻译： 一种用于制造具有阶梯式后挡板的磁写头的方法。 在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。 该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。 研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。