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131 条记录 (耗时 0.03 秒)

    Fluid feeding apparatus
    13.
    发明申请
    Fluid feeding apparatus 失效
    流体供给装置

    公开(公告)号：US20050087135A1

    公开(公告)日：2005-04-28

    申请号：US10958623

    申请日：2004-10-06

    申请人： Akira Hioki ,  Satoshi Nakagawa ,  Akimasa Yajima

    发明人： Akira Hioki ,  Satoshi Nakagawa ,  Akimasa Yajima

    IPC分类号： B01J4/00 ,  B08B9/02 ,  B08B9/08 ,  C23C16/18 ,  C23C16/44 ,  C23C16/455 ,  H01L21/205 ,  C23C16/00

    CPC分类号： B08B9/0321 ,  B08B9/08 ,  C23C16/18 ,  C23C16/4402 ,  Y10T137/4259

    摘要： A fluid feeding apparatus capable of excluding the outer environmental influences in feeding a fluid susceptible to contamination, decomposition or denaturation on contact with the outer environment. The includes comprises at least one liquid source container, a cleaning and/or diluting liquid container, a waste liquid collection container, an inert gas feed pipe A, an inert gas feed pipe B, an evacuation pipe connecting to a vacuum source, and a fluid feed pipe for introducing the fluid to a process. The source container has two pipes. The first pipe has valves arranged therein at positions nearer to and farther from the source container, respectively. The second pipe has two valves arranged therein at positions nearer to and farther from the container, respectively. The path between the valves 1 and 4 and the path between the valves 2 and 5 are connected via a connecting pipe C having a valve 3.

    摘要翻译： 一种流体输送装置，其能够排除在与外部环境接触时容易受到污染，分解或变性的流体供给的外部环境影响。 包括至少一个液体源容器，清洁和/或稀释液体容器，废液收集容器，惰性气体供给管A，惰性气体供给管B，连接到真空源的抽空管，以及 用于将流体引入流程的流体供给管。 源容器有两个管道。 第一管子分别在靠近和远离源容器的位置处布置有阀。 第二管有两个阀分别设置在靠近和远离容器的位置。 阀1和4之间的路径以及阀2和5之间的路径经由具有阀3的连接管C连接。

    Apparatus and method for manufacturing semiconductor device
    15.
    发明授权
    Apparatus and method for manufacturing semiconductor device 失效
    半导体器件制造装置及方法

    公开(公告)号：US5989929A

    公开(公告)日：1999-11-23

    申请号：US119588

    申请日：1998-07-21

    申请人： Hideo Nikoh ,  Shinichi Imai ,  Nobuhiro Jiwari ,  Satoshi Nakagawa ,  Shoji Matsumoto ,  Yoji Bito

    发明人： Hideo Nikoh ,  Shinichi Imai ,  Nobuhiro Jiwari ,  Satoshi Nakagawa ,  Shoji Matsumoto ,  Yoji Bito

    IPC分类号： H01J37/32 ,  H01L21/00

    CPC分类号： H01L21/67253 ,  H01J37/321 ,  H01J37/32422 ,  H01J37/32467 ,  H01J37/32871 ,  H01J37/3299 ,  H01L21/67069 ,  H01L21/67248

    摘要： A reactor is composed of a lower frame of a chamber, a quartz dome, an upper electrode, an 0 ring, and the like. A lower electrode and a substrate as a workpiece to be processed thereon are disposed in the reactor. The temperature of the quartz dome is maintained at a temperature of 180.degree. C. or higher by means of a heater. Fluorocarbon gas such as C.sub.2 F.sub.6 gas or C.sub.4 F.sub.8 gas is introduced into the reactor through a gas inlet and RF power from a first RF power source is applied to an antenna coil to produce a plasma and thereby etch an oxide film on the substrate. By heating the quartz dome to a high temperature, a deposit which hinders the release of oxygen from a wall face is prevented from being attached and the deposit on the bottom of the hole which causes an etch stop during processing is removed with oxygen. This prevents the etch stop during an etching process for forming a deep hole.

