HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
    11.
    发明申请
    HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD 有权
    热处理设备和热处理方法

    公开(公告)号:US20120258415A1

    公开(公告)日:2012-10-11

    申请号:US13438234

    申请日:2012-04-03

    IPC分类号: F27D21/00 F27D3/00

    CPC分类号: H01L21/67109 H01L21/67248

    摘要: A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T1×(1−α)+T2×α, α>1, where T1 and T2 represent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.

    摘要翻译: 一种热处理设备,包括:处理容器,用于处理保存在船上的晶片; 用于加热处理容器的加热器; 以及用于控制加热器的控制部。 加热器温度传感器设置在加热器和处理容器之间,容器内温度传感器设置在处理容器中,并且可移动的温度传感器设置在船上。 温度传感器连接到温度估计部。 温度估计部分选择三种类型的温度传感器中的两种,例如, 可移动温度传感器和容器内温度传感器,并根据以下公式确定晶片的温度:T = T1×(1-α)+ T2×α,α> 1,其中T1和T2表示检测温度 的选定温度传感器,α表示混合比。

    Heat Treatment Apparatus, Heater, and Method for Manufacturing the Heater
    13.
    发明申请
    Heat Treatment Apparatus, Heater, and Method for Manufacturing the Heater 有权
    热处理装置,加热器及加热器制造方法

    公开(公告)号:US20100224614A1

    公开(公告)日:2010-09-09

    申请号:US12223162

    申请日:2007-02-07

    IPC分类号: F27D11/00 H05B3/02

    摘要: The present invention provides a heat treatment apparatus having a high degree of freedom of an outlet design and capable of adjusting the rate of a reduction in the temperature of each part of a heater without using an adjustment valve. The heat treatment apparatus having a simple flow path structure can be constructed with simplified sealing and a reduced cost.The heat treatment apparatus 1 includes a process chamber 2, a tubular heater 3, a heat exhaust system 25 and a cooling section 26. The process chamber 2 accommodates objects W to be placed in multiple stages and to be treated. A predetermined heat treatment is performed in the process chamber. The heater 3 surrounds an outer circumference of the process chamber 2 and heats the objects W to be treated. The heat exhaust system 25 is adapted to exhaust an atmosphere present in a space 24 existing between the heater 3 and the process chamber 2. The cooling section 26 is adapted to blow a cooling fluid into the space 24 to cool the atmosphere. The heater 3 includes a tubular heat insulator 17, a heat generating resistor 18 and an outer shell 20. The heat generating resistor 18 is provided on an inner circumference of the heat insulator 17. The outer shell 20 is provided on an outer circumference of the heat insulator 17. The cooling section 26 includes at least one annular flow path 28 and an outlet 29. The annular flow path 28 is arranged between the heat insulator 17 and the outer shell 20. The outlet 29 is provided in the heat insulator 17. The outlet 29 is arranged to ensure that the cooling fluid is blown out of the outlet 29 toward a vertical central axis of the heat insulator 17 or in a direction oblique to the direction toward vertical central axis of the heat insulator 17.

    摘要翻译: 本发明提供一种热处理装置,其具有出口设计的高自由度,并且能够调节加热器的每个部件的温度降低的速率而不使用调节阀。 具有简单的流路结构的热处理装置可以以简单的密封和降低的成本构成。 热处理设备1包括处理室2,管状加热器3,散热系统25和冷却部分26.处理室2容纳待放置的多个物体W并进行处理。 在处理室中进行预定的热处理。 加热器3围绕处理室2的外周并加热被处理物体W. 散热系统25适于排出存在于加热器3和处理室2之间的空间24中的气氛。冷却部分26适于将冷却流体吹入空间24以冷却大气。 加热器3包括管状隔热件17,发热电阻18和外壳20.发热电阻18设置在隔热材料17的内周上。外壳20设置在绝热体17的外周。 绝热体17.冷却部分26包括至少一个环形流动路径28和出口29.环形流路28设置在绝热体17和外壳20之间。出口29设置在绝热体17中。 出口29布置成确保冷却流体从出口29朝向隔热件17的垂直中心轴线或者沿着与隔热件17的垂直中心轴方向倾斜的方向吹出。

    Aperture card reader with automatic and manual card feed
    19.
    发明授权
    Aperture card reader with automatic and manual card feed 失效
    光圈读卡器,带有自动和手动进纸

    公开(公告)号:US4244642A

    公开(公告)日:1981-01-13

    申请号:US49967

    申请日:1979-06-19

    CPC分类号: G03B21/116 G06K17/0016

    摘要: An aperture card reader is equipped with a unit detachably mountable on the main body for automatically feeding aperture cards. The aperture card can automatically be placed between presser plates while the unit is mounted on the main body or, alternatively, can be manually fed when the unit is detached from the main body. The aperture card is automatically fed between the presser plates with the card in a position in which the minor sides of the aperture card are oriented in the direction of feed, while the card can be manually placed between the presser plates by feeding the card in a position in which the major sides of the card are oriented in the direction of feed. The image of the microfilm mounted on the aperture card can be projected on a screen in a horizontal position when the card is fed automatically, or in a vertical position when the card is fed manually.

    摘要翻译: 光圈读卡器配备有可拆卸地安装在主体上用于自动馈送光圈卡的单元。 当单元安装在主体上时,光圈卡可以自动放置在压板之间,或者当本机与主体分离时可以手动进给。 光圈卡被自动地进给到压板与卡之间的位置中,孔卡的小侧在进给方向上定向,而卡可以通过将卡馈送到卡片中来手动地放置在压板之间 卡的主要侧面朝向进给方向的位置。 安装在孔卡上的缩微胶片的图像可以在卡被自动进给时处于水平位置的屏幕上,或者当手动进给卡时处于垂直位置。