    摘要翻译： 反应器由室的下框架，石英圆顶，上电极，O形环等构成。 作为待加工的工件的下电极和基板设置在反应器中。 通过加热器将石英圆顶的温度保持在180℃或更高的温度。 将碳氟化合物气体如C 2 F 6气体或C 4 F 8气体通过气体入口引入反应器中，并且将来自第一RF电源的RF功率施加到天线线圈以产生等离子体，从而蚀刻衬底上的氧化物膜。 通过将石英圆顶加热到高温，防止阻碍氧从壁面释放的沉积物被附着，并且用氧气除去在加工过程中导致蚀刻停止的孔的沉积物。 这防止了在用于形成深孔的蚀刻工艺期间的蚀刻停止。

    Blowing agents of tetrazoles and their derivatives
    16.
    发明授权
    Blowing agents of tetrazoles and their derivatives 失效
    四唑及其衍生物的发泡剂

    公开(公告)号：US5646292A

    公开(公告)日：1997-07-08

    申请号：US643357

    申请日：1996-05-06

    申请人： Satoshi Nakagawa ,  Hideki Ogawa ,  Hiroaki Tanaka ,  Atsuhiro Onishi

    发明人： Satoshi Nakagawa ,  Hideki Ogawa ,  Hiroaki Tanaka ,  Atsuhiro Onishi

    IPC分类号： C07D401/12 ,  A01N25/20 ,  C06D5/00 ,  C07D257/06 ,  C08J9/10 ,  C08K5/3472 ,  C09K3/00

    CPC分类号： C07D257/06

    摘要： Disclosed is a novel blowing agent of tetrazoles and their derivatives. The blowing agent comprising tetrazole derivatives is harmless, odorless and inexpensive. Moreover, the agent is low in physical sensitivities and safe in use, and generates clean gas by being sharply decomposed only due to temperature. The blowing agent of tetrazoles and their derivatives employs aminotetrazole derivatives represented by the general formula (1). The blowing agent offers foaming agents for resin molded bodies having good thermal properties, inflators for air bags serving as automobile safety protection, or smoking agents for diffusing chemicals by a low-cost inexpensive synthetic process.

    摘要翻译： 公开了四唑及其衍生物的新型发泡剂。 包含四唑衍生物的发泡剂是无害的，无臭的和廉价的。 此外，该物质的物理敏感性低，使用安全，并且由于温度而被急剧分解而产生清洁气体。 四唑及其衍生物的发泡剂使用由通式（1）表示的氨基四唑衍生物。 发泡剂提供具有良好热性质的树脂成型体的发泡剂，用作汽车安全保护的气囊的充气机，或者通过低成本廉价的合成方法来扩散化学品的吸烟剂。

    Processes for producing styrene copolymers
    17.
    发明授权
    Processes for producing styrene copolymers 失效
    生产苯乙烯共聚物的方法

    公开(公告)号：US5459210A

    公开(公告)日：1995-10-17

    申请号：US197718

    申请日：1994-02-17

    申请人： Hayato Kihara ,  Satoshi Nakagawa ,  Shuji Yoshimi

    发明人： Hayato Kihara ,  Satoshi Nakagawa ,  Shuji Yoshimi

    IPC分类号： C08F2/02 ,  C08F2/06 ,  C08F2/20 ,  C08F212/08 ,  C08F4/38

    CPC分类号： C08F212/08

    摘要： Disclosed are a styrene copolymer having a weight average molecular weight of about 200,000 to 2,000,000, having 1 to 20 branching points in the Z-average molecular weight, and having a methyl ethyl ketone/methanol mixture-insoluble matter content of not more than 5% by weight and a methanol-soluble matter content of not more than 5% by weight; processes for preparing the styrene copolymer; a polystyrene resin composition containing the styrene copolymer; and injection-molded article prepared by injection-molding the polystyrene resin composition.

    摘要翻译： 公开了重均分子量为约200,000至2,000,000，Z平均分子量为1至20个支化点，并且甲基乙基酮/甲醇混合物不溶物含量不超过5％的苯乙烯共聚物， 并且甲醇可溶物质含量不超过5重量％; 制备苯乙烯共聚物的方法; 含有苯乙烯共聚物的聚苯乙烯树脂组合物; 和通过注射成型聚苯乙烯树脂组合物制备的注射成型制品。

    Vertically movable staircase
    18.
    发明授权
    Vertically movable staircase 失效
    垂直移动的楼梯

    公开(公告)号：US5213191A

    公开(公告)日：1993-05-25

    申请号：US887047

    申请日：1992-05-22

    申请人： Susumu Tahara ,  Satoshi Nakagawa ,  Misayo Nakamura

    发明人： Susumu Tahara ,  Satoshi Nakagawa ,  Misayo Nakamura

    IPC分类号： B66B9/08 ,  B66B21/06

    CPC分类号： B66B21/06 ,  B66B9/08

    摘要： A vertically movable staircase carries on a vertical pillar a plurality of steps sequentially secured to the pillar along a spiral line thereon, the pillar being vertically moved while being axially rotated by a driving device. The staircase is space saving and simple in structure.

    摘要翻译： 可垂直移动的楼梯沿着螺旋线顺序地固定在支柱上的多个台阶上承载有垂直支柱，该支柱在被驱动装置轴向旋转的同时垂直移动。 楼梯节省空间，结构简单